Linear Motor for Vacuum and Vacuum Processing Apparatus

Abstract

A vacuum processing apparatus includes a linear motor. The linear motor includes a mover having a permanent magnet, a stator having a coil covered by a resin member, and a wire for supplying a current to the coil provided in a vacuum sample chamber. The wire is led out to an outside of the vacuum sample chamber through a through hole portion provided in the wall surface of the vacuum sample chamber. The through hole portion is filled with the resin member integrally or with a filler that binds to the resin member, so that the through hole portion is sealed.

1 . A vacuum processing apparatus comprising:
 a linear motor for vacuum that includes a mover having a permanent magnet, a stator having a coil covered by a resin member, and a wire for supplying a current to the coil provided in a vacuum sample chamber, wherein   the wire is led out to an outside of the vacuum sample chamber through a through hole portion provided in the wall surface of the vacuum sample chamber, and   the through hole portion is filled with the resin member integrally or with a filler that binds to the resin member, so that the through hole portion is sealed.   
     
     
         2 . The vacuum processing apparatus according to  claim 1 , wherein
 a pipe configured to supply a fluid for cooling the coil is led out to the outside of the vacuum sample chamber through the through hole portion.   
     
     
         3 . The vacuum processing apparatus according to  claim 1 , wherein
 the resin member covers the coil, the wire and the through hole portion, and is configured to separate the vacuum sample chamber and atmosphere environment.   
     
     
         4 . The vacuum processing apparatus according to  claim 1 , wherein the resin member is formed by injection molding or insert molding. 
     
     
         5 . The vacuum processing apparatus according to  claim 1 , further comprising a support member for supporting the coil. 
     
     
         6 . The vacuum processing apparatus according to  claim 2 , wherein
 the resin member covers the coil, the wire, the pipe, and the through hole portion,   and is configured to separate the vacuum sample chamber and atmosphere environment.   
     
     
         7 . The vacuum processing apparatus according to  claim 1 , wherein the resin member or the filler is epoxy resin.