Pattern forming material and pattern forming method

Abstract

A pattern forming material according to an embodiment is a pattern forming material comprising a polymer composed of a plurality of monomer units bonded to each other. Each of the monomer units includes an ester structure having a first carbonyl group and at least one second carbonyl group bonded to the ester structure. A second carbonyl group farthest from a main chain of the polymer constituting the pattern forming material among second carbonyl groups is in a linear chain state.

1 . A pattern forming material comprising a polymer composed of a plurality of monomer units bonded to each other, wherein
 each of the monomer units includes:   an ester structure having a first carbonyl group; and   at least one second carbonyl group bonded to the ester structure, wherein
 a second carbonyl group among second carbonyl groups, which is farthest from a main chain of the polymer constituting the pattern forming material, is in a linear chain state, 
 the monomer units include at least one of (meth)acrylic acetic anhydride, acetonyl (meth)acrylate, (meth)acrylic acid-3-oxobutanoic anhydride, (meth)acrylic acid-2,4-dioxopentyl ester, and 2-(acetoacetoxy)ethyl (meth)acrylate, and 
 the polymer includes a homopolymer of the monomer units or a copolymer including the monomer units equal to or higher than 50 mol %. 
   
     
     
         2 - 4 . (canceled) 
     
     
         5 . The material of  claim 1 , wherein the copolymer includes a copolymer of the monomer unit and any of styrene, hydroxystyrene, methyl (meth)acrylate, ethyl (meth)acrylate, and hydroxy ethyl (meth)acrylate. 
     
     
         6 . (canceled) 
     
     
         7 . The material of  claim 1 , further comprising a solvent dissolving the polymer, wherein
 the solvent is any of 1-butanol, N,N-dimethylformamide, N-methylpyrrolidone, γ-butyrolactone, acetone, anisole, isobutyl alcohol, isopropyl alcohol, isopentyl alcohol, ethylene glycol monoethyl ether, ethylene glycol monoethyl ether acetate, ethylene glycol mono-n-butyl ether, ethylene glycol monomethyl ether, ethylene glycol monomethyl ether acetate, xylene, cresol, cyclohexanol, cyclohexanone, tetrahydrofuran, toluene, ethyl lactate, propylene glycol monoethyl ether, propylene glycol monoethyl ether acetate, propylene glycol mono-n-butyl ether, propylene glycol monomethyl ether, propylene glycol monomethyl ether acetate, methyl ethyl ketone, methyl cyclohexanol, methyl cyclohexanone, methyl-n-butyl ketone, isobutyl acetate, isopropyl acetate, isopentyl acetate, ethyl acetate, n-butyl acetate, n-propyl acetate, or n-pentyl acetate.   
     
     
         8 - 15 . (canceled)