Free-space Beam Steering Systems, Devices, and Methods

Abstract

Devices and systems having a vertical waveguide array are provided having a plurality of vertical waveguides disposed on a support substrate in an array, where each vertical waveguide further includes a reflective region positioned to reflect impinging light toward the support substrate, a core region extending from the reflective region to the support substrate, the core region further comprising, a first contact region and a second contact region electrically isolated from one another disposed between the reflective region and the support substrate, and a light concentrator disposed between the first contact region and the second contact region. The first contact region and the second contact region are operable to create a voltage drop across the light concentrator and the light concentrator has a lower refractive index compared to the refractive indexes of the first contact region and the second contact region. Additionally, a confinement structure surrounds the periphery of each waveguide, where the confinement structure has a lower refractive index compared to the refractive indexes of the first contact region and the second contact region.

What is claimed is: 
     
         1 . A waveguide device, comprising:
 a pair of waveguides disposed on a support substrate and structurally positioned to receive light transmitted through the support substrate, where each waveguide comprises;
 a reflective region positioned to reflect impinging light toward the support substrate; 
 a core region extending from the reflective region to the support substrate, the core region further comprising;
 a first contact region and a second contact region electrically isolated from one another disposed between the reflective region and the support substrate; and 
 a light concentrator disposed between the first contact region and the second contact region, wherein the first contact region and the second contact region are operable to create a voltage drop across the light concentrator, and wherein the light concentrator has a lower refractive index compared to the refractive indexes of the first contact region and the second contact region; and 
 
   a confinement structure surrounding the periphery of each waveguide, wherein the confinement structure has a lower refractive index compared to the refractive indexes of the first contact region and the second contact region.   
     
     
         2 . The device of  claim 1 , wherein the support substrate is a semiconductor substrate. 
     
     
         3 . The device of  claim 2 , wherein the support substrate is a silicon substrate. 
     
     
         4 . The device of  claim 2 , wherein the confinement structure extends into the semiconductor substrate. 
     
     
         5 . The device of  claim 4 , wherein the confinement structure includes a trap structure in the semiconductor substrate to improve light trapping. 
     
     
         6 . The device of  claim 1 , further comprising a control layer electrically coupled to the first contact region and to the second contact region, wherein the control layer further comprises control lines to control the first contact region and the second contact region. 
     
     
         7 . The device of  claim 1 , wherein the pair of waveguides are adjacent to one another. 
     
     
         8 . A vertical waveguide array, comprising:
 a plurality of vertical waveguides disposed on a support substrate in an array, where each vertical waveguide further comprises;
 a reflective region positioned to reflect impinging light toward the support substrate; 
 a core region extending from the reflective region to the support substrate, the core region further comprising;
 a first contact region and a second contact region electrically isolated from one another disposed between the reflective region and the support substrate; and 
 a light concentrator disposed between the first contact region and the second contact region, wherein the first contact region and the second contact region are operable to create a voltage drop across the light concentrator, and wherein the light concentrator has a lower refractive index compared to the refractive indexes of the first contact region and the second contact region; and 
 
   a confinement structure surrounding the periphery of each waveguide, wherein the confinement structure has a lower refractive index compared to the refractive indexes of the first contact region and the second contact region.   
     
     
         9 . The vertical waveguide array of  claim 8 , wherein the plurality of vertical waveguides is disposed on the support substrate in a one-dimensional (1D) array, 
     
     
         10 . The vertical waveguide array of  claim 8 , wherein the plurality of vertical waveguides is disposed on the support substrate in a two-dimensional (2D) array,