Dummy substrate and manufacturing method thereof

Abstract

A dummy substrate is formed with a disk-shaped glass substrate having a center hole, and a magnetic recording film on an outer circumferential surface along a thickness direction of the glass substrate and an inner circumferential surface of the center hole, and a surface roughness (Ra) of one surface and the other surface of the glass substrate is in a range of 0.2 nm or more and 100 nm or less.

1 . A dummy substrate, comprising:
 a disk-shaped glass substrate having a center hole; and   a magnetic recording film formed on an outer circumferential surface along a thickness direction of the glass substrate and an inner circumferential surface of the center hole, wherein   a surface roughness (Ra) of one surface and the other surface of the glass substrate is in a range of 0.2 nm or more and 100 nm or less.   
     
     
         2 . The dummy substrate according to  claim 1 , wherein
 in each of an outer edge portion of the glass substrate and an inner edge portion of the center hole, an inclined surface is formed which is inclined such that a thickness of the glass substrate from one surface and the other surface of the glass substrate toward the outer circumferential surface and the inner circumferential surface is gradually decreased, and   the magnetic recording film is further formed on the inclined surface.   
     
     
         3 . The dummy substrate according to  claim 1 -er- 4 , wherein
 the magnetic recording film is a laminated film including at least a soft magnetic layer containing a soft magnetic material, a vertical magnetic layer whose axis of easy magnetization is along a film thickness direction of the magnetic recording film, and an orientation control layer that controls an orientation of the vertical magnetic layer.   
     
     
         4 . A method for manufacturing the dummy substrate according to  claim 1 , the method comprising:
 a removal step of removing the magnetic recording film formed on one surface and the other surface of the glass substrate using a magnetic recording disk having the magnetic recording film covering the entire surface of the glass substrate.   
     
     
         5 . A method for manufacturing the dummy substrate according to  claim 2 ,
 the method comprising:   a removal step of removing the magnetic recording film formed on one surface and the other surface of the glass substrate using a magnetic recording disk having the magnetic recording film covering the entire surface of the glass substrate.   
     
     
         6 . A method for manufacturing the dummy substrate according to  claim 3 ,
 the method comprising:   a removal step of removing the magnetic recording film formed on one surface and the other surface of the glass substrate using a magnetic recording disk having the magnetic recording film covering the entire surface of the glass substrate.   
     
     
         7 . The method for manufacturing the dummy substrate according to  claim 4 , wherein
 the removal step is a step of polishing one surface and the other surface of the magnetic recording disk with a polishing pad or a polishing brush while flowing a polishing liquid toward the magnetic recording disk.   
     
     
         8 . The method for manufacturing the dummy substrate according to  claim 5 , wherein
 the removal step is a step of polishing one surface and the other surface of the magnetic recording disk with a polishing pad or a polishing brush while flowing a polishing liquid toward the magnetic recording disk.   
     
     
         9 . The method for manufacturing the dummy substrate according to  claim 6 , wherein
 the removal step is a step of polishing one surface and the other surface of the magnetic recording disk with a polishing pad or a polishing brush while flowing a polishing liquid toward the magnetic recording disk.   
     
     
         10 . The method for manufacturing the dummy substrate according to  claim 7 , wherein
 the polishing liquid is obtained by dispersing an aluminum oxide abrasive having an average particle diameter in a range of 0.4 μm or more and 0.8 μm or less in a liquid medium.   
     
     
         11 . The method for manufacturing the dummy substrate according to  claim 8 , wherein
 the polishing liquid is obtained by dispersing an aluminum oxide abrasive having an average particle diameter in a range of 0.4 μm or more and 0.8 μm or less in a liquid medium.   
     
     
         12 . The method for manufacturing the dummy substrate according to  claim 9 , wherein
 the polishing liquid is obtained by dispersing an aluminum oxide abrasive having an average particle diameter in a range of 0.4 μm or more and 0.8 μm or less in a liquid medium.   
     
     
         13 . The method for manufacturing the dummy substrate according to  claim 7 , wherein
 a magnetic recording disk that does not meet a predetermined standard during a glide and certification test thereof is used in the removal step.   
     
     
         14 . The method for manufacturing the dummy substrate according to  claim 8 , wherein
 a magnetic recording disk that does not meet a predetermined standard during a glide and certification test thereof is used for the magnetic recording disk used in the removal step.   
     
     
         15 . The method for manufacturing the dummy substrate according to  claim 9 , wherein
 a magnetic recording disk that does not meet a predetermined standard during a glide and certification test thereof is used for the magnetic recording disk used in the removal step.   
     
     
         16 . The method for manufacturing the dummy substrate according to  claim 10 , wherein
 a magnetic recording disk that does not meet a predetermined standard during a glide and certification test thereof is used for the magnetic recording disk used in the removal step.   
     
     
         17 . The method for manufacturing the dummy substrate according to  claim 11 , wherein
 a magnetic recording disk that does not meet a predetermined standard during a glide and certification test thereof is used for the magnetic recording disk used in the removal step.   
     
     
         18 . The method for manufacturing the dummy substrate according to  claim 12 , wherein
 a magnetic recording disk that does not meet a predetermined standard during a glide and certification test thereof is used for the magnetic recording disk used in the removal step.