Multiple pixel scanning lidar

Abstract

Methods and systems for performing three-dimensional (3-D) LIDAR measurements with multiple illumination beams scanned over a 3-D environment are described herein. In one aspect, illumination light from each LIDAR measurement channel is emitted to the surrounding environment in a different direction by a beam scanning device. The beam scanning device also directs each amount of return measurement light onto a corresponding photodetector. In some embodiments, a beam scanning device includes a scanning mirror rotated in an oscillatory manner about an axis of rotation by an actuator in accordance with command signals generated by a master controller. In some embodiments, the light source and photodetector associated with each LIDAR measurement channel are moved in two dimensions relative to beam shaping optics employed to collimate light emitted from the light source. The relative motion causes the illumination beams to sweep over a range of the 3-D environment under measurement.

1 . A method for manufacturing a light detection and ranging (LIDAR) device, the method comprising:
 mounting a plurality of illumination sources on a substrate, each illumination source of the plurality of illumination sources configured to emit illumination light;   mounting a plurality of photosensitive detectors on the substrate, each photosensitive detector of the plurality of photosensitive detectors configured to detect an amount of return light; and   positioning a beam scanning device in an optical path of the plurality of illumination sources, the beam scanning device configured to redirect the illumination light with respect to each illumination source of the plurality of illumination sources when an optical element of the beam scanning device is moved using a flexure mechanism driven by one or more actuators.   
     
     
         2 . The method of  claim 1 , further comprising:
 disposing a beam shaping optical element in an optical path between the plurality of illumination sources and the beam scanning device.   
     
     
         3 . The method of  claim 1 , further comprising:
 communicatively coupling the plurality of illumination sources to a computing system, the computing system configured to generate signals that cause the plurality of illumination sources to emit the illumination light.   
     
     
         4 . The method of  claim 1 , further comprising:
 communicatively coupling the plurality of photosensitive detectors to a computing system, the computing system configured to receive signals indicative of the amount of return light detected by the plurality of photosensitive detectors.   
     
     
         5 . (canceled) 
     
     
         6 . (canceled) 
     
     
         7 . The method of  claim 1 , further comprising:
 communicatively coupling the one or more actuators to a computing system, the computing system configured to generate signals to cause the one or more actuators to rotate the optical element of the beam scanning device in an oscillatory manner.   
     
     
         8 . The method of  claim 1 , wherein the optical element is a mirror and the one or more actuators comprise at least one electrostatic actuator, electromagnetic actuator, or piezo actuator. 
     
     
         9 . The method of  claim 7 , wherein the one or more actuators are configured to rotate the optical element about an axis of rotation with an oscillatory angular velocity. 
     
     
         10 . (canceled) 
     
     
         11 . The method of  claim 9 , wherein the plurality of illumination sources are disposed in a plane substantially parallel to the axis of rotation. 
     
     
         12 . The method of  claim 9 , wherein the plurality of illumination sources are disposed in a plane substantially perpendicular to the axis of rotation. 
     
     
         13 . (canceled) 
     
     
         14 . (canceled) 
     
     
         15 . (canceled) 
     
     
         16 . A method for manufacturing a light detection and ranging (LIDAR) device, the method comprising:
 arranging a plurality of integrated LIDAR measurement devices in an array, each integrated LIDAR measurement device of the plurality of integrated LIDAR measurement devices including an illumination source configured to emit illumination light and a photosensitive detector configured to detect an amount of return light;   positioning a beam scanning device in an optical path of the plurality of integrated LIDAR measurement devices, the beam scanning device configured to redirect the illumination light and return light with respect to the plurality of integrated LIDAR measurement devices when an optical element of the beam scanning device is moved using a flexure mechanism driven by one or more actuators; and   communicatively coupling the plurality of integrated LIDAR measurement devices and the beam scanning device to a computing system.   
     
     
         17 . The method of  claim 16 , further comprising:
 disposing a beam shaping optical element in an optical path between the plurality of integrated LIDAR measurement devices and the beam scanning device.   
     
     
         18 . The method of  claim 16 , further comprising:
 manufacturing each integrated LIDAR measurement device of the plurality of integrated LIDAR measurement devices, wherein manufacturing each integrated LIDAR measurement device comprises   mounting the illumination source and the photosensitive detector to a substrate.   
     
     
         19 . The method of  claim 18 , wherein the substrate is a printed circuit board that provides mechanical support and electrical connectivity for the illumination source and the photosensitive detector. 
     
     
         20 . The method of  claim 18 , wherein manufacturing each integrated LIDAR measurement device further comprises:
 mounting an illumination driver integrated circuit to the substrate;   mounting a return signal receiver integrated circuit to the substrate;   communicatively coupling the illumination driver integrated circuit to the illumination source and to the return signal receiver integrated circuit; and   communicatively coupling the return signal receiver integrated circuit to the photosensitive detector.   
     
     
         21 . (canceled) 
     
     
         22 . (canceled) 
     
     
         23 . The method of  claim 16 , further comprising:
 configuring the computing system to:
 transmit a first set of signals to each integrated LIDAR measurement device of the plurality of integrated LIDAR measurement devices, the first set of signals configured to cause the illumination sources of each integrated LIDAR measurement device to emit the illumination light; 
 receive a second set of signals from each integrated LIDAR measurement device of the plurality of integrated LIDAR measurement devices, the second set of signals indicative of the amount of return light detected at the photosensitive detectors of each integrated LIDAR measurement device; and 
 determine a distance between the LIDAR device and an object in a three-dimensional environment based on the second set of signals. 
   
     
     
         24 . (canceled) 
     
     
         25 . The method of  claim 16 , further comprising:
 configuring the computing system to output a signal configured to cause the one or more actuators to move the optical element of the beam scanning device.   
     
     
         26 . (canceled) 
     
     
         27 . The method of  claim 25 , wherein the one or more actuators, upon receiving the signal from the computing system, are configured to rotate the optical element about an axis of rotation with an oscillatory angular velocity. 
     
     
         28 . (canceled) 
     
     
         29 . The method of  claim 27 , wherein the plurality of integrated LIDAR measurement devices are disposed in a plane substantially parallel to the axis of rotation. 
     
     
         30 . The method of  claim 27 , wherein the plurality of integrated LIDAR measurement devices are disposed in a plane substantially perpendicular to the axis of rotation. 
     
     
         31 . (canceled) 
     
     
         32 . The method of  claim 16 , wherein the plurality of integrated LIDAR measurement devices are arranged as a two-dimensional array. 
     
     
         33 . A method, comprising:
 emitting illumination light from each illumination source of a plurality of illumination sources disposed on a substrate;   moving, using a flexure mechanism driven by one or more actuators, an optical element of a beam scanning device positioned in an optical path of the plurality of illumination sources; and   redirecting, with the beam scanning device, the illumination light with respect to each illumination source in the plurality of illumination sources; and   detecting an amount of return light with each photosensitive detector of a plurality of photosensitive detectors disposed on the substrate.   
     
     
         34 . The method of  claim 33 , further comprising:
 generating, with a computer system communicatively coupled to the plurality of illumination sources, signals to cause each illumination source of the plurality of illumination sources to emit the illumination light.   
     
     
         35 . The method of  claim 33 , further comprising:
 receiving, with a computer system communicatively coupled to the plurality of photosensitive detectors, signals indicative of the amount of return light detected by each photosensitive detector of the plurality of photosensitive detectors.   
     
     
         36 . The method of  claim 33 , further comprising:
 generating, with a computer system communicatively coupled to the one or more actuators, signals to cause the one or more actuators to rotate the optical element of the beam scanning device in an oscillatory manner.   
     
     
         37 . The method of  claim 36 , further comprising:
 rotating, with the one or more actuators, the optical element of the beam scanning device about an axis of rotation with an oscillatory angular velocity.   
     
     
         38 . A light detection and ranging (LIDAR) device, comprising:
 a plurality of illumination sources mounted on a substrate, each illumination source of the plurality of illumination sources configured to emit illumination light;   a plurality of photosensitive detectors mounted on the substrate, each photosensitive detector of the plurality of photosensitive detectors configured to detect an amount of return light;   a beam scanning device positioned in an optical path of the plurality of illumination sources, the beam scanning device configured to redirect the illumination light with respect to each illumination source of the plurality of illumination sources; and   one or more actuators configured to drive a flexure mechanism to move an optical element of the beam scanning device.   
     
     
         39 . The LIDAR device of  claim 38 , further comprising a beam shaping optical element disposed in an optical path between the plurality of illumination sources and the beam scanning device. 
     
     
         40 . The LIDAR device of  claim 38 , further comprising a computer system communicatively coupled to the plurality of illumination sources and configured to generate signals that cause each illumination source of the plurality of illumination sources to emit the illumination light. 
     
     
         41 . The LIDAR device of  claim 38 , further comprising a computer system communicatively coupled to the plurality of photosensitive detectors and configured to receive signals indicative of the amount of return light detected by each photosensitive detector of the plurality of photosensitive detectors. 
     
     
         42 . The LIDAR device of  claim 38 , further comprising a computer system communicatively coupled to the one or more actuators and configured to generate signals to cause the one or more actuators to rotate the optical element of the beam scanning device in an oscillatory manner. 
     
     
         43 . The LIDAR device of  claim 42 , wherein the optical element is a mirror and the one or more actuators comprise at least one electrostatic actuator, electromagnetic actuator, or piezo actuator. 
     
     
         44 . The LIDAR device of  claim 42 , wherein the one or more actuators are configured to rotate the optical element about an axis of rotation with an oscillatory angular velocity. 
     
     
         45 . The LIDAR device of  claim 38 , wherein the plurality of illumination sources are disposed in a plane substantially parallel to the axis of rotation. 
     
     
         46 . The LIDAR device of  claim 38 , wherein the plurality of illumination sources are disposed in a plane substantially perpendicular to the axis of rotation. 
     
     
         47 . A system, comprising:
 a plurality of integrated LIDAR measurement devices arranged in an array, each integrated LIDAR measurement device of the plurality of integrated LIDAR measurement devices comprises an illumination source and a photosensitive detector configured to emit illumination light and detect an amount of return light, respectively;   a beam scanning device disposed in an optical path of the plurality of integrated LIDAR measurement devices, the beam scanning device configured to redirect the illumination light and return light with respect to the plurality of integrated LIDAR measurement devices;   one or more actuators configured to drive a flexure mechanism to move an optical element of the beam scanning device; and   a computing system communicatively coupled to the plurality of integrated LIDAR measurement devices and to the beam scanning device.   
     
     
         48 . The system of  claim 47 , further comprising a beam shaping optical element disposed in an optical path between the plurality of integrated LIDAR measurement devices and the beam scanning device. 
     
     
         49 . The system of  claim 47 , wherein both the illumination source and the photosensitive detector of each integrated LIDAR measurement device of the plurality of integrated LIDAR measurement devices are mounted on a substrate. 
     
     
         50 . The system of  claim 49 , wherein the substrate is a printed circuit board that provides mechanical support and electrical connectivity for the illumination source and the photosensitive detector. 
     
     
         51 . The system of  claim 49 , wherein each integrated LIDAR measurement device of the plurality of integrated LIDAR measurement devices further comprises:
 an illumination driver integrated circuit mounted to the substrate;   a return signal receiver integrated circuit mounted to the substrate and communicatively coupled to the photosensitive detector; and   an illumination driver integrated circuit communicatively coupled to the illumination source and to the return signal receiver integrated circuit.   
     
     
         52 . The system of  claim 47 , wherein the computing system, when operated, outputs a signal configured to cause the one or more actuators to move the optical element of the beam scanning device. 
     
     
         53 . The system of  claim 52 , wherein the one or more actuators, upon receiving the signal from the computing system, are configured to rotate the optical element about an axis of rotation with an oscillatory angular velocity. 
     
     
         54 . The system of  claim 53 , wherein the plurality of integrated LIDAR measurement devices are disposed in a plane substantially parallel to the axis of rotation. 
     
     
         55 . The system of  claim 53 , wherein the plurality of integrated LIDAR measurement devices are disposed in a plane substantially perpendicular to the axis of rotation. 
     
     
         56 . The system of  claim 47 , wherein the array is a two-dimensional array. 
     
     
         57 . A method, comprising:
 emitting illumination light from an illumination source disposed in an integrated LIDAR measurement device of a plurality of integrated LIDAR measurement devices, wherein the plurality of integrated LIDAR measurement devices are arranged in an array;   moving, using a flexure mechanism driven by one or more actuators, an optical element of a beam scanning device positioned in an optical path of the illumination source;   redirecting, with a beam scanning device, the emitted illumination light with respect to the illumination source; and   detecting an amount of return light with a photosensitive detector disposed in the integrated LIDAR measurement device of the plurality of integrated LIDAR measurement devices.   
     
     
         58 . The method of  claim 57 , further comprising:
 transmitting a first set of signals to the integrated LIDAR measurement device, the first set of signals configured to cause the illumination source to emit the illumination light;   receiving a second set of signals from the integrated LIDAR measurement device, the second set of signals indicative of the amount of return light detected at the photosensitive detector; and   determining a distance based on the second set of signals.   
     
     
         59 . The method of  claim 57 , wherein moving the optical element of the beam scanning device comprises rotating the optical element. 
     
     
         60 . The method of  claim 59 , wherein rotating the optical element comprises rotating the optical element about an axis of rotation with an oscillatory angular velocity.