Rf baw resonator filter architecture for 6.5ghz wi-fi 6e coexistence and other ultra-wideband applications

Abstract

A multi-stage matching network filter circuit device. The device comprises bulk acoustic wave (BAW) resonator device having an input node, an output node, and a ground node. A first matching network circuit is coupled to the input node. A second matching network circuit is coupled to the output node. A ground connection network circuit coupled to the ground node. The first or second matching network circuit can include an inductive ladder network including a plurality of series inductors in a series configuration and a plurality of grounded inductors wherein each of the plurality of grounded inductors is coupled to the connection between each connected pair of series inductors. The inductive ladder network can include one or more LC tanks, wherein each of the one or more LC tanks is coupled between a connection between a series inductor and a subsequent series inductor, which is also coupled to a grounded inductor.

What is claimed is: 
     
         1 . A multi-stage matching network filter circuit device, the device comprising:
 a bulk acoustic wave (BAW) resonator device having an input node, an output node, and a ground connection region;   a first matching network circuit coupled to the input node;   a second matching network circuit coupled to the output node; and   a ground connection network circuit coupled to the ground connection region and a circuit ground node.   
     
     
         2 . The device of  claim 1  wherein the first matching network circuit or the second matching network circuit comprises one or more series inductors and one or more grounded inductors configured as an inductive ladder network. 
     
     
         3 . The device of  claim 2  wherein the inductive ladder network includes one or more LC tanks, wherein each of the one or more LC tanks is coupled to one of the one or more series inductors. 
     
     
         4 . The device of  claim 2  wherein the inductive ladder network includes one or more shunt capacitors, wherein each of the one or more shunt capacitors is coupled between one of the one or more grounded inductors and the circuit ground node. 
     
     
         5 . The device of  claim 1  wherein the first matching network circuit or the second matching network circuit comprises at least an LC tank, a first series inductor, a second series inductor, and a grounded inductor;
 wherein the first series inductor, the LC tank, and the second series inductor are coupled in series, and wherein the grounded inductor is coupled to the connection between the LC tank and the second series inductor. 
 
     
     
         6 . The device of  claim 1  wherein the first matching network circuit or the second matching network circuit comprises an LC tank. 
     
     
         7 . The device of  claim 1  wherein the ground connection network circuit comprises one or more grounded inductors. 
     
     
         8 . The device of  claim 1  wherein the BAW resonator device comprises a plurality of series resonator devices and a plurality of shunt resonator devices configured in a ladder configuration, wherein each of the plurality of shunt resonator devices is coupled to the circuit ground node via the ground connection network circuit. 
     
     
         9 . The device of  claim 8  wherein each of the series resonator devices comprises
 a substrate; 
 a support layer overlying the substrate, the support layer having an air cavity; 
 a first electrode overlying the air cavity and a portion of the support layer; 
 a first passivation layer overlying the support layer and being physically coupled to the first electrode; 
 a piezoelectric film overlying the support layer, the first electrode, and the air cavity, the piezoelectric film having an electrode contact via; 
 a second electrode formed overlying the piezoelectric film; and 
 a top metal formed overlying the piezoelectric film, the top metal being physically coupled to the first electrode through the electrode contact via 
 
     
     
         10 . A multi-stage matching network filter circuit device, the device comprising:
 a bulk acoustic wave (BAW) resonator device having an input node, an output node, and a ground connection region;   a first matching network circuit coupled to the input node, wherein the first matching network circuit comprises at least an LC tank, a first series inductor, a second series inductor, and a grounded inductor, wherein the first series inductor, the LC tank, and the second series inductor are coupled in series, and wherein the grounded inductor is coupled to the connection between the LC tank and the second series inductor;   a second matching network circuit coupled to the output node; and   a ground connection network circuit coupled to the ground connection region and a circuit ground node.   
     
     
         11 . The device of  claim 10  wherein the BAW resonator device comprises a plurality of series resonator devices and a plurality of shunt resonator devices configured in a ladder configuration, wherein each of the plurality of shunt resonator devices is coupled to the circuit ground node via the ground connection network circuit. 
     
     
         12 . The device of  claim 10  wherein the second matching network includes a plurality of second series inductors and a plurality of second grounded inductors configured as a second inductive ladder network. 
     
     
         13 . The device of  claim 10  wherein the ground connection network circuit comprises one or more grounded inductors. 
     
     
         14 . A multi-stage matching network filter circuit device, the device comprising:
 a bulk acoustic wave (BAW) resonator device having an input node, an output node, and a ground connection region;   a first matching network circuit coupled to the input node, wherein the first matching network includes a plurality of first series inductors and a plurality of first grounded inductors configured as a first inductive ladder network, wherein the first inductive ladder network includes an LC tank, wherein the LC tank is coupled between a pair of the first series inductors;   a second matching network circuit coupled to the output node, wherein the second matching network includes a plurality of second series inductors and a plurality of second grounded inductors configured as a second inductive ladder network, wherein the second inductive ladder network includes a shunt capacitor, wherein the shunt capacitor is coupled between one of the plurality of grounded inductors of the second inductive ladder network and the circuit ground node; and   a ground connection network circuit coupled to the ground connection region and a circuit ground node.   
     
     
         15 . The device of  claim 14  wherein the BAW resonator device comprises a plurality of series resonator devices and a plurality of shunt resonator devices configured in a ladder configuration, wherein each of the plurality of shunt resonator devices is coupled to the circuit ground node via the ground connection network circuit. 
     
     
         16 . The device of  claim 14  wherein the ground connection network circuit comprises a plurality of grounded inductors.