Method of preparing pentachlorodisilane purified reaction product comprising same

Abstract

A method of preparing pentachlorodisilane is disclosed. The method comprises partially reducing hexachlorodisilane with a metal hydride compound to give a reaction product comprising pentachlorodisilane. The method further comprises purifying the reaction product to give a purified reaction product comprising the pentachlorodisilane. The purified reaction product comprising pentachlorodisilane formed in accordance with the method is also disclosed.

What is claimed is: 
     
         1 - 14 . (canceled) 
     
     
         15 . A purified reaction product comprising:
 pentachlorodisilane formed by:
 partially reducing hexachlorodisilane with a metal hydride compound to give a reaction product comprising pentachlorodisilane; and 
 purifying the reaction product to give a purified reaction product comprising the pentachlorodisilane. 
   
     
     
         16 . The purified reaction product of  claim 15 , comprising pentachlorodisilane in an amount of at least 95 wt. % based on the total weight of the purified reaction product. 
     
     
         17 . The purified reaction product of  claim 15 , comprising pentachlorodisilane in an amount of at least 98 wt. % based on the total weight of the purified reaction product. 
     
     
         18 . The purified reaction product of  claim 15 , comprising aluminum in an amount of less than 50 ppb. 
     
     
         19 . The purified reaction product of  claim 15 , wherein the metal hydride compound comprises diisobutylaluminum hydride (DIBAH). 
     
     
         20 . The purified reaction product of  claim 15 , wherein purifying the reaction product comprises distilling the reaction product to give the purified reaction product. 
     
     
         21 . The purified reaction product of  claim 20 , wherein distilling the reaction product prepares a crude reaction product comprising the pentachlorodisilane, wherein the pentachlorodisilane is further formed by purifying the crude reaction product to give the purified reaction product. 
     
     
         22 . The purified reaction product of  claim 21 , wherein purifying the crude reaction product comprises fractionally distilling the crude reaction product to give the purified reaction product. 
     
     
         23 . The purified reaction product of  claim 20 , wherein distilling the reaction product is carried out at a reduced pressure and an elevated temperature. 
     
     
         24 . The purified reaction product of  claim 23 , wherein: (i) the reduced pressure is from greater than 0 to 50 Torr; (ii) the elevated temperature is from 70 to 90° C.; or (iii) both (i) and (ii). 
     
     
         25 . The purified reaction product of  claim 15 , wherein: (i) the hexachlorodisilane and metal hydride compound are utilized in a molar ratio of from 1:0.01 to 1:3; (ii) the forming of the pentachlorodisilane is carried out in the absence of any solvent; (iii) partially reducing the hexachlorodisilane is carried out at an elevated temperature; (iv) purifying the reaction product comprises a plurality of purification steps; or (v) any combination of (i) to (iv).