US2022267906A1PendingUtilityA1
Solution and process for the activation of nonconductive area for electroless process
Est. expiryFeb 24, 2041(~14.6 yrs left)· nominal 20-yr term from priority
Inventors:Chia-Chen Chang
C23C 18/30C23C 18/208C23C 18/1889C23C 18/405C23C 18/1841C23C 18/1658C23C 18/2086C23C 18/40C23C 18/1635C23C 18/1882
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Claims
Abstract
The present invention discloses a novel activator system for electroless metallization deposition, particularly activators that may be free of tin and surfactants. Activators of the invention are preferably employed for electroless copper deposition.
Claims
exact text as granted — not AI-modified1 . A method for depositing an electroless plating activator on a substrate, comprising:
(a) providing a substrate; (b) applying an activator composition to the substrate; (c) applying a reducing agent to the substrate; wherein the activator composition comprising at least one metal ion and at least one organic acid; wherein the organic acid has at least one carboxylic group and at least one hydroxyl group.
2 . The method of claim 1 , wherein the organic acid is dicarboxyl acid terminated and has a formula:
HOOC—R 1 —COOH (I)
wherein R 1 is chosen from linear or branched, substituted or unsubstituted (C 1 -C 6 )alcohol.
3 . The method of claim 2 , wherein the organic acid is selected from the group consisting of tartaric acid, citric acid, malic acid, and 2,2-Bis(hydroxymethyl)malonic acid.
4 . The method of claim 3 , wherein the organic acid is tartaric acid or malic acid.
5 . The method of claim 1 , wherein the organic acid has a formula:
R 2 —COOH (II)
wherein R 2 is chosen from linear or branched, substituted or unsubstituted (C 1 -C 6 )alcohol.
6 . The method of claim 5 , wherein the organic acid is selected from the group consisting of glyceric acid, glycolic acid, and lactic acid.
7 . The method of claim 6 , wherein the organic acid is glyceric acid.
8 . The method of claim 1 , wherein the metal ion is selected from the group consisting of palladium, copper, silver, gold, platinum, iridium, aluminum, cobalt and nickel ions.
9 . The method of claim 8 , wherein the metal ion is copper.
10 . The method of claim 1 , wherein the pH of activator composition is greater than 9.
11 . The method of claim 1 , wherein the reducing agent comprises DMAB or NaBH 4 .
12 . A method for forming an electroless copper plating film on a substrate, comprising:
(a) depositing an electroless plating activator on the substrate by the method of claim 1 ; (b) electrolessly plating copper on the substrate.
13 . The method of claim 12 , wherein the step (b) uses a plating bath comprising: tartrate, copper ions, formaldehyde, and 2,2-dipyridine.Join the waitlist — get patent alerts
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