Method and apparatus for manufacturing flexible light emitting device

Abstract

According to a flexible light-emitting device production method of the present disclosure, after an intermediate region (30i) and flexible substrate regions (30d) of a plastic film (30) of a multilayer stack (100) are divided from one another, the interface between the flexible substrate regions (30d) and a glass base (10) is irradiated with lift-off light. The multilayer stack (100) is separated into a first portion (110) and a second portion (120) while the multilayer stack (100) is in contact with a stage (212). The first portion (110) includes a plurality of light-emitting devices (1000) which are in contact with the stage (212). The light-emitting devices (1000) include a plurality of functional layer regions (20) and the flexible substrate regions (30d). The second portion (120) includes the glass base (10) and the intermediate region (30i).

1 . An apparatus for producing a flexible light-emitting device, comprising:
 a stage for supporting a multilayer stack which has a first surface and a second surface, the multilayer stack including
 a glass base which defines the first surface, 
 a plurality of functional layer regions each including a TFT layer and a light-emitting device layer, 
 a synthetic resin film provided between the glass base and the plurality of functional layer regions and bound to the glass base, the synthetic resin film including a plurality of flexible substrate regions respectively supporting the plurality of functional layer regions and an intermediate region surrounding the plurality of flexible substrate regions, and 
 a protection sheet which covers the plurality of functional layer regions and which defines the second surface, 
 the intermediate region and respective ones of the plurality of flexible substrate regions of the synthetic resin film being divided from one another; 
   a lift-off light irradiation unit for irradiating with lift-off light an interface between the plurality of flexible substrate regions of the synthetic resin film and the glass base in the multilayer stack supported by the stage; and   an actuator for increasing a distance from the stage to the glass base while the stage holds the second surface of the multilayer stack by suction, thereby separating the multilayer stack into a first portion and a second portion,   wherein the first portion of the multilayer stack includes a plurality of light-emitting devices adhered by suction to the stage, and the plurality of light-emitting devices respectively include the plurality of functional layer regions and include the plurality of flexible substrate regions of the synthetic resin film, and   the second portion of the multilayer stack includes the glass base and the intermediate region of the synthetic resin film,   wherein the lift-off light irradiation unit comprises an incoherent light source for emitting the lift-off light, the incoherent light source being a surface-emission light source that comprises a plurality of light emitting diode devices for emitting ultraviolet light and   the lift-off light irradiation unit modulates a driving current flowing through each of the plurality of light emitting diode devices, thereby temporally and/or spatially modulating an irradiation intensity of the lift-off light.   
     
     
         2 . The apparatus of  claim 1 , wherein the surface of the stage includes a first region which is to face the plurality of light-emitting devices and a second region which is to face the intermediate region of the synthetic resin film, and
 suction in the first region is greater than suction in the second region.   
     
     
         3 . The apparatus of  claim 1 , wherein
 the stage includes
 a porous plate, and 
 a suction sheet placed on the porous plate, the suction sheet having a plurality of openings, and 
   the suction sheet includes a first region which is to be in contact with the plurality of light-emitting devices and a second region which is to face the intermediate region of the synthetic resin film, an aperture ratio of the first region being higher than an aperture ratio of the second region.   
     
     
         4 . A suction sheet for use in the apparatus of  claim 3 , comprising:
 a first region which is to be in contact with the plurality of light-emitting devices; and   a second region which is to face the intermediate region of the synthetic resin film,   wherein an aperture ratio of the first region is higher than an aperture ratio of the second region.