US2022360822A1PendingUtilityA1

Substrate processing system, method of processing substrate, recording medium, and method of manufacturing semiconductor device

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Assignee: KOKUSAI ELECTRIC CORPPriority: Jul 4, 2019Filed: Jul 21, 2022Published: Nov 10, 2022
Est. expiryJul 4, 2039(~12.9 yrs left)· nominal 20-yr term from priority
Inventors:Yasuhiro MizuguchiShun MatsuiTadashi TakasakiNaofumi Ohashi
H10P 72/0454G05B 23/02H10P 72/0612H10P 72/0451G05B 2219/45031G05B 19/41865G05B 19/0423G05B 19/406G05B 19/4185H04N 19/82H04N 19/176H04N 19/182H04N 19/117H04N 19/593H04N 19/159Y02P90/02
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Claims

Abstract

There is provided a technique that includes at least one substrate processing apparatuses configured to process a substrate and comprising a first controller that is capable of controlling transmission of at least one type of data; a second controller that is capable of controlling operation of the at least one substrate processing apparatus; and a relay capable of receiving the data from at least one first controller and adjusting, when transmitting the data to the second controller, a reception interval from the first controller and a transmission interval to the second controller to be different from each other.

Claims

exact text as granted — not AI-modified
What is claimed is: 
     
         1 . A substrate processing system comprising:
 at least one substrate processing apparatus configured to process a substrate and comprising a first controller that is capable of controlling transmission of at least one type of data;   a second controller that is capable of controlling operation of the at least one substrate processing apparatus; and   a relay that is capable of receiving the data from at least one first controller and adjusting, when transmitting the data to the second controller, a reception interval from the first controller and a transmission interval to the second controller to be different from each other.   
     
     
         2 . The substrate processing system of  claim 1 , wherein the relay changes the transmission interval of the second controller according to one of a type of the data and the first controller, or according to both of the type of the data and the first controller. 
     
     
         3 . The substrate processing system of  claim 1 , wherein the relay is configured to:
 receive the data at a predetermined interval; and   change the transmission interval for each type of the data based on one or both of a load level of the second controller and a network load level between the relay and the second controller, and transmit the data to the second controller.   
     
     
         4 . The substrate processing system of  claim 3 , wherein the one or both of the load level of the second controller and the network load level are determined by one or both of the relay and the second controller. 
     
     
         5 . The substrate processing system of  claim 1 , wherein the relay changes the transmission interval based on an importance level of data among the data. 
     
     
         6 . The substrate processing system of  claim 1 , wherein the relay is configured to transmit data to each of the second controller and another controller based on a type of the data. 
     
     
         7 . The substrate processing system of  claim 1 , wherein the relay is configured to record the data which is received. 
     
     
         8 . The substrate processing system of  claim 7 , wherein the relay is configured to transmit the data, which is recorded, after a load level of the second controller falls within a prescribed value 
     
     
         9 . The substrate processing system of  claim 1 , wherein the second controller includes table data in which a type of the data and a transmission destination of data transmitted by the first controller are recorded, and
 wherein a setting of the transmission destination of the first controller is updated based on the table data.   
     
     
         10 . The substrate processing system of  claim 3 , wherein the second controller includes a plurality of table data in which a type of the data and a transmission destination of the data transmitted by the first controller are recorded, and configured to select the table data based on the load level. 
     
     
         11 . The substrate processing system of  claim 1 , wherein the second controller includes table data in which a type of the data and a transmission destination of the data transmitted by the first controller are recorded, and configure to be capable of changing the table data. 
     
     
         12 . A method of processing a substrate, comprising:
 processing a substrate in at least one substrate processing apparatus;   receiving at least one type of data at a relay from at least one first controller installed in the at least one substrate processing apparatus; and   when transmitting the data to a second controller, adjusting, by the relay, a reception interval from the at least one first controller and a transmission interval to the second controller to be different from each other.   
     
     
         13 . The method of  claim 12 , wherein the relay receives the data at a predetermined interval; and
 wherein the method further comprises: changing a transmission interval for each type of the data based on one or both of a load level of the second controller and a network load level between the relay and the second controller, and transmitting the data to the second controller.   
     
     
         14 . The method of  claim 13 , further comprising: determining the one or both of the load level of the second controller and the network load level by one or both of the relay and the second controller. 
     
     
         15 . A non-transitory computer-readable recording medium storing a program that causes, by a computer, a substrate processing apparatus to perform a process comprising:
 processing a substrate in at least one substrate processing apparatus;   receiving at least one type of data at a relay from at least one first controller installed in the at least one substrate processing apparatus; and   when transmitting the data to a second controller, adjusting, by the relay, a reception interval from the at least one first controller and a transmission interval to the second controller to be different from each other.   
     
     
         16 . The non-transitory computer-readable recording medium of  claim 15 , wherein the relay receives the data at a predetermined interval; and
 wherein the process further comprises: changing a transmission interval for each type of the data based on one or both of a load level of the second controller and a network load level between the relay and the second controller, and transmitting the data to the second controller.   
     
     
         17 . The non-transitory computer-readable recording medium of  claim 16 , wherein the process further comprises: determining the one or both of the load level of the second controller and the network load level by one or both of the relay and the second controller. 
     
     
         18 . A method of manufacturing a semiconductor device comprising the method of  claim 12 .

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