Data processing method, data processing device, and computer-readable recording medium having recorded thereon data processing program

Abstract

In order to process time series data obtained in a substrate processing apparatus having a plurality of processing units, a data processing method includes an evaluation value calculation step of obtaining a score of the time series data by comparing the time series data with reference data, and a result display step of displaying an evaluation result screen including, for each processing unit, a number of score errors being a number of substrates of which score is abnormal, and a pie chart showing a ratio of the number of score errors to a number of processed substrates. A display size of the number of score errors and that of the pie chart change depending on the number of score errors.

What is claimed is: 
     
         1 . A data processing method for processing time series data obtained from sensors in a substrate processing apparatus having a plurality of processing units, the time series data being physical quantities showing operating status, the method comprising:
 obtaining, with a computer, an evaluation value of the time series data by comparing the time series data with reference data, the reference data being another time series data that is determined to be expected value data, and   displaying with a computer monitor an evaluation result screen including, for each processing unit, a pie chart showing a ratio of a number of abnormalities to a number of processed substrates, the number of abnormalities being a number of abnormal substrates, wherein an abnormal substrate is determined when an evaluation value of a substrate exceeds a threshold value, wherein   the evaluation result screen has a plurality of display areas for the plurality of respective processing units, each of the plurality of display areas including an evaluation result including the pie chart, and   the plurality of display areas is arranged two-dimensionally in the evaluation result screen.   
     
     
         2 . The data processing method according to  claim 1 , wherein the evaluation result screen includes the number of abnormalities inside the pie chart. 
     
     
         3 . The data processing method according to  claim 2 , wherein a display size of the number of abnormalities changes depending on the number of abnormalities. 
     
     
         4 . The data processing method according to  claim 1 , wherein the evaluation result screen further includes, for each processing unit, an arrow showing a trend of increase or decrease of a number of abnormalities. 
     
     
         5 . The data processing method according to  claim 1 , wherein
 the evaluation result screen further includes a face mark, and   an expression of the face mark changes depending on a number of substrates of which evaluation value is abnormal and on which processing is completed after a confirmation by a user.   
     
     
         6 . The data processing method according to  claim 1 , further comprising selecting an evaluation value with respect to a substrate satisfying a given condition from evaluation values, wherein
 the evaluation result screen is displayed based on the selected evaluation value.   
     
     
         7 . The data processing method according to  claim 6 , wherein
 the evaluation value with respect to the substrate on which different processing is performed for each group of the processing units is selected, and   the evaluation result screen is displayed based on the evaluation value with respect to the substrate on which different processing is performed for each group of the processing units, so that display positions corresponding to the processing units are gathered for each group.   
     
     
         8 . The data processing method according to  claim 1 , wherein the evaluation result screen, a screen including the evaluation value of the time series data, and a screen including a graph of the time series data are displayed hierarchically. 
     
     
         9 . The data processing method according to  claim 1 , wherein a summary screen based on the evaluation value of the time series data and an evaluation value obtained in another data processing device is displayed. 
     
     
         10 . A data processing device for processing time series data obtained from sensors in a substrate processing apparatus having a plurality of processing units, the time series data being physical quantities showing operating status, the device comprising:
 a computer configured to obtain an evaluation value of the time series data by comparing the time series data with reference data, the reference data being another time series data that is determined to be expected value data, and   a computer monitor that is operatively connected to the computer to display an evaluation result screen including, for each processing unit, a pie chart showing a ratio of a number of abnormalities to a number of processed substrates, the number of abnormalities being a number of abnormal substrates, wherein an abnormal substrate is determined when an evaluation value of a substrate exceeds a threshold value, wherein   the evaluation result screen has a plurality of display areas for the plurality of respective processing units, each of the plurality of display areas including an evaluation result including the pie chart, and   the plurality of display areas is arranged two-dimensionally in the evaluation result screen.   
     
     
         11 . The data processing device according to  claim 10 , wherein the evaluation result screen includes the number of abnormalities inside the pie chart. 
     
     
         12 . The data processing device according to  claim 11 , wherein a display size of the number of abnormalities changes depending on the number of abnormalities. 
     
     
         13 . The data processing device according to  claim 10 , wherein the evaluation result screen further includes, for each processing unit, an arrow showing a trend of increase or decrease of a number of abnormalities. 
     
     
         14 . The data processing device according to  claim 10 , wherein
 the evaluation result screen further includes a face mark, and   an expression of the face mark changes depending on a number of substrates of which evaluation value is abnormal and on which processing is completed after a confirmation by a user.   
     
     
         15 . The data processing device according to  claim 10 , wherein the computer is further configured to select an evaluation value with respect to a substrate satisfying a given condition from evaluation values, wherein
 the computer monitor displays the evaluation result screen based on the evaluation value selected by the computer.   
     
     
         16 . The data processing device according to  claim 15 , wherein
 the computer is configured to select the evaluation value with respect to the substrate on which different processing is performed for each group of the processing units, and   the computer monitor displays the evaluation result screen based on the evaluation value with respect to the substrate on which different processing is performed for each group of the processing units, so that display positions corresponding to the processing units are gathered for each group.   
     
     
         17 . The data processing device according to  claim 10 , wherein the computer monitor hierarchically displays the evaluation result screen, a screen including the evaluation value of the time series data, and a screen including a graph of the time series data. 
     
     
         18 . The data processing device according to  claim 10 , wherein the computer monitor displays a summary screen based on the evaluation value of the time series data and an evaluation value obtained in another data processing device. 
     
     
         19 . A non-transitory computer-readable recording medium having recorded thereon a data processing program for processing time series data obtained from sensors in a substrate processing apparatus including a plurality of processing units, the time series data being physical quantities showing operating status, the data processing program causing a computer to execute a method by a CPU using a memory, the method comprising:
 obtaining an evaluation value of the time series data by comparing the time series data with reference data, the reference data being another time series data that is determined to be expected value data, and   displaying with a computer monitor an evaluation result screen including, for each processing unit, a pie chart showing a ratio of a number of abnormalities to a number of processed substrates, the number of abnormalities being a number of abnormal substrates, wherein an abnormal substrate is determined when an evaluation value of a substrate exceeds a threshold value, wherein   the evaluation result screen has a plurality of display areas for the plurality of respective processing units, each of the plurality of display areas including an evaluation result including the pie chart, and   the plurality of display areas is arranged two-dimensionally in the evaluation result screen.