US2022045012A1PendingUtilityA1

Method for preparing semiconductor package structure

Assignee: NANYA TECHNOLOGY CORPPriority: Dec 20, 2018Filed: Oct 22, 2021Published: Feb 10, 2022
Est. expiryDec 20, 2038(~12.4 yrs left)· nominal 20-yr term from priority
Inventors:Shing-Yih Shih
H10W 74/142H10W 90/291H10W 90/297H10W 72/823H10W 72/0198H10W 72/874H10W 72/853H10W 90/00H10W 70/09H10W 70/60H10W 90/724H10W 90/722H10W 72/252H10W 70/652H10W 70/05H10W 72/072H10P 54/00H10W 90/20H10W 70/6528H10W 74/019H10W 74/016H10W 70/685H10W 70/611H10W 70/093H10W 70/65H10W 90/701H10W 74/117H10W 74/014H10P 72/74H10P 72/7424H10W 72/019H10W 74/137H10W 74/141H10W 74/15H10W 74/012H10W 70/614H10W 20/484H01L 21/4857H01L 2225/06586H01L 21/78H01L 25/074H01L 2224/214H01L 25/50H01L 23/5386H01L 24/19H01L 21/568H01L 25/18H01L 21/4853H01L 2225/06555H01L 2225/06541H01L 23/5383H01L 23/5389H01L 2225/06513H01L 24/20H01L 25/0657H01L 25/0652H01L 21/565H01L 2225/06548
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Claims

Abstract

The present disclosure provides a method for preparing a semiconductor package structure. The method includes the following steps. A first die is provided. A second die including a plurality of first conductors is bonded to the first die. A plurality of second conductors are disposed on the first die. A molding is disposed to encapsulate the first die, the second die and the plurality of second conductors. An RDL is disposed on the second die and the molding. A plurality of connecting structures are disposed on the RDL.

Claims

exact text as granted — not AI-modified
What is claimed is: 
     
         1 . A method for preparing a semiconductor package structure, comprising:
 providing a first die;   bonding a second die to the first die, wherein the second die comprises a plurality of first conductors;   disposing a plurality of second conductors on the first die;   disposing a molding to encapsulate the first die, the second die and the plurality of second conductors;   disposing a redistribution layer (RDL) on the second die and the molding; and   disposing a plurality of connecting structures on the RDL.   
     
     
         2 . The method of  claim 1 , further comprising attaching the first die on a carrier substrate prior to the bonding of the second die to the first die. 
     
     
         3 . The method of  claim 2 , further comprising:
 singulating the RDL, the molding, the first die and the second die after the forming of the connecting structures to form a semiconductor package structure; and   detaching the semiconductor package structure from the carrier substrate.   
     
     
         4 . The method of  claim 1 , wherein the first die further comprises a plurality of conductive members. 
     
     
         5 . The method of  claim 4 , wherein the second die is bonded and electrically connected to the first die by the plurality of conductive members. 
     
     
         6 . The method of  claim 1 , further comprising removing a portion of the molding to expose a surface of the second die and surfaces of the plurality of second conductors prior to the forming of the RDL. 
     
     
         7 . The method of  claim 1 , wherein a die size of the first die is greater than a die size of the second die. 
     
     
         8 . The method of  claim 1 , wherein the first die is a logic die and the second die is a memory die. 
     
     
         9 . The method of  claim 1 , wherein the plurality of first conductors comprise a plurality of through silicon vias (TSVs). 
     
     
         10 . The method of  claim 1 , wherein the plurality of second conductors comprise a plurality of through molding vias (TMVs).

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