US2021391483A1PendingUtilityA1

Nanopillar solar cell using graphene

Assignee: SEMICONDUCTOR MFG INT SHANGHAI CORPPriority: Jul 1, 2016Filed: Aug 25, 2021Published: Dec 16, 2021
Est. expiryJul 1, 2036(~9.9 yrs left)· nominal 20-yr term from priority
Inventors:Ming Zhou
H10P 14/3464H10F 77/1437H10F 77/955H10F 77/939H10F 77/935H10F 77/707H10F 77/703H10F 77/244H10F 77/147H10F 71/00H10F 10/00H10F 77/211Y02E10/50C01B 32/184H01L 21/02606H01L 31/02008H01L 31/035227H01L 31/02013H01L 31/02363H01L 31/18H01L 31/02021H01L 31/035281H01L 31/02366H01L 31/022466H01L 31/04H01L 31/022425
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Claims

Abstract

A semiconductor device includes: a conductive layer; a plurality of nanopillars spaced apart from each other overlying the conductive layer, each nanopillar comprising a first semiconductor layer and a second semiconductor layer on the first semiconductor layer, the first semiconductor layer being different in conductivity type from the second semiconductor layer; and a graphene layer overlying the plurality of nanopillars, the graphene layer being connected to each of the plurality of nanopillars.

Claims

exact text as granted — not AI-modified
What is claimed is: 
     
         1 . A semiconductor device, comprising:
 a conductive layer;   a plurality of nanopillars spaced apart from each other overlying the conductive layer, each nanopillar comprising a first semiconductor layer and a second semiconductor layer on the first semiconductor layer, the first semiconductor layer being different in conductivity type from the second semiconductor layer; and   a graphene layer overlying the plurality of nanopillars, the graphene layer being connected to each of the plurality of nanopillars.   
     
     
         2 . The device according to  claim 1 , wherein each nanopillar further includes an aluminum layer on the second semiconductor layer. 
     
     
         3 . The device according to  claim 1 , further comprising:
 a third semiconductor layer on the conductive layer, a material of the third semiconductor layer and a material of the first semiconductor layer are the same;   wherein the plurality of nanopillars are located over the third semiconductor layer.   
     
     
         4 . The device according to  claim 1 , further comprising a substrate, the conductive layer being disposed on the substrate. 
     
     
         5 . The device according to  claim 1 , further comprising:
 a protective layer on the graphene layer.   
     
     
         6 . The device according to  claim 1 , wherein a transverse dimension of the nanopillars is 5-5000 nm. 
     
     
         7 . The device according to  claim 1 , wherein the material of the first semiconductor layer is the same as the material of the second semiconductor layer. 
     
     
         8 . The device according to  claim 1 , wherein a material of the first semiconductor layer is different than a material of the second semiconductor layer. 
     
     
         9 . The device according to  claim 1 , wherein a homogeneous PN junction is formed at an interface between the first semiconductor layer and the second semiconductor layer. 
     
     
         10 . The device according to  claim 2 , wherein the graphene layer is on the aluminum layer.

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