US2022014169A1PendingUtilityA1

Lamb wave resonator and other type of acoustic wave resonator included in one or more filters

Assignee: SKYWORKS SOLUTIONS INCPriority: Mar 2, 2018Filed: Sep 27, 2021Published: Jan 13, 2022
Est. expiryMar 2, 2038(~11.6 yrs left)· nominal 20-yr term from priority
H01Q 1/50H03H 9/02574H03H 9/173H03H 9/605H03H 9/6483H03H 9/587H03F 3/21H03H 9/564H03H 9/175H03H 9/02228H03F 2200/451H03H 9/706H03H 9/02007H03H 9/725H03H 9/568H03H 9/13H03H 9/174H04B 1/40H03H 9/46H03F 3/195H03H 9/205H03F 3/245H03H 9/02031
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Claims

Abstract

Aspects of this disclosure relate to acoustic wave filters that include a Lamb wave resonator and a second acoustic wave resonator that is a different type of acoustic wave resonator than the Lamb wave resonator. The different type of resonator can be a film bulk acoustic wave resonator for example. Some embodiments of this disclosure relate to an acoustic wave filter that includes the Lamb wave resonator and the second acoustic wave resonator. Some embodiments of this disclosure related to different respective acoustic wave filters including the Lamb wave resonator and the second acoustic wave resonator, in which the Lamb wave resonator and the second acoustic wave resonator are implemented on a common substrate.

Claims

exact text as granted — not AI-modified
What is claimed is: 
     
         1 . An acoustic wave filter assembly comprising:
 an acoustic wave filter including a plurality of types of acoustic wave resonators, the plurality of types of acoustic wave resonators including a Lamb wave resonator and a second acoustic wave resonator, the second acoustic wave resonator being a different type of acoustic wave resonator than the Lamb wave resonator; and   a loop circuit including a capacitor and a Lamb wave element, the Lamb wave element coupled to the acoustic wave filter by way of the capacitor.   
     
     
         2 . The acoustic wave filter assembly of  claim 1  wherein the Lamb wave resonator and the second acoustic wave resonator are on a common die. 
     
     
         3 . The acoustic wave filter assembly of  claim 2  wherein the Lamb wave resonator includes a piezoelectric layer that includes a same material as a piezoelectric layer of the second acoustic wave resonator. 
     
     
         4 . The acoustic wave filter assembly of  claim 3  wherein the same material includes aluminum nitride. 
     
     
         5 . The acoustic wave filter assembly of  claim 1  wherein the second acoustic wave resonator is a bulk acoustic wave resonator. 
     
     
         6 . The acoustic wave filter assembly of  claim 1  wherein the second acoustic wave resonator is a surface acoustic wave resonator. 
     
     
         7 . The acoustic wave filter assembly of  claim 1  wherein the Lamb wave resonator is a series resonator, and the second acoustic wave resonator is a shunt resonator. 
     
     
         8 . The acoustic wave filter assembly of  claim 1  wherein the Lamb wave resonator is a shunt resonator, and the second acoustic wave resonator is a series resonator. 
     
     
         9 . The acoustic wave filter assembly of  claim 1  wherein the Lamb wave element includes at least one interdigital transducer electrode on a piezoelectric layer and gratings disposed on the piezoelectric layer on opposing sides of the at least one interdigital transducer electrode. 
     
     
         10 . The acoustic wave filter assembly of  claim 1  wherein the Lamb wave element includes an acoustic mirror positioned between a piezoelectric layer and a substrate, and the acoustic mirror includes alternating low impedance and high impedance layers. 
     
     
         11 . A radio frequency module comprising:
 an acoustic wave filter configured to filter a radio frequency signal, the acoustic wave filter including a Lamb wave resonator and a second of acoustic wave resonator, the Lamb wave resonator and the second acoustic wave resonator being implemented on a common die, and the second acoustic wave resonator being a different type of acoustic wave resonator than the Lamb wave resonator;   a loop circuit including a capacitor and a Lamb wave element, the Lamb wave element coupled to the acoustic wave filter by way of the capacitor; and   a radio frequency switch in communication with the acoustic wave filter.   
     
     
         12 . The radio frequency module of  claim 11  wherein the second acoustic wave resonator is a bulk acoustic wave resonator. 
     
     
         13 . The radio frequency module of  claim 11  wherein the second acoustic wave resonator is a surface acoustic wave resonator. 
     
     
         14 . The radio frequency module of  claim 11  further comprising a second acoustic wave filter, the second acoustic wave filter and the acoustic wave filter both being included in a multiplexer. 
     
     
         15 . An acoustic wave filter assembly comprising:
 a first acoustic wave filter configured to filter a first radio frequency signal, the first acoustic wave filter including a Lamb wave resonator implemented on a die;   a loop circuit including a capacitor and a Lamb wave element, the Lamb wave element coupled to the acoustic wave filter by way of the capacitor; and   a second acoustic wave filter configured to filter a second radio frequency signal, the second acoustic wave filter including an acoustic wave resonator implemented on the same die as the Lamb wave resonator, the acoustic wave resonator being a different type of acoustic wave resonator than the Lamb wave resonator.   
     
     
         16 . The acoustic wave filter assembly of  claim 15  wherein the acoustic wave resonator is a bulk acoustic wave resonator. 
     
     
         17 . The acoustic wave filter assembly of  claim 16  wherein the first acoustic wave filter includes a second bulk acoustic wave resonator implemented on the same die as the Lamb wave resonator. 
     
     
         18 . The acoustic wave filter assembly of  claim 15  wherein the Lamb wave resonator includes a piezoelectric layer that includes a same material as a piezoelectric layer of the acoustic wave resonator. 
     
     
         19 . The acoustic wave filter assembly of  claim 15  wherein the acoustic wave resonator is a surface acoustic wave resonator. 
     
     
         20 . The acoustic wave filter assembly of  claim 15  wherein the first acoustic wave filter and the second acoustic wave filter are coupled together at a common node of a multiplexer.

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