US2022395865A1PendingUtilityA1
Compositions and methods for reducing interaction between abrasive particles and a cleaning brush
Est. expiryDec 4, 2037(~11.3 yrs left)· nominal 20-yr term from priority
Inventors:Daniela White
H10P 72/0412B08B 3/04C11D 7/3272C11D 7/261C11D 7/265C11D 7/10C11D 7/34C11D 3/2086C11D 7/3245C11D 7/3218C11D 7/3281C11D 7/329B08B 3/08C11D 3/3765C11D 7/5004B24B 37/34C11D 3/30A46B 13/00H01L 21/67046B08B 1/002B08B 1/02B08B 1/007C11D 11/0047B08B 1/52H10P 52/00B08B 1/12C11D 2111/22B08B 1/20A46D 1/02
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Claims
Abstract
Described are methods for removing abrasive particles from a polymeric surface, such as from a polymeric surface of a cleaning brush used in a post chemical-mechanical processing cleaning step, as well as related cleaning solutions.
Claims
exact text as granted — not AI-modified1 - 15 . (canceled)
16 . A cleaning solution concentrate useful for cleaning a substrate in a post-chemical-mechanical processing step, the cleaning solution comprising:
cleaning agent, and at least 0.1 weight percent particle removal agent that includes a hydrogen bonding group.
17 . The concentrate of claim 16 comprising:
from 0.1 to 20 weight percent cleaning agent, and
from 0.1 to 20 weight percent of the particle removal agent.
18 . The concentrate of claim 16 , wherein the cleaning agent comprises one or more of a chelating agent and an organic solvent.
19 . The concentrate of claim 16 , wherein the cleaning agent comprising citric acid, monoethanol amine, polyacrylic acid, or a combination thereof.
20 . The concentrate of claim 16 , wherein the cleaning solution as a pH that is below 2.5.Join the waitlist — get patent alerts
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