Parallel optical scanning inspection device

Abstract

A parallel optical scanning inspection device, comprising a light source unit, an interference unit, a beam splitting unit, an optical path adjustment unit, a plurality of scanning units and a receiving unit. The light source unit provides initial light to an interference unit. The interference unit divides the initial light into reference light and sampling light. The beam splitting unit splits the sampling light into a plurality of sampling light beams. The optical path adjustment unit adjusts the plurality of sampling light beams into scanning light beams with different optical paths. Each of the scanning units receives one of the scanning light beams. A sample is scanned by the scanning light beams such that each of the scanning units receives detection light reflected or scattered from different positions of the sample. The receiving unit receives and coheres the reference light and the detection light, respectively, to generate optical information.

What is claimed is: 
     
         1 . A parallel optical scanning inspection device, comprising:
 a light source unit, configured to provide initial light;   an interference unit, connected to the light source unit and configured to receive the initial light and divide the initial light into reference light and sampling light;   a beam splitting unit, connected to the interference unit and configured to split the sampling light into a plurality of sampling light beams;   an optical path adjustment unit, connected to the beam splitting unit and configured to adjust the plurality of sampling light beams into scanning light beams with different optical paths;   a plurality of scanning units, each connected to the optical path adjustment unit and configured to receive one of the scanning light beams, wherein a sample is scanned by the scanning light beams at different positions such that each of the scanning units receives detection light reflected from the different positions of the sample such that the detection light enters the interference unit after passing through the optical path adjustment unit and the beam splitting unit; and   a receiving unit, connected to the interference unit and configured to receive and cohere the reference light and the detection light, respectively, to generate optical information based on coherence effect with different optical path differences.   
     
     
         2 . The parallel optical scanning inspection device according to  claim 1 , wherein the light source unit comprises:
 a swept source laser, configured to provide a laser beam; and   an optical amplifier, connected to the swept source laser and configured to amplify the laser beam to the initial light with light intensity suitable for optical coherent tomography.   
     
     
         3 . The parallel optical scanning inspection device according to  claim 2 , wherein the light source unit further comprises an optical isolator disposed between the swept source laser and the optical amplifier. 
     
     
         4 . The parallel optical scanning inspection device according to  claim 1 , wherein the interference unit comprises:
 a first fiber coupler, having one end connected to the light source unit;   a first fiber circulator, having a first end connected to the other end of the first fiber coupler;   a first fiber polarization controller, having one end connected to a second end of the first fiber circulator;   a reference light generator, connected to the other end of the first fiber polarization controller;   a second fiber circulator, having a first end connected to the other end of the first fiber coupler;   a second fiber polarization controller, having one end connected to a second end of the second fiber circulator and having the other end connected to the beam splitting unit; and   a second fiber coupler, having one end connected to a third end of the first fiber circulator and a third end of the second fiber circulator and having the other end connected to the receiving unit,   wherein the initial light enters the reference light generator after passing through the first fiber coupler, the first end of the first fiber circulator, the second end of the first fiber circulator, and the first fiber polarization controller to generate the reference light, and then the reference light enters the receiving unit after passing through the first fiber polarization controller, the second end and the third end of the first fiber circulator, and the second fiber coupler in order;   wherein, the initial light functions as the sampling light after passing through the first fiber coupler, the first end and the second end of the second fiber circulator, and the second fiber polarization controller.   
     
     
         5 . The parallel optical scanning inspection device according to  claim 4 , wherein the reference light generator comprises:
 a reference light beam collimator, having one end connected to the other end of the first fiber polarization controller;   a reference lens, having one surface facing the other end of the reference light beam collimator; and   a reference reflector, facing the other surface of the reference lens;   wherein the initial light enters the reference light beam collimator and the reference lens to reach the reference reflector, and is then reflected by the reference reflector to become the reference light.   
     
     
         6 . The parallel optical scanning inspection device according to  claim 4 , wherein the interference unit further comprises a first moving unit, the reference reflector is disposed on the first moving unit, and the first moving unit is adjusted to move the reference reflector to change the path of the initial light in free space. 
     
     
         7 . The parallel optical scanning inspection device according to  claim 1 , wherein the beam splitting unit comprises a plurality of third fiber couplers, the plurality of third fiber couplers are connected in a one-to-two tree-like branch, wherein one end of one of the third fiber couplers of a first layer is connected to the interference unit, and the other ends of the third fiber couplers of a last layer are connected to the optical path adjustment unit. 
     
     
         8 . The parallel optical scanning inspection device according to  claim 1 , wherein each of the scanning units comprises:
 a scanning light beam collimator, configured to receive one of the scanning light beams;   a scanning reflector, configured to receive the one of the scanning light beams from the scanning light beam collimator;   an optical scanning element, configured to receive the one of the scanning light beams from the scanning reflector; and   a scanning lens, configured to receive the one of the scanning light beams from the optical scanning element;   wherein the optical scanning element controls the scanning light beam to perform one-dimensional or multi-dimensional scanning on the sample, and then the one-dimensional or multi-dimensional detection light reflected by the sample is transmitted and received sequentially by the scanning lens, the optical scanning element, the scanning reflector, the scanning light beam collimator, the optical path adjustment unit, the beam splitting unit, the interference unit and the receiving unit.   
     
     
         9 . The parallel optical scanning inspection device according to  claim 6 , wherein the optical path adjustment unit comprises a plurality of fiber jumpers with different optical paths, such that a position of a scanning light beam collimator capable of freely adjusting the position is adjusted to match the fiber jumpers with different optical paths to form the scanning light beams as the sampling light passes through the different optical paths. 
     
     
         10 . The parallel optical scanning inspection device according to  claim 1 , wherein the optical path adjustment unit comprises a plurality of adjustment portions, each comprising:
 a first graded refractive index beam collimator, having one end connected to the beam splitting unit; and   a second graded refractive index beam collimator, having one end being mutually movable with the other end of the first graded refractive index beam collimator to adjust the position of the other end of the first graded refractive index beam collimator relative to the one end of the second graded refractive index beam collimator, such that the other end of the second graded refractive index beam collimator is connected to the scanning units to form the scanning light beams as the sampling light passes through the different optical paths.   
     
     
         11 . The parallel optical scanning inspection device according to  claim 1 , wherein each of the scanning units is disposed on a second moving unit, and the second moving unit is adjusted to move each of the scanning units horizontally or vertically to adjust the focal length of each of the scanning unit