Piezoelectric pump and pump unit

Abstract

A pump unit includes a piezoelectric pump and a housing accommodating the piezoelectric pump. The piezoelectric pump includes a piezoelectric device having a through-hole, a first elastic plate covering an end of the through-hole, and a second elastic plate covering another end of the through-hole. The first elastic plate has a communication hole communicating with the through-hole of the piezoelectric device.

1 . A piezoelectric pump comprising:
 a piezoelectric device having a through-hole;   a first elastic plate covering an end of the through-hole and having a communication hole communicating with the through-hole; and   a second elastic plate covering another end of the through-hole.   
     
     
         2 . The piezoelectric pump according to  claim 1 , wherein
 at least one of the first elastic plate or the second elastic plate includes a recess inward in an axial direction of the through-hole.   
     
     
         3 . The piezoelectric pump according to  claim 2 , wherein
 the at least one of the first elastic plate or the second elastic plate includes a flat portion surrounding the recess and a groove located between the recess and the flat portion.   
     
     
         4 . The piezoelectric pump according to  claim 1 , wherein
 at least one of the first elastic plate or the second elastic plate includes a protrusion protruding outward in an axial direction of the through-hole.   
     
     
         5 . The piezoelectric pump according to  claim 4 , wherein
 the at least one of the first elastic plate or the second elastic plate includes a flat portion surrounding the protrusion and a groove located between the protrusion and the flat portion.   
     
     
         6 . A pump unit, comprising:
 the piezoelectric pump according to  claim 1 ; and   a housing accommodating the piezoelectric pump, the housing including an outlet facing the communication hole in the first elastic plate.