US2022328663A1PendingUtilityA1
Tunneling field effect transistors
Est. expiryAug 18, 2037(~11.1 yrs left)· nominal 20-yr term from priority
Inventors:Cheng-Ying HuangWilly RachmadyMatthew V. MetzAshish AgrawalBenjamin Chu-KungUygar E. AvciJack T. KavalierosIan A. Young
B82Y 10/00H01L 29/0847H01L 29/66795H01L 29/66969H01L 29/66977H01L 29/785H01L 29/66522H10D 99/00H10D 62/151H10D 30/62H10D 30/024H10D 30/021H10D 30/6757H10D 12/211H10D 12/021H10D 30/6735H10D 64/27H10D 62/824H10D 62/121H10D 62/117H10D 62/141H10D 48/383
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Claims
Abstract
Disclosed herein are tunneling field effect transistors (TFETs), and related methods and computing devices. In some embodiments, a TFET may include: a first source/drain material having a p-type conductivity; a second source/drain material having an n-type conductivity; a channel material at least partially between the first source/drain material and the second source/drain material, wherein the channel material has a first side face and a second side face opposite the first side face; and a gate above the channel material, on the first side face, and on the second side face.
Claims
exact text as granted — not AI-modified1 . An electronic component, comprising:
a tunneling field effect transistor (TFET) comprising:
a first semiconductor material having a p-type conductivity, the first semiconductor material having a top face over a substrate, the top face of the first semiconductor material a first distance from the substrate,
a second semiconductor material having an n-type conductivity, and
a channel material at least partially between the first semiconductor material and the second semiconductor material, wherein the channel material has a top face over the substrate, the top face of the channel material a second distance from the substrate, the first distance greater than the second distance.
2 . The electronic component of claim 1 , further comprising a gate above the channel material.
3 . The electronic component of claim 2 , wherein the gate is on a first side face of the first semiconductor material and a second side face of the second semiconductor material.
4 . The electronic component of claim 1 , wherein the second semiconductor material has a top face over the substrate, the top face of the second semiconductor material a third distance from the substrate, and the third distance is greater than the second distance.
5 . The electronic component of claim 4 , wherein the third distance is the same as the first distance.
6 . The electronic component of claim 4 , wherein the third distance is greater than the first distance.
7 . The electronic component of claim 1 , wherein the substrate includes crystalline silicon or crystalline germanium.
8 . The electronic component of claim 1 , wherein a buffer material is on the substrate, and the first semiconductor material and the second semiconductor material are above the buffer material.
9 . The electronic component of claim 8 , wherein the buffer material includes a group III-V material.
10 . The electronic component of claim 8 , wherein the channel material is on the buffer material.
11 . The electronic component of claim 1 , wherein a portion of the channel material is between the second semiconductor material and the substrate.
12 . The electronic component of claim 11 , wherein the channel material is not present between the first semiconductor material and the substrate.
13 . A computing device, comprising:
a die including a tunneling field effect transistor (TFET), wherein the TFET comprises:
a first semiconductor material having a p-type conductivity, the first semiconductor material having a top face over a substrate, the top face of the first semiconductor material a first distance from the substrate,
a second semiconductor material having an n-type conductivity, and
a channel material at least partially between the first semiconductor material and the second semiconductor material, wherein the channel material has a top face over the substrate, the top face of the channel material a second distance from the substrate, the first distance greater than the second distance.
14 . The computing device of claim 13 , wherein the computing device includes a power supply that provides a supply voltage that is less than 0.5 volts.
15 . The computing device of claim 13 , wherein the TFET is included in a metallization stack of the die.
16 . The computing device of claim 13 , further comprising a gate above the channel material.
17 . The computing device of claim 16 , wherein the gate is on a first side face of the first semiconductor material and a second side face of the second semiconductor material.
18 . The computing device of claim 13 , wherein the second semiconductor material has a top face over the substrate, the top face of the second semiconductor material a third distance from the substrate, and the third distance is greater than the second distance.
19 . The computing device of claim 18 , wherein the third distance is the same as the first distance.
20 . The computing device of claim 18 , wherein the third distance is greater than the first distance.Join the waitlist — get patent alerts
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