US2022246554A1PendingUtilityA1

Microelectronic devices designed with compound semiconductor devices and integrated on an inter die fabric

Assignee: INTEL CORPPriority: Dec 22, 2015Filed: Apr 14, 2022Published: Aug 4, 2022
Est. expiryDec 22, 2035(~9.4 yrs left)· nominal 20-yr term from priority
H10W 90/728H10W 90/724H10W 74/142H10W 70/682H10W 70/63H10W 44/248H10W 44/241H10W 90/701H10W 90/00H10W 72/00H10W 70/635H10W 70/611H10W 42/20H10W 72/227H10W 72/07252H10W 72/07253H10W 72/237H10W 44/20H01L 2924/19011H01L 25/16H01L 24/00H01L 23/49816H01L 23/5384H01L 2924/15321H01L 2924/18161H01L 2924/19103H01L 2924/19041H01L 2924/15192H01L 2223/6672H01L 23/49827H01L 2223/6677H01L 2224/16265H01L 2924/19042H01L 2924/15159H01L 2924/19104H01L 25/105H01L 23/48H01L 23/66H01L 2224/16227H01L 23/552H01L 2924/15153H01L 2924/19043
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Claims

Abstract

Embodiments of the invention include a microelectronic device that includes a first silicon based substrate having compound semiconductor components. The microelectronic device also includes a second substrate coupled to the first substrate. The second substrate includes an antenna unit for transmitting and receiving communications at a frequency of approximately 4 GHz or higher.

Claims

exact text as granted — not AI-modified
What is claimed is: 
     
         1 . A microelectronic device comprising:
 a first silicon semiconductor substrate having cavities therein, the first silicon semiconductor substrate having compound semiconductor components embedded in the cavities therein, the first silicon semiconductor substrate having a resistivity below 1 ohm cm, and the first silicon semiconductor substrate having a footprint;   a second substrate coupled to the first silicon semiconductor substrate, the second substrate including an antenna unit for transmitting and receiving communications at a frequency of approximately 4 GHz or higher; and   a plurality of interconnects coupled directly to the second substrate, wherein one or more of the plurality of interconnects are outside of the footprint of the first silicon semiconductor substrate.   
     
     
         2 . The microelectronic device of  claim 1 , wherein the first silicon semiconductor substrate has a resistivity below 0.1 ohm cm. 
     
     
         3 . The microelectronic device of  claim 1 , wherein the first silicon semiconductor substrate has a resistivity below 0.01 ohm cm. 
     
     
         4 . The microelectronic device of  claim 1 , further comprising:
 at least one integrated passive die (IPD) coupled to at least one of the first and second substrates, the IPD includes passives for passive matching networks.   
     
     
         5 . The microelectronic device of  claim 4 , further comprising:
 an overmolded component at least partially surrounding the at least one IPD, the overmolded component to integrate the at least IPD with the first silicon semiconductor substrate.   
     
     
         6 . The microelectronic device of  claim 5 , further comprising:
 at least one thru mold connection formed in the overmolded component to provide at least one electrical connection between the first silicon semiconductor substrate and the second substrate.   
     
     
         7 . The microelectronic device of  claim 1 , wherein the compound semiconductor components include at least one of devices, high output power transistors, and RF circuitry formed with compound semiconductor materials. 
     
     
         8 . The microelectronic device of  claim 7 , wherein the compound semiconductor components include at least one of devices and circuitry formed with GaN materials. 
     
     
         9 . The microelectronic device of  claim 1 , wherein the microelectronic device comprises a 5G package architecture for 5G communications. 
     
     
         10 . A microelectronic device comprising:
 a first silicon semiconductor substrate having cavities therein, the first silicon semiconductor substrate having compound semiconductor components embedded in the cavities therein, the first silicon semiconductor substrate having a resistivity below 1 ohm cm, and the first silicon semiconductor substrate having a footprint;   a second substrate coupled to the first silicon semiconductor substrate, the second substrate including an antenna unit for transmitting and receiving communications at a frequency of approximately 15 GHz or higher; and   a plurality of interconnects coupled directly to the second substrate, wherein one or more of the plurality of interconnects are outside of the footprint of the first silicon semiconductor substrate.   
     
     
         11 . The microelectronic device of  claim 10 , wherein the first silicon semiconductor substrate has a resistivity below 0.1 ohm cm. 
     
     
         12 . The microelectronic device of  claim 10 , wherein the first silicon semiconductor substrate has a resistivity below 0.01 ohm cm. 
     
     
         13 . The microelectronic device of  claim 10 , further comprising:
 at least one integrated passive die (IPD) coupled to at least one of the first and second substrates, the IPD includes passives for passive matching networks.   
     
     
         14 . The microelectronic device of  claim 13 , further comprising:
 an overmolded component at least partially surrounding the at least one IPD, the overmolded component to integrate the at least IPD with the first silicon semiconductor substrate.   
     
     
         15 . The microelectronic device of  claim 14 , further comprising:
 at least one thru mold connection formed in the overmolded component to provide at least one electrical connection between the first silicon semiconductor substrate and the second substrate.   
     
     
         16 . The microelectronic device of  claim 10 , wherein the compound semiconductor components include at least one of devices, high output power transistors, and RF circuitry formed with compound semiconductor materials. 
     
     
         17 . The microelectronic device of  claim 16 , wherein the compound semiconductor components include at least one of devices and circuitry formed with GaN materials. 
     
     
         18 . The microelectronic device of  claim 10 , wherein the microelectronic device comprises a 5G package architecture for 5G communications. 
     
     
         19 . A microelectronic device comprising:
 a first silicon semiconductor substrate having cavities therein, the first silicon semiconductor substrate having compound semiconductor components embedded in the cavities

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