Anodization apparatus and anodization method

Abstract

According to one embodiment, an anodization apparatus includes: a first process tank configured to perform an anodization process on a substrate; a holder configured to hold the substrate; and a first electrolyte supply system configured to supply a first electrolyte to the first process tank. The holder immerses the substrate in the first electrolyte in a state where the substrate is inclined with respect to a liquid level of the first electrolyte. The anodization process is executed in a state where the substrate is inclined with respect to the liquid level of the first electrolyte.

What is claimed is: 
     
         1 . An anodization apparatus comprising:
 a first process tank configured to perform an anodization process on a substrate;   a holder configured to hold the substrate; and   a first electrolyte supply system configured to supply a first electrolyte to the first process tank, wherein   the holder immerses the substrate in the first electrolyte in a state where the substrate is inclined with respect to a liquid level of the first electrolyte, and   the anodization process is executed in a state where the substrate is inclined with respect to the liquid level of the first electrolyte.   
     
     
         2 . The anodization apparatus according to  claim 1 , wherein
 the holder is rotated when the anodization process is performed.   
     
     
         3 . The anodization apparatus according to  claim 1 , further comprising:
 an anode provided in the holder;   a second process tank provided in the first process tank;   a cathode provided in the second process tank; and   a diffusion plate provided at one end of the second process tank.   
     
     
         4 . The anodization apparatus according to  claim 3 , wherein
 the diffusion plate is provided at the one end of the second process tank in a state where it is inclined with respect to a bottom surface of the first process tank.   
     
     
         5 . The anodization apparatus according to  claim 3 , wherein
 when the anodization process is performed, the substrate and the diffusion plate are provided in a state of being inclined with respect to a bottom surface of the first process tank.   
     
     
         6 . The anodization apparatus according to  claim 3 , wherein
 when the anodization process is performed, the substrate and the diffusion plate are provided in parallel.   
     
     
         7 . The anodization apparatus according to  claim 3 , wherein
 the first electrolyte is supplied from the first electrolyte supply system to the second process tank, and   the first electrolyte in the second process tank is supplied to a front surface of the substrate via the diffusion plate.   
     
     
         8 . The anodization apparatus according to  claim 3 , further comprising:
 a filter provided between the cathode and the diffusion plate.   
     
     
         9 . The anodization apparatus according to  claim 3 , further comprising:
 a second electrolyte supply system configured to supply a second electrolyte between the anode and the substrate.   
     
     
         10 . The anodization apparatus according to  claim 3 , wherein
 when the anodization process is performed, the substrate and the anode are provided in parallel.   
     
     
         11 . The anodization apparatus according to  claim 1 , wherein
 the first electrolyte supply system includes:   a mixing tank used for producing the first electrolyte;   an ingredient supply unit that supplies ingredients of the first electrolyte to the mixing tank; and   a pump that supplies the first electrolyte produced at the mixing tank to the first process tank.   
     
     
         12 . The anodization apparatus according to  claim 11 , wherein
 the first electrolyte supply system is configured to recover the first electrolyte from the first process tank, and the recovered first electrolyte is supplied to the mixing tank.   
     
     
         13 . An anodization method comprising:
 supplying a first electrolyte to a process tank;   setting a substrate on a holder in a manner facing an anode provided in the holder;   filling a second electrolyte between the anode and the substrate;   immersing the substrate set on the holder in the first electrolyte in a state where the substrate is inclined with respect to a liquid level of the first electrolyte; and   in a state where the substrate is inclined, applying a current between the anode and a cathode provided in the process tank.   
     
     
         14 . The anodization method according to  claim 13 , further comprising rotating the substrate and the holder in a state where the substrate is inclined.