Debris cleaning device and electroplating system

Abstract

A debris cleaning device includes: a process treatment tank for containing a liquid medicine and a substrate to be treated, wherein the bottom of the tank body of the process treatment tank is provided with a liquid medicine discharge port, and the side wall of the tank body of the process treatment tank is provided with a liquid medicine inlet port; and a self-circulation debris removal system, the self-circulation debris removal system comprising a circulation pipeline communicating between the liquid medicine discharge port and the liquid medicine inlet port, the circulation pipeline being provided with a control valve for controlling the on-off state of the circulation pipeline, a debris filtering and collecting device for filtering the debris in the circulation pipeline, and a power pump for providing circulation driving force for the liquid medicine in the circulation pipeline.

What is claimed is: 
     
         1 . A debris cleaning device for cleaning debris generated within process equipment, the debris cleaning device comprising:
 a process treatment tank for containing a liquid medicine and a substrate to be treated, wherein a bottom of a tank body of the process treatment tank is provided with a liquid medicine discharge port, and a side wall of the tank body of the process treatment tank is provided with a liquid medicine inlet port; and   a self-circulation debris removal system, the self-circulation debris removal system comprising a circulation pipeline communicating between the liquid medicine discharge port and the liquid medicine inlet port, wherein the circulation pipeline is provided with a control valve for controlling an on-off state of the circulation pipeline, a debris filtering and collecting device for filtering debris in the circulation pipeline, and a power pump for providing a circulation driving force for the liquid medicine in the circulation pipeline.   
     
     
         2 . The debris cleaning device according to  claim 1 , wherein
 the bottom of the tank body of the process treatment tank is a first inverted conical cavity for guiding the liquid medicine in the process treatment tank to the liquid medicine discharge port, and a bottom of the first inverted conical cavity is in communication with the liquid medicine discharge port.   
     
     
         3 . The debris cleaning device according to  claim 2 , wherein
 the control valve includes at least one of a manual valve and a solenoid valve.   
     
     
         4 . The debris cleaning device according to  claim 1 , wherein
 the debris filtering and collecting device comprises: a debris collector and a filter arranged in sequence from the liquid medicine discharge port to the liquid medicine inlet port.   
     
     
         5 . The debris cleaning device according to  claim 4 , wherein
 the debris collector comprises: a collection box, wherein the collection box is in a shape of a box body, a liquid inlet and a liquid outlet are provided at an upper part of the box body of the collection box, a debris collection cavity for collecting debris is provided at a lower part of the box body of the collection box, the debris collection cavity is a second inverted conical cavity, a debris discharge port for discharging debris is provided at a bottom of the debris collection cavity, and a cover plate capable of opening or closing the debris discharge port is provided at the debris discharge port.   
     
     
         6 . The debris cleaning device according to  claim 5 , wherein
 the debris collector further comprises: a filter, the filter being arranged at the liquid outlet and comprising at least two layers of filter meshes capable of filtering particles of different sizes.   
     
     
         7 . The debris cleaning device according to  claim 6 , wherein
 the side wall of the second inverted conical cavity at a side where the liquid inlet is located is an inclined side wall forming an inclined included angle relative to a horizontal plane, and the side wall of the second inverted conical cavity at a side where the liquid outlet is located is a vertical side wall perpendicular to the horizontal plane.   
     
     
         8 . The debris cleaning device according to  claim 1 , wherein
 at least one side wall of the process treatment tank is a liquid return wall, a plurality of liquid return ports are distributed on the liquid return wall, and a filtering protection device is further provided on the liquid return wall for preventing debris in the process treatment tank from entering the liquid return port.   
     
     
         9 . The debris cleaning device according to  claim 8 , wherein
 the filtering protection device comprises: a frame fixed on the liquid return wall, and a filter mesh fixed on the frame.   
     
     
         10 . The debris cleaning device according to  claim 5 , wherein a material of the process treatment tank is transparent; and
 a material of the collection box is transparent.   
     
     
         11 . An electroplating system comprising:
 a debris cleaning device for cleaning debris generated within process equipment, the debris cleaning device comprising:   a process treatment tank for containing a liquid medicine and a substrate to be treated, wherein a bottom of a tank body of the process treatment tank is provided with a liquid medicine discharge port, and a side wall of the tank body of the process treatment tank is provided with a liquid medicine inlet port; and   a self-circulation debris removal system, the self-circulation debris removal system comprising a circulation pipeline communicating between the liquid medicine discharge port and the liquid medicine inlet port, wherein the circulation pipeline is provided with a control valve for controlling an on-off state of the circulation pipeline, a debris filtering and collecting device for filtering debris in the circulation pipeline, and a power pump for providing a circulation driving force for the liquid medicine in the circulation pipeline,   wherein the process treatment tank is an electroplating tank of the electroplating system.   
     
     
         12 . The electroplating system of  claim 11 , wherein
 the bottom of the tank body of the process treatment tank is a first inverted conical cavity for guiding the liquid medicine in the process treatment tank to the liquid medicine discharge port, and a bottom of the first inverted conical cavity is in communication with the liquid medicine discharge port.   
     
     
         13 . The electroplating system of  claim 12 , wherein
 the control valve includes at least one of a manual valve and a solenoid valve.   
     
     
         14 . The electroplating system of  claim 11 , wherein
 the debris filtering and collecting device comprises: a debris collector and a filter arranged in sequence from the liquid medicine discharge port to the liquid medicine inlet port.   
     
     
         15 . The electroplating system of  claim 14 , wherein
 the debris collector comprises: a collection box, wherein the collection box is in a shape of a box body, a liquid inlet and a liquid outlet are provided at an upper part of the box body of the collection box, a debris collection cavity for collecting debris is provided at a lower part of the box body of the collection box, the debris collection cavity is a second inverted conical cavity, a debris discharge port for discharging debris is provided at a bottom of the debris collection cavity, and a cover plate capable of opening or closing the debris discharge port is provided at the debris discharge port.   
     
     
         16 . The electroplating system of  claim 15 , wherein
 the debris collector further comprises: a filter, the filter being arranged at the liquid outlet and comprising at least two layers of filter meshes capable of filtering particles of different sizes.   
     
     
         17 . The electroplating system of  claim 16 , wherein
 the side wall of the second inverted conical cavity at a side where the liquid inlet is located is an inclined side wall forming an inclined included angle relative to a horizontal plane, and the side wall of the second inverted conical cavity at a side where the liquid outlet is located is a vertical side wall perpendicular to the horizontal plane.   
     
     
         18 . The electroplating system of  claim 11 , wherein
 at least one side wall of the process treatment tank is a liquid return wall, a plurality of liquid return ports are distributed on the liquid return wall, and a filtering protection device is further provided on the liquid return wall for preventing debris in the process treatment tank from entering the liquid return port.   
     
     
         19 . The electroplating system of  claim 18 , wherein
 the filtering protection device comprises: a frame fixed on the liquid return wall, and a filter mesh fixed on the frame.   
     
     
         20 . The electroplating system according to  claim 15 , wherein a material of the process treatment tank is transparent; and
 a material of the collection box is transparent.