Roll to roll atomic layer deposition apparatus

Abstract

Proposed is a roll to roll atomic layer deposition apparatus, which deposits an atomic layer on a porous material, the roll to roll atomic layer deposition apparatus including: a pair of winding rollers disposed to be spaced apart from each other and configured to allow two opposite side portions of the porous material in a longitudinal direction to be wound therearound, the pair of winding rollers being configured to reciprocatingly move the porous material in the longitudinal direction; one or more source substance supply units disposed between the pair of winding rollers and configured to supply a source substance to the porous material; and one or more pumps configured to suck the source substance supplied from the one or more source substance supply units, in which the one or more pumps are disposed to correspond to the one or more source substance supply units.

What is claimed is: 
     
         1 . A roll to roll atomic layer deposition apparatus, which deposits an atomic layer on a porous material, the roll to roll atomic layer deposition apparatus comprising:
 a pair of winding rollers disposed to be spaced apart from each other and configured to allow two opposite side portions of the porous material in a longitudinal direction to be wound therearound, the pair of winding rollers being configured to reciprocatingly move the porous material in the longitudinal direction;   one or more source substance supply units disposed between the pair of winding rollers and configured to supply a source substance to the porous material; and   one or more pumps configured to suck the source substance supplied from the one or more source substance supply units,   wherein the one or more pumps are disposed to correspond to the one or more source substance supply units.   
     
     
         2 . The roll to roll atomic layer deposition apparatus of  claim 1 , wherein the one or more source substance supply units and the one or more pumps are disposed to face one another with the porous material interposed therebetween. 
     
     
         3 . The roll to roll atomic layer deposition apparatus of  claim 2 , wherein a suction port of the pump is disposed to face a supply port disposed at an end of the source substance supply unit, and a diameter of the suction port is larger than a diameter of the supply port. 
     
     
         4 . The roll to roll atomic layer deposition apparatus of  claim 3 , wherein the source substance supply unit is provided in plural, the pump is provided in plural, and the supply ports of the plurality of source substance supply units and the suction ports of the plurality of pumps correspond to one another in a one-to-one manner. 
     
     
         5 . The roll to roll atomic layer deposition apparatus of  claim 1 , further comprising:
 a control unit configured to control the pair of winding rollers, the source substance supply unit, and the pump,   wherein during a process of depositing an atomic layer on the porous material, the control unit controls the pair of winding rollers to reciprocatingly move the porous material by a preset distance in the longitudinal direction between the pair of winding rollers, and the control unit controls the source substance supply unit and the pump to be continuously operated.   
     
     
         6 . A roll to roll atomic layer deposition apparatus, which deposits an atomic layer on a porous material, the roll to roll atomic layer deposition apparatus comprising:
 a pair of winding rollers configured to reciprocatingly move the porous material in the longitudinal direction;   one or more source substance supply units disposed between the pair of winding rollers and configured to supply a source substance to the porous material; and   one or more pumps configured to suck the source substance supplied from the source substance supply units,   wherein the one or more pumps are disposed to correspond to the one or more source substance supply units.   
     
     
         7 . The roll to roll atomic layer deposition apparatus of  claim 6 , wherein the one or more source substance supply units and the one or more pumps are disposed to face one another with the porous material interposed therebetween. 
     
     
         8 . The roll to roll atomic layer deposition apparatus of  claim 7 , wherein a suction port of the pump is disposed to face a supply port disposed at an end of the source substance supply unit 
     
     
         9 . The roll to roll atomic layer deposition apparatus of  claim 8 , wherein a diameter of the suction port is larger than a diameter of the supply port. 
     
     
         10 . The roll to roll atomic layer deposition apparatus of  claim 8 , wherein the supply ports of a plurality of source substance supply units and the suction ports of a plurality of pumps correspond to one another in a one-to-one manner. 
     
     
         11 . The roll to roll atomic layer deposition apparatus of  claim 6 , further comprising:
 a control unit configured to control the pair of winding rollers, the source substance supply unit, and the pump,   wherein during a process of depositing an atomic layer on the porous material, the control unit controls the pair of winding rollers to reciprocatingly move the porous material by a preset distance in the longitudinal direction between the pair of winding rollers.   
     
     
         12 . The roll to roll atomic layer deposition apparatus of  claim 11 , wherein the control unit controls the source substance supply unit and the pump to be continuously operated. 
     
     
         13 . A roll to roll atomic layer deposition apparatus, which deposits an atomic layer on a porous material, the roll to roll atomic layer deposition apparatus comprising:
 one or more source substance supply units configured to supply a source substance to the porous material reciprocatingly moving in the longitudinal direction; and   one or more pumps configured to suck the source substance supplied from the one or more source substance supply units and passed through the porous material.   
     
     
         14 . The roll to roll atomic layer deposition apparatus of  claim 13 , wherein the one or more pumps are disposed to correspond to the one or more source substance supply units. 
     
     
         15 . The roll to roll atomic layer deposition apparatus of  claim 13 , wherein the one or more source substance supply units and the one or more pumps are disposed to face one another with the porous material interposed therebetween.