Vibrator Device, Electronic Apparatus, And Vehicle

Abstract

A vibrator device includes a vibrator element, and a support substrate disposed so as to be opposed to the vibrator element. The support substrate includes a base configured to support the vibrator element, a support configured to support the base, a plurality of beams configured to couple the base and the support to each other, and a drive signal interconnection, a drive constant-potential interconnection, a detection signal interconnection, and a detection constant-potential interconnection each laid around the base and the support passing the beams, and in predetermined one of the beams, at least one of the drive constant-potential interconnection and the detection constant-potential interconnection is disposed on a surface on the vibrator element side, and the detection signal interconnection is disposed on a surface on the opposite side.

What is claimed is: 
     
         1 . A vibrator device comprising:
 a vibrator element; and   a support substrate which is disposed so as to be opposed to the vibrator element, provided with a first surface at the vibrator element side and a second surface at an opposite side to the first surface, and supports the vibrator element, wherein   the vibrator element includes
 a drive arm which is provided with a drive signal electrode and a drive constant-potential electrode, and performs a drive vibration in response to a drive signal applied to the drive signal electrode, and 
 a detection arm which is provided with a detection signal electrode and a detection constant-potential electrode, and performs a detection vibration in accordance with a physical quantity of a detection target to thereby output a detection signal from the detection signal electrode, 
   the support substrate includes
 a base configured to support the vibrator element, 
 a support configured to support the base, 
 a plurality of beams configured to couple the base and the support to each other, 
 a drive signal interconnection which is electrically coupled to the drive signal electrode, and is laid around the base and the support passing at least one of the beams, 
 a drive constant-potential interconnection which is electrically coupled to the drive constant-potential electrode, and is laid around the base and the support passing at least one of the beams, 
 a detection signal interconnection which is electrically coupled to the detection signal electrode, and is laid around the base and the support passing at least one of the beams, and 
 a detection constant-potential interconnection which is electrically coupled to the detection constant-potential electrode, and is laid around the base and the support passing at least one of the beams, and 
   in a predetermined beam included in the plurality of beams, at least one of the drive constant-potential interconnection and the detection constant-potential interconnection is disposed on the first surface, and the detection signal interconnection is disposed on the second surface.