Polishing apparatus, information processing system, information processing method, and program

Abstract

Included are a polishing table provided with an eddy current sensor, the polishing table configured to rotate; a polishing head configured to face the polishing table, the polishing head configured to rotate, the polishing head having a surface which faces the polishing table and to which a substrate is configured to be attached; and a processor configured to generate preprocessed data on a target substrate by executing predetermined preprocessing on an output signal when the eddy current sensor is at each position facing a target substrate during polishing processing of a target substrate to determine a metal line height at at least one position of the target substrate by inputting preprocessed data on the target substrate to a learned machine learning model using a learning data set in which data after predetermined preprocessing is executed on an output signal when the eddy current sensor is at each position facing a substrate is set as an input and a metal line height at at least one position of the substrate is set as an output.

1 . A polishing apparatus comprising:
 a polishing table provided with an eddy current sensor, the polishing table configured to rotate;   a polishing head configured to face the polishing table, the polishing head configured to rotate, the polishing head having a surface which faces the polishing table and to which a substrate is configured to be attached; and   a processor configured to generate preprocessed data on a target substrate by executing predetermined preprocessing on an output signal when the eddy current sensor is at each position facing a target substrate during polishing processing of a target substrate to determine a metal line height at at least one position of the target substrate by inputting preprocessed data on the target substrate to a learned machine learning model using a learning data set in which data after predetermined preprocessing is executed on an output signal when the eddy current sensor is at each position facing a substrate is set as an input and a metal line height at at least one position of the substrate is set as an output.   
     
     
         2 . The polishing apparatus according to  claim 1 , wherein when the determined metal line height reaches a predetermined metal line height, the processor performs control to finish polishing of the target substrate. 
     
     
         3 . The polishing apparatus according to  claim 1 ,
 wherein the polishing head is provided with a plurality of airbag for pressing a substrate, and   wherein the processor controls pressure in each the airbag according to distribution of the determined metal line height.   
     
     
         4 . The polishing apparatus according to  claim 1 ,
 wherein an input of the machine learning model further includes a thickness of a polishing pad, a rotation speed of a polishing table, and/or a rotation speed of a polishing head.   
     
     
         5 . The polishing apparatus according to  claim 1 ,
 further comprising a plurality of the eddy current sensors, and   wherein an input of the machine learning model is data after the preprocessing is executed on an output signal at each position facing the target substrate in identical polishing-table rotation-circling of the plurality of the eddy current sensors.   
     
     
         6 . The polishing apparatus according to  claim 1 ,
 further comprising a plurality of the eddy current sensors, and   wherein an input of the machine learning model is data after the preprocessing is executed on an output signal at each position facing the target substrate in a plurality of cycles of polishing-table rotation of the plurality of the eddy current sensors.   
     
     
         7 . The polishing apparatus according to  claim 1 , wherein an input of the machine learning model is data after the preprocessing is executed on an output signal at each position facing the target substrate in a plurality of cycles of polishing-table rotation of the plurality of the one eddy current sensor. 
     
     
         8 . The polishing apparatus according to  claim 1 , wherein the processor causes the learned machine learning model to relearn using an output signal of an eddy current sensor during polishing processing. 
     
     
         9 . An information processing system comprising:
 a preprocessing unit configured to generate preprocessed data on a target substrate by executing predetermined preprocessing on an output signal when an eddy current sensor is at each position facing a target substrate during polishing processing of a target substrate; and   a prediction unit configured to determine a metal line height at at least one position of the target substrate by inputting preprocessed data on the target substrate to a learned machine learning model using a learning data set in which data after predetermined preprocessing is executed on an output signal when the eddy current sensor is at each position facing a substrate is set as an input and a metal line height at at least one position of the substrate is set as an output.   
     
     
         10 . An information processing method comprising:
 a preprocessing step of generating preprocessed data on a target substrate by executing predetermined preprocessing on an output signal when an eddy current sensor is at each position facing a target substrate during polishing processing of a target substrate; and   a prediction step of determining a metal line height at at least one position of the target substrate by inputting preprocessed data on the target substrate to a learned machine learning model using a learning data set in which data after predetermined preprocessing is executed on an output signal when the eddy current sensor is at each position facing a substrate is set as an input and a metal line height at at least one position of the substrate is set as an output.   
     
     
         11 . A non-transitory computer readable medium storing a program for causing a computer to function as:
 a preprocessing unit configured to generate preprocessed data on a target substrate by executing predetermined preprocessing on an output signal when an eddy current sensor is at each position facing a target substrate during polishing processing of a target substrate; and   a prediction unit configured to determine a metal line height at at least one position of the target substrate by inputting preprocessed data on the target substrate to a learned machine learning model using a learning data set in which data after predetermined preprocessing is executed on an output signal when the eddy current sensor is at each position facing a substrate is set as an input and a metal line height at at least one position of the substrate is set as an output.