US2023050169A1PendingUtilityA1

Nitride protective coatings on aerospace components and methods for making the same

Assignee: APPLIED MATERIALS INCPriority: May 21, 2020Filed: Oct 31, 2022Published: Feb 16, 2023
Est. expiryMay 21, 2040(~13.8 yrs left)· nominal 20-yr term from priority
C23C 28/34C23C 16/45525C23C 16/403Y02T50/60F01D 5/288F01D 5/005C23C 16/342F05D 2230/90C23C 28/042C23C 16/50C23C 28/345F05D 2230/80C23C 28/321C23C 16/45536F05D 2300/2112F05D 2260/95
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Claims

Abstract

Embodiments of the present disclosure generally relate to protective coatings on various substrates including aerospace components and methods for depositing the protective coatings. In one or more embodiments, an aerospace component has a protective coating containing an aluminum oxide layer disposed on a surface of the aerospace component, a metal-containing catalytic layer disposed on the aluminum oxide layer, and a boron nitride layer disposed on the metal-containing catalytic layer. The aerospace component contains a superalloy having at least nickel and aluminum. In some examples, the aerospace component is a turbine blade, a turbine vane, a support member, a frame, a rib, a fin, a pin fin, a fuel nozzle, a combustor liner, a combustor shield, a heat exchanger, a fuel line, a fuel valve, an internal cooling channel, or any combination thereof.

Claims

exact text as granted — not AI-modified
What is claimed is: 
     
         1 . An aerospace component having a protective coating, comprising:
 an aluminum oxide layer disposed on a surface of the aerospace component, wherein the aerospace component comprises a superalloy comprising at least nickel and aluminum;   a metal-containing catalytic layer disposed on the aluminum oxide layer; and   a boron nitride layer disposed on the metal-containing catalytic layer.   
     
     
         2 . The aerospace component of  claim 1 , wherein the metal-containing catalytic layer comprises nickel, chromium, cobalt, molybdenum, tungsten, tantalum, aluminum, titanium, iron, rhenium, ruthenium, hafnium, iridium, platinum, palladium, gold, silver, oxides thereof, alloys thereof, or any combination thereof. 
     
     
         3 . The aerospace component of  claim 1 , wherein each of the metal-containing catalytic layer and the superalloy comprises one or more of the same metals. 
     
     
         4 . The aerospace component of  claim 1 , wherein the metal-containing catalytic layer has a thickness of about 0.3 nm to about 1.5 nm. 
     
     
         5 . The aerospace component of  claim 1 , wherein the metal-containing catalytic layer was deposited by a vapor deposition process selected from atomic layer deposition (ALD), chemical vapor deposition (CVD), physical vapor deposition (PVD), or combinations thereof. 
     
     
         6 . The aerospace component of  claim 1 , wherein the boron nitride layer comprises hexagonal boron nitride (hBN). 
     
     
         7 . The aerospace component of  claim 1 , wherein the boron nitride layer has a thickness of about 5 nm to about 500 nm. 
     
     
         8 . The aerospace component of  claim 1 , wherein the boron nitride layer was deposited by a vapor deposition process selected from atomic layer deposition (ALD), plasma-enhanced ALD (PE-ALD), chemical vapor deposition (CVD), plasma-enhanced CVD (PE-CVD), or combinations thereof. 
     
     
         9 . The aerospace component of  claim 1 , wherein the aluminum oxide layer was formed on the surface of the aerospace component by a vapor deposition process selected from an atomic layer deposition (ALD) process or a chemical vapor deposition (CVD) process. 
     
     
         10 . The aerospace component of  claim 1 , wherein the aluminum oxide layer has a thickness of about 1 nm to about 1,500 nm. 
     
     
         11 . The aerospace component of  claim 1 , wherein the aerospace component is a turbine blade, a turbine vane, a support member, a frame, a rib, a fin, a pin fin, a fuel nozzle, a combustor liner, a combustor shield, a heat exchanger, a fuel line, a fuel valve, an internal cooling channel, or any combination thereof. 
     
     
         12 . The aerospace component of  claim 1 , wherein the surface of the aerospace component is an interior surface within a cavity of the aerospace component, and wherein the cavity has an aspect ratio of greater than 2 to about 1,000. 
     
     
         13 . An aerospace component having a protective coating, comprising:
 an aluminum oxide layer disposed on a surface of the aerospace component, wherein the aerospace component comprises a superalloy comprising at least nickel;   a metal-containing catalytic layer disposed on the aluminum oxide layer; and   a boron nitride layer disposed on the metal-containing catalytic layer, wherein the boron nitride layer comprises hexagonal boron nitride (hBN) and has a thickness of about 5 nm to about 500 nm.   
     
     
         14 . The aerospace component of  claim 13 , wherein the metal-containing catalytic layer comprises nickel, chromium, cobalt, molybdenum, tungsten, tantalum, aluminum, titanium, iron, rhenium, ruthenium, hafnium, iridium, platinum, palladium, gold, silver, oxides thereof, alloys thereof, or any combination thereof. 
     
     
         15 . The aerospace component of  claim 13 , wherein the metal-containing catalytic layer has a thickness of about 0.3 nm to about 1.5 nm, and wherein the aluminum oxide layer has a thickness of about 1 nm to about 1,500 nm. 
     
     
         16 . The aerospace component of  claim 13 , wherein the aerospace component is a turbine blade, a turbine vane, a support member, a frame, a rib, a fin, a pin fin, a fuel nozzle, a combustor liner, a combustor shield, a heat exchanger, a fuel line, a fuel valve, an internal cooling channel, or any combination thereof. 
     
     
         17 . The aerospace component of  claim 13 , wherein the surface of the aerospace component is an interior surface within a cavity of the aerospace component, and wherein the cavity has an aspect ratio of greater than 2 to about 1,000. 
     
     
         18 . An aerospace component having a protective coating, comprising:
 an aluminum oxide layer disposed on a surface of the aerospace component, wherein the aerospace component comprises a superalloy comprising at least nickel and aluminum;   a metal-containing catalytic layer disposed on the aluminum oxide layer, wherein the metal-containing catalytic layer comprises nickel, chromium, cobalt, molybdenum, tungsten, tantalum, aluminum, titanium, iron, rhenium, ruthenium, hafnium, iridium, platinum, palladium, gold, silver, oxides thereof, alloys thereof, or any combination thereof; and   a boron nitride layer disposed on the metal-containing catalytic layer.   
     
     
         19 . The aerospace component of  claim 18 , wherein the aerospace component is a turbine blade, a turbine vane, a support member, a frame, a rib, a fin, a pin fin, a fuel nozzle, a combustor liner, a combustor shield, a heat exchanger, a fuel line, a fuel valve, an internal cooling channel, or any combination thereof. 
     
     
         20 . The aerospace component of  claim 18 , wherein the surface of the aerospace component is an interior surface within a cavity of the aerospace component, and wherein the cavity has an aspect ratio of greater than 2 to about 1,000.

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