US2022244650A1PendingUtilityA1
Photoexcitation method
Est. expiryMar 4, 2036(~9.6 yrs left)· nominal 20-yr term from priority
G03F 7/2053G03F 7/028G03F 7/70383G03F 7/70641
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Claims
Abstract
A method and composition for enabling indirect photoexcitation whereby a large energy gap between energy levels in a second material is circumvented by a series of lower energy photoexcitations in a first material.
Claims
exact text as granted — not AI-modified1 . A method of photoexcitation comprising:
forming a composite layer of at least a first material and a second material onto a substrate; the first material has at least a first energy level, a second energy level, and at least one interceding energy level between the first and second energy levels; the second material has at least a first energy level and a second energy level, wherein the second material is photodegraded when at least one electron is excited into the second energy level of the second material, wherein an energy gap between the first energy level and the at least one interceding energy level of the first material is less than the energy gap between the first and second energy level of the second material, and wherein the first material and second material are in communication with one another; exposing predetermined areas of the composite material to photons emitted from a laser source at an operational wavelength; exposing predetermined areas of the composite by focusing the laser source on the composite layer to:
Excite at least one electron from the first energy level of the first material to the at least one interceding energy level;
Excite the at least one electron from the at least one interceding energy level to the second energy level of the first material; and
Transfer the at least one electron from the second energy level of the first material to the second energy level of the second material to cause degradation of the second material at the exposed by the laser portions of the substrate.
2 . The method of claim 1 , wherein the composite material is a photoresist.
3 . The method of claim 2 , wherein the first material includes a perylene and the second material includes a polymer.
4 . The method of claim 2 , wherein the first material includes a coumarin 307 and the second material includes a monomer, an oligomer or a small molecule.
5 . The method of claim 1 , wherein the laser is a continuous wave laser and operates at the wavelength of approximately 375 nm.
6 . The method of claim 1 , wherein exposing the composite to the laser causes degradation of the second material within the composite in areas with dimensions below the operational wavelength of the laser.Join the waitlist — get patent alerts
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