Actuator

Abstract

An actuator includes a suspension plate, an outer frame, one or more supporting elements, a piezoelectric sheet, an inlet plate, and a resonance sheet. The suspension plate, the outer frame, the supporting element, the piezoelectric sheet, the inlet plate, and the resonance sheet are fabricated as a modular structure, and the modular structure has a length, a width, and a height.

What is claimed is: 
     
         1 . An actuator comprising:
 a suspension plate having a first surface and a second surface, wherein the suspension plate is capable of bending and vibrating;   an outer frame disposed around an outer periphery of the suspension plate;   at least one supporting element connected between the suspension plate and the outer frame to provide a flexible support for the suspension plate;   a piezoelectric sheet disposed above the first surface of the suspension plate;   an inlet plate disposed on the second surface of the suspension plate, wherein the inlet plate has at least one inlet hole, at least one convergence channel, and a convergence chamber; the at least one inlet hole is configured to introduce a gas flow into the actuator, and the at least one convergence channel is corresponding to the at least one inlet hole for guiding the gas flow introduced from the at least one inlet hole to be converged into the convergence chamber; and   a resonance sheet disposed between the inlet plate and the suspension plate, wherein the resonance sheet has a perforation corresponding to the convergence chamber of the inlet plate, and a movable portion is provided in a periphery of the perforation;   wherein the suspension plate, the outer frame, the at least one supporting element, the piezoelectric sheet, the inlet plate, and the resonance sheet are fabricated as a modular structure, and the modular structure has a length, a width, and a height.   
     
     
         2 . The actuator according to  claim 1 , wherein a first chamber is provided between the resonance sheet, the suspension plate, the at least one supporting element, and the outer frame, so that the piezoelectric sheet is driven and bent in the first chamber; when the suspension plate vibrates, the gas flow is introduced into the actuator from the at least one inlet hole of the inlet plate, converged into the convergence chamber through the at least one convergence channel, flows through the perforation of the resonance sheet and enters the first chamber, thereby the suspension plate and the movable portion of the resonance sheet generates resonance effect for transmitting the gas flow. 
     
     
         3 . The actuator according to  claim 1 , wherein the modular structure has the length in a range between 1 mm and 999 mm, the width in a range between 1 mm and 999 mm, and the height in a range between 1 mm and 999 mm. 
     
     
         4 . The actuator according to  claim 1 , wherein the modular structure has the length in a range between 1 μm and 999 μm, the width in a range between 1 μm and 999 μm, and the height in a range between 1 μm and 999 μm. 
     
     
         5 . The actuator according to  claim 1 , wherein the modular structure has the length in a range between 1 nm and 999 nm, the width in a range between 1 nm and 999 nm, and the height in a range between 1 nm and 999 nm. 
     
     
         6 . The actuator according to  claim 1 , wherein the suspension plate is square-shaped and has a protruding portion. 
     
     
         7 . The actuator according to  claim 1 , wherein the actuator further comprises a conductive sheet, a first insulation sheet, and a second insulation sheet, and wherein the inlet plate, the resonance sheet, the outer frame, the first insulation sheet, the conductive sheet, and the second insulation sheet are sequentially stacked and assembled. 
     
     
         8 . An actuator comprising:
 a suspension plate having a first surface and a second surface, wherein the suspension plate is capable of bending and vibrating;   an outer frame disposed around an outer periphery of the suspension plate;   at least one supporting element connected between the suspension plate and the outer frame to provide a flexible support for the suspension plate;   a piezoelectric sheet disposed above the first surface of the suspension plate;   an inlet plate disposed on the second surface of the suspension plate, wherein the inlet plate has at least one inlet hole, at least one convergence channel, and a convergence chamber; the at least one inlet hole is configured to introduce a gas flow into the actuator, and the at least one convergence channel is corresponding to the at least one inlet hole for guiding the gas flow introduced from the at least one inlet hole to be converged into the convergence chamber; and   a resonance sheet disposed between the inlet plate and the suspension plate, wherein the resonance sheet has a perforation corresponding to the convergence chamber of the inlet plate, and a movable portion is provided in a periphery of the perforation;   wherein the suspension plate, the outer frame, the at least one supporting element, the piezoelectric sheet, the inlet plate, and the resonance sheet are fabricated as a modular structure, and the modular structure has a length in a range between 1 nm and 999 nm, a width in a range between 1 nm and 999 nm, and a height in a range between 1 nm and 999 nm.