Ligand-modified filter and methods for reducing metals from liquid compositions

Abstract

Described are filter materials including a polyol ligand, such as n-methylglucamine, and/or a polyphosphonic acid ligand, which are highly effective for filtering metals or metal ions from fluids. The filter materials can be particularly useful to filter basic and acidic fluid compositions, such as those used for wet etching, removing photoresist, and cleaning steps in microelectronic device manufacturing.

1 - 20 . (canceled) 
     
     
         21 . A filter material comprising a polyphosphonic acid ligand, wherein the filter material is configured to be used in conjunction with a microelectronic fabrication system for providing a metal- or metal ion-depleted liquid composition. 
     
     
         22 . The filter material of  claim 21 , wherein the filter material is configured to provide a metal- or metal ion-depleted organic solvent liquid composition. 
     
     
         23 . The filter material of  claim 21 , wherein the filter material is configured to provide a metal- or metal ion-depleted aqueous acidic liquid composition having a pH of about 3 or lower. 
     
     
         24 . A method of removing one or more metal(s) or metal ion(s) from a liquid composition, the method comprising:
 contacting a filter material with a liquid composition comprising one or more metal or metal ions, the filter material comprising a polyphosphonic acid ligand, and   reducing an amount of the one or more metal or metal ions in the liquid composition.   
     
     
         25 . The filter material of  claim 21 , wherein the polyphosphonic acid ligand is a diphosphonic acid ligand. 
     
     
         26 . The filter material of  claim 21 , wherein the polyphosphonic acid ligand is an amino polyphosphonic acid ligand. 
     
     
         27 . The filter material of  claim 21 , wherein the polyphosphonic acid ligand is selected from the group consisting of 1-(aminoethylidene)-1,1-diphosphonic acid, 4-amino-1-hydroxybutane-1, 1-biphosphonic acid (alendronic acid), (4-amino-1,1,1-trihydroxy-2-phosphonobutan-2-yl)phosphonic acid, (1-amino-1,1-pentanediyl)bis(phosphonic acid), (1-amino-1,1-heptanediyl)bis(phosphonic acid), and (1-amino-1,3-propanediyl)bis(phosphonic acid). 
     
     
         28 . The filter material of  claim 21 , wherein the filter material comprises a polymeric material. 
     
     
         29 . The filter material of  claim 21 , wherein the filter material is configured to provide a metal- or metal ion-depleted aqueous basic liquid composition having a pH in a range from 10 to 14. 
     
     
         30 . The filter material of  claim 21 , wherein the filter material is a porous polymeric filter membrane comprising a polymeric material selected from the group consisting of a polyamide, a polyimide, a polysulfone, a polyether-sulfone, a polyolefin, a halogenated polymer, and a combination thereof. 
     
     
         31 . The method of  claim 24 , wherein the liquid composition is an aqueous basic liquid composition having a pH in a range from 10 to 14. 
     
     
         32 . The method of  claim 24 , wherein the liquid composition is an aqueous basic liquid composition comprising tetramethyl ammonium hydroxide (TMAH), tetrabutyl ammonium hydroxide (TBAH), ammonium hydroxide (NH 4 OH), or a mixture thereof. 
     
     
         33 . The method of  claim 24 , wherein the liquid composition aqueous acidic liquid composition having a pH of about 3 or lower. 
     
     
         34 . The method of  claim 24 , wherein the liquid composition is an aqueous acidic composition comprising HCl, H 2 SO 4 , H 3 PO 4 , HNO 3 , Hf, or mixtures thereof. 
     
     
         35 . The method of  claim 24 , wherein the liquid composition comprises an organic solvent. 
     
     
         36 . The method of  claim 24 , wherein the one or more metal or metal ions are alkali earth metals, alkaline earth metals, transition metals, post transition metals, or mixtures thereof. 
     
     
         37 . The method of  claim 24 , wherein the one or more metal or metal ions are Na, K, Al, Ca, Ti, Cr, Mn, Fe, Zn, Cu, Mg, or mixtures thereof. 
     
     
         38 . The method of  claim 24 , wherein the polyphosphonic acid ligand is a diphosphonic acid ligand. 
     
     
         39 . The method of  claim 24 , wherein the polyphosphonic acid ligand is an amino polyphosphonic acid ligand. 
     
     
         40 . The method of  claim 24 , wherein the polyphosphonic acid ligand is selected from the group consisting of 1-(aminoethylidene)-1,1-diphosphonic acid, 4-amino-1-hydroxybutane-1, 1-biphosphonic acid (alendronic acid), (4-amino-1,1,1-trihydroxy-2-phosphonobutan-2-yl)phosphonic acid, (1-amino-1,1-pentanediyl)bis(phosphonic acid), (1-amino-1,1-heptanediyl)bis(phosphonic acid), and (1-amino-1,3-propanediyl)bis(phosphonic acid).