Interlocked stepped retaining ring

Abstract

Embodiments of the disclosure generally relate to a retaining ring assembly having an annular lower portion, and an annular upper portion. The annular lower portion includes a step feature and an interlocking feature. In some configurations, adhesive is selective deposited on the step feature and the interlocking feature. The annular upper portion includes an opposing step recess, a first gap feature, an opposing interlocking recess and a second gap feature. When the upper portion and the lower portion are mated together, the interlocking recess is snapped into the upper portion tightly securing the lower portion to the upper portion.

What is claimed is: 
     
         1 . A retaining ring assembly, comprising:
 an annular upper portion comprising:
 an opposing interlocking recess, disposed between a first gap feature and a second gap feature, comprising:
 a first opposing interlocking recess wall positioned at a first angle; and 
 a second opposing interlocking recess wall positioned at a second angle; and 
 
   an annular lower portion comprising:
 a lower portion surface; 
 a step feature disposed on the lower portion surface between an inner wall of the retaining ring and the first gap feature; and 
 an interlocking feature, disposed on the lower portion surface between the first gap feature and the second gap feature, comprising:
 a first interlocking feature wall positioned at the first angle, wherein the first angle is formed by the first interlocking feature wall relative to the lower portion surface, and 
 a second interlocking feature wall at the second angle, wherein the second angle is formed by the second interlocking feature wall relative to the lower portion surface. 
 
   
     
     
         2 . The retaining ring assembly of  claim 1 , wherein the annular upper portion includes an opposing step recess. 
     
     
         3 . The retaining ring assembly of  claim 2 , wherein the opposing step recess extends into the opposing interlocking recess of the annular upper portion. 
     
     
         4 . The retaining ring assembly of  claim 1 , wherein an adhesive is selectively disposed on the step feature and the interlocking feature. 
     
     
         5 . The retaining ring assembly of  claim 4 , wherein the adhesive includes an epoxy material. 
     
     
         6 . The retaining ring assembly of  claim 1 , wherein the width of the step feature is between ⅓ and ⅕ of the width of the interlocking feature. 
     
     
         7 . The retaining ring assembly of  claim 1 , wherein the height of the interlocking feature is between ½ and ⅓ the height of the step feature. 
     
     
         8 . The retaining ring assembly of  claim 1 , wherein the opposing interlocking recess further comprises an inner interlocking recess width and an outer interlocking recess width, and wherein the interlocking feature further comprises an inner interlocking feature width and an outer interlocking feature width, and wherein the inner interlocking recess width is shorter in length than the outer interlocking feature width. 
     
     
         9 . A retaining ring assembly, comprising:
 an annular lower portion comprising:
 an upper surface; 
 a step feature; and 
 an interlocking feature; and 
   an annular upper portion comprising:
 a lower surface; 
 an opposing step recess, wherein the opposing step recess is recessed into the lower surface; 
 a first gap feature, wherein the first gap feature is in contact with the upper surface of the annular lower portion; 
 an opposing interlocking recess, wherein the opposing interlocking recess is recessed into the lower surface; 
 a second gap feature, wherein the second gap feature is in contact with the upper surface of the annular lower portion; and 
 an adhesive disposed between the interlocking feature and the opposing interlocking recess, and disposed between the step feature and the opposing step recess. 
   
     
     
         10 . The retaining ring assembly of  claim 9 , wherein the adhesive includes an epoxy material. 
     
     
         11 . The retaining ring assembly of  claim 9 , wherein both the step feature and interlocking feature are annular. 
     
     
         12 . The retaining ring assembly of  claim 9 , wherein the both the opposing step recess and the opposing interlocking recess are annular. 
     
     
         13 . The retaining ring assembly of  claim 9 , wherein the adhesive is selectively disposed on the step feature and the interlocking feature. 
     
     
         14 . The retaining ring assembly of  claim 9 , wherein the width of the step feature is between ⅓ and ⅕ of the width of the interlocking feature. 
     
     
         15 . The retaining ring assembly of  claim 1 , wherein the height of the interlocking feature is between ½ and ⅓ the height of the step feature. 
     
     
         16 . The retaining ring assembly of  claim 1 , wherein the opposing interlocking recess further comprises an inner interlocking recess width and an outer interlocking recess width, and wherein the interlocking feature further comprises an inner interlocking feature width and an outer interlocking feature width, and wherein the inner interlocking recess width is shorter in length than the outer interlocking feature width. 
     
     
         17 . A method of forming a retaining ring, comprising:
 selectively depositing a thin film of adhesive onto an upper surface of an annular lower portion of the retaining ring, wherein selectively depositing a thin film comprises depositing a thin film on a surface and walls of an interlocking feature and a surface and wall of a step feature; and   pressing the annular lower portion together with an annular upper portion of the retaining ring such that the interlocking feature and step feature are positioned within an opposing interlocking recess of the annular upper portion and an opposing step recess of the annular upper portion.   
     
     
         18 . The method of  claim 17 , wherein selectively depositing a thin film further comprises not depositing a thin film in a first region of an upper portion and lower portion, and not depositing a thin film in a second region of an upper portion and lower portion. 
     
     
         19 . The method of  claim 18 , wherein pressing the lower portion together with the upper portion comprises snapping the lower portion together with the upper portion. 
     
     
         20 . The method of  claim 19 , wherein the upper surface of the lower portion is in physical contact with a flat surface of a first gap feature of the upper portion.