US2021398793A1PendingUtilityA1

Simplified lamp design

Assignee: APPLIED MATERIALS INCPriority: Mar 15, 2013Filed: Aug 31, 2021Published: Dec 23, 2021
Est. expiryMar 15, 2033(~6.6 yrs left)· nominal 20-yr term from priority
H10P 72/0436H01K 1/16F21S 2/005H01K 1/66H05B 3/0038H05B 3/0047H01K 1/40H01L 21/67115
73
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Claims

Abstract

Embodiments of the present invention generally relate to simplified, high voltage, tungsten halogen lamps for use as source of heat radiation in a rapid thermal processing (RTP) chamber or other lamp heated thermal processing chambers. Embodiments include a lamp design that includes an external fuse while reducing the number of part and expense of prior art lamps. In addition, embodiments of the lamps described herein provide sufficient rigidity to handle compressive forces of inserting the lamps into a heating assembly base, while maintaining a simplified fuse design.

Claims

exact text as granted — not AI-modified
1 . A lamp assembly, comprising:
 a capsule having a filament disposed therein;   a press seal extending from the capsule and configured to hermetically seal the capsule;   a first lead and a second lead, wherein each of the first and second leads is electrically coupled to the filament within the press seal and extends from the press seal;   an insulative sleeve coupled to the press seal, wherein at least the first lead extends into the insulative sleeve;   a first conductive pin coupled to the insulative sleeve; and   a first fuse electrically coupling the first lead to the first conductive pin.   
     
     
         2 . The lamp assembly of  claim 1 , wherein the insulative sleeve and the press seal have matching grooves formed therein, and wherein a sealant material fills the matching grooves to secure the insulative sleeve to the press seal. 
     
     
         3 . The lamp assembly of  claim 2 , wherein the sealant comprises ceramic potting material, solder, metal wire, or an adhesive. 
     
     
         4 . The lamp assembly of  claim 1 , wherein the insulative sleeve has a protrusion that is snap fit into a groove formed in the press seal. 
     
     
         5 . The lamp assembly of  claim 1 , wherein the insulative sleeve has a protrusion that is snap fit into a groove formed in the first conductive pin. 
     
     
         6 . The lamp assembly of  claim 1 , further comprising:
 a second conductive pin electrically coupled to the second lead, wherein the second lead extends into the insulating sleeve.   
     
     
         7 . The lamp assembly of  claim 6 , wherein the insulative sleeve has a protrusion that is snap fit into a groove formed in the second conductive pin, and wherein the second conductive pin is electrically coupled to the second lead via a fuse. 
     
     
         8 . The lamp assembly of  claim 6 , wherein the second conductive pin is welded to the second lead. 
     
     
         9 . The lamp assembly of  claim 1 , wherein the insulative sleeve comprises a plastic or ceramic material. 
     
     
         10 . A lamp assembly, comprising:
 a capsule having a filament disposed therein;   a press seal extending from the capsule and configured to hermetically seal the capsule;   a first lead and a second lead, wherein each of the first and second leads is electrically coupled to the filament within the press seal and extends from the press seal;   an insulative sleeve coupled to the press seal, wherein the first and second leads extend into the insulative sleeve;   a first conductive pin electrically coupled to the first lead and press fit into the insulative sleeve; and   a second conductive pin electrically coupled to the second lead.   
     
     
         11 . The lamp assembly of  claim 10 , wherein the first lead is electrically coupled to the first conductive pin via a first fuse, and wherein the second lead is welded with the second conductive pin. 
     
     
         12 . The lamp assembly of  claim 10 , wherein the insulative sleeve and the press seal have matching grooves formed therein, and wherein a sealant material fills the matching grooves to secure the insulative sleeve to the press seal. 
     
     
         13 . The lamp assembly of  claim 12 , wherein the sealant comprises ceramic potting material, solder, metal wire, or an adhesive. 
     
     
         14 . The lamp assembly of  claim 10 , wherein the insulative sleeve has a protrusion that is snap fit into a groove formed in the press seal. 
     
     
         15 . The lamp assembly of  claim 10 , wherein the insulative sleeve has a protrusion that is snap fit into a groove formed in the first conductive pin. 
     
     
         16 . The lamp assembly of  claim 10 , wherein the insulative sleeve comprises a plastic or ceramic material. 
     
     
         17 . A lamp assembly, comprising:
 a capsule having a filament disposed therein;   a press seal extending from the capsule and configured to hermetically seal the capsule;   a first lead and a second lead, wherein each of the first and second leads is electrically coupled to the filament within the press seal and extends from the press seal;   an insulative sleeve coupled to the press seal, the insulative sleeve comprising a plastic or ceramic material, wherein the first and second leads extend into the insulative sleeve;   a first conductive pin electrically coupled to the first lead and press fit into the insulative sleeve, the first conductive pin electrically coupled to the first lead via a first fuse extending through the insulative sleeve; and   a second conductive pin electrically coupled to the second lead via welding.   
     
     
         18 . The lamp assembly of  claim 17 , wherein the insulative sleeve and the press seal have matching grooves formed therein, and wherein a sealant material fills the matching grooves to secure the insulative sleeve to the press seal. 
     
     
         19 . The lamp assembly of  claim 18 , wherein the sealant comprises ceramic potting material, solder, metal wire, or an adhesive. 
     
     
         20 . The lamp assembly of  claim 17 , wherein the insulative sleeve has a first protrusion that is snap fit into a groove formed in the press seal, and wherein the insulative sleeve has a second protrusion that is snap fit into a groove formed in the first conductive pin.

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