MEMS Device for Large Angle Beamsteering

Abstract

An actuator element of a MEMS device is provided, which is fabricated using surface micromachining on a substrate. An insulating layer having a first portion contacts the substrate while a second portion is separated from the substrate by a gap. A metallic layer contacts the insulating layer having a first portion contacting the first portion of the insulating layer and a second portion contacting the second portion of the insulating layer. The second portion of the metallic layer is prestressed. Alternately, the actuator element includes a first insulating layer separated from the substrate by a gap. A metallic layer has a first portion contacting the substrate and a second portion contacting the insulating layer. A second insulating layer contacts a portion of the second portion of the metallic layer opposite the first insulating layer, where the second insulating layer is prestressed.

What is claimed is: 
     
         1 . A MEMS device on a substrate, comprising:
 a platform;   an actuator assembly composed of a plurality of actuator elements, the actuator assembly connected to the platform;   wherein actuation of the plurality of the actuator elements in the actuator assembly causes motion in the platform.   
     
     
         2 . The MEMS device of  claim 1 , wherein each actuator element of the plurality of actuator elements has a first end and a second end,
 wherein the first end of a first actuator element of the plurality of actuator elements is connected to the substrate and the second end of a last actuator element of the plurality of actuator elements is connected to the platform, and   wherein the first ends of the remaining plurality of actuator elements are connected to the second ends of other actuator elements between the first and last actuator elements of the plurality of actuator elements to form a chain.   
     
     
         3 . The MEMS device of  claim 1 , wherein the plurality of actuator elements in the actuator element chain is arranged in a serpentine configuration. 
     
     
         4 . The MEMS device of  claim 1 , wherein the plurality of actuator elements in the actuator element chain is arranged in a center contact configuration. 
     
     
         5 . The MEMS device of  claim 1 , further comprising:
 a micromirror bonded to the platform.