US2022018651A1PendingUtilityA1

Measurement of thickness of thermal barrier coatings using 3d imaging and surface subtraction methods for objects with complex geometries

Assignee: APPLIED MATERIALS INCPriority: Aug 23, 2018Filed: Jul 10, 2019Published: Jan 20, 2022
Est. expiryAug 23, 2038(~12.1 yrs left)· nominal 20-yr term from priority
G06T 7/73G01B 11/0625G01B 11/2518G01B 11/2545G06K 7/1417G06T 7/521G06T 3/60G06T 2200/04G06V 10/25G06K 9/3233
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Claims

Abstract

Embodiments described herein relate to a non-destructive measurement device measurement device and a non-destructive measurement method for determining coating thickness of a three-dimensional (3D) object. In one embodiment, at least one first 3D image of an uncoated surface of the object and at least one second 3D image of a coated surface of the object are collected and analyzed to the determine the coating thickness of the object.

Claims

exact text as granted — not AI-modified
1 . A method of determining a thickness of an object coating, comprising:
 positioning a surface of an object in a field view of the at least one image sensor system in a non-destructive measurement device, the object having one or more surfaces;   reading a Quick Response (QR) code corresponding to at least one part coordinate or an alignment position of the surface in the non-destructive measurement device, the QR code disposed on the object:   collecting a 3D image of the surface without chemically or physically changing the one or more surfaces of the object corresponding to the at least one part coordinate or the aligned surface of the object at the alignment position; and   analyzing the 3D.   
     
     
         2 . The method of  claim 1 , wherein the surface includes an uncoated portion and a coated portion, and the 3D image corresponds to a first surface profile of the uncoated portion and a second surface profile of the coated portion, the analyzing the second 3D image and the first 3D image comprises:
 removing outliers of the first surface profile and the second surface profile;   filtering the first surface profile and the second surface profile;   overlapping the first surface profile and the second surface profile; and   subtracting the second surface profile from the first surface profile to obtain a thickness of a coating of the object.   
     
     
         3 . The method of  claim 2 , wherein the analyzing the first 3D image and the second 3D image further comprises:
 mirroring the first 3D image and the second 3D image; and   selecting a first area of the first 3D image and a second area of the second 3D image.   
     
     
         4 . The method of  claim 1 , wherein the at least one image sensor system includes a QR code reader operable to read the QR code disposed on the object, and wherein positioning the surface of the object in the field view of the at least one image sensor system includes aligning the object on a stage of the of the non-destructive measurement device with an alignment mechanism of the non-destructive measurement device to align the object at the alignment position corresponding to the QR code. 
     
     
         5 . The method of  claim 4 , wherein collecting a 3D image of the surface includes determining a z-axis position of the at least one part coordinate. 
     
     
         6 . The method of  claim 1 , wherein the at least one image sensor system comprises an illumination unit and one or more image sensors, and the collecting the 3D image of the surface of the one or more surfaces comprises;
 projecting one or more pulses of light to the surface of the object with the illumination unit; and   determining a time-of-flight of the one or more pulses of light with the one or more image sensors coupled to a controller having a timing mechanism.   
     
     
         7 . The method of  claim 1 , wherein the image sensor system comprises an illumination unit and one or more image sensors, and the collecting the 3D image of the surface of the one or more surfaces comprises:
 projecting a fringe pattern the surface of the object with the illumination unit; and   collecting beams of light of the fringe pattern reflected off the surface of the object.   
     
     
         8 . The method of  claim 2 , further comprising:
 positioning a subsequent uncoated surface of the object in the field view of the at least one image sensor system;   collecting a third 3D image of the subsequent uncoated surface without chemically or physically changing the one or more surfaces of the object, the third 3D image corresponding to a third surface profile of the subsequent uncoated surface;   positioning a subsequent coated surface of the object in the field view of the at least one image sensor system;   collecting a fourth 3D image of the subsequent coated surface without chemically or physically changing the one or more surfaces of the object, the fourth 3D image corresponding to a fourth surface profile of the subsequent coated surface; and   analyzing the third 3D image and the fourth 3D image.   
     
     
         9 - 14 . (canceled) 
     
     
         15 . A non-destructive measurement device, comprising:
 a body;   a stage assembly disposed in the body, the stage assembly comprising:
 a stage configured to retain an object; and 
 a coordinate grid; 
   an image sensor assembly disposed in the body, the image sensor assembly comprising:
 one or more image sensor systems, each of the one or more image sensor systems having an illumination unit, one or more image sensors, and a Quick Response (QR) code reader; and 
   a controller coupled to the stage assembly and the image sensor assembly, the controller interfaced with a coating system and controlling automation integration with the coating system via a system controller of the coating system, the controller configured to:
 instruct the one or more image sensor systems to determine a z-axis position of at least one part coordinate of a predetermined number of surfaces of the object corresponding to a QR code of the object; 
   instruct the one or more image sensor systems to collect one or more 3D images of the predetermined number of surfaces of the object without chemically or physically changing the predetermined number of surfaces of the object corresponding to the at least one part coordinate or an aligned surface of the object at an alignment position; and   analyze the one or more 3D images to obtain a thickness of a coating of the object.   
     
     
         16 . The non-destructive measurement device of  claim 15 , further comprising an alignment mechanism disposed in the body. 
     
     
         17 . The non-destructive measurement device of  claim 15 , wherein the QR code corresponds to the alignment position of the predetermined number of surfaces of the object. 
     
     
         18 . The non-destructive measurement device of  claim 15 , wherein an actuator is coupled to the stage, the actuator operable to rotate the object about at least one of an x-axis, y-axis, and z-axis of the stage. 
     
     
         19 . A non-destructive measurement device, comprising:
 a body;   a stage assembly disposed in the body, the stage assembly comprising:
 a stage configured to retain an object; 
   a track disposed in the body and around the stage;   one or more image sensor systems coupled to the track, each of the one or more image sensor systems having an actuator operable to move the one or more image sensor systems along the track around a circumference of the stage; and   a controller coupled to the stage assembly and the one or more image sensor systems, the controller configured to:
 instruct the one or more image sensor systems to collect one or more 3D images of a predetermined number of surfaces of the object without chemically or physically changing the predetermined number of surfaces of the object. 
   
     
     
         20 . The non-destructive measurement device of  claim 19 , wherein the stage assembly further includes a coordinate grid. 
     
     
         21 . The non-destructive measurement device of  claim 19 , wherein the track is a rail or a cable.

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