Method and apparatus for producing flexible oled device

Abstract

According to a flexible OLED device production method of the present disclosure, after an intermediate region (30i) and flexible substrate regions (30d) of a plastic film (30) of a multilayer stack (100) are divided from one another, the interface between the flexible substrate regions (30d) and a glass base (10) is irradiated with laser light. The multilayer stack (100) is separated into a first portion (110) and a second portion (120) while the multilayer stack (100) is in contact with a stage (212). The first portion (110) includes a plurality of OLED devices (1000) which are in contact with the stage (212). The OLED devices (1000) include a plurality of functional layer regions (20) and the flexible substrate regions (30d). The second portion (120) includes the glass base (10) and the intermediate region (30i).

1 . A method for producing a flexible OLED device, comprising:
 providing a multilayer stack which has a first surface and a second surface, the multilayer stack including
 a glass base which defines the first surface, 
 a plurality of functional layer regions each including a TFT layer and an OLED layer, 
 a synthetic resin film provided between the glass base and the plurality of functional layer regions and bound to the glass base, the synthetic resin film including a plurality of flexible substrate regions respectively supporting the plurality of functional layer regions and an intermediate region surrounding the plurality of flexible substrate regions, and 
 a protection sheet which covers the plurality of functional layer regions and which defines the second surface; 
   dividing the intermediate region and respective ones of the plurality of flexible substrate regions of the synthetic resin film from one another;   irradiating an interface between the plurality of flexible substrate regions of the synthetic resin film and the glass base with laser light; and   separating the multilayer stack into a first portion and a second portion by increasing a distance from a stage to the glass base while the second surface of the multilayer stack is kept in contact with the stage,   wherein the first portion of the multilayer stack includes a plurality of OLED devices which are in contact with the stage, and the plurality of OLED devices respectively include the plurality of functional layer regions and include the plurality of flexible substrate regions of the synthetic resin film, and   the second portion of the multilayer stack includes the glass base and the intermediate region of the synthetic resin film,   the method further comprising, after separating the multilayer stack into the first portion and the second portion, sequentially or concurrently performing a process on the plurality of OLED devices which are in contact with the stage, wherein the process includes at least one of: attaching a dielectric and/or electrically-conductive film to each of the plurality of OLED devices; cleaning or etching each of the plurality of OLED devices; and mounting an optical part and/or an electronic part to each of the plurality of OLED devices.   
     
     
         2 . The method of  claim 1 , wherein separating the multilayer stack into the first portion and the second portion is carried out while the stage holds the second surface of the multilayer stack. 
     
     
         3 . The method of  claim 2 , wherein irradiating the interface between the plurality of flexible substrate regions of the synthetic resin film and the glass base with the laser light is carried out while the stage holds the second surface of the multilayer stack. 
     
     
         4 . The method of  claim 1  further comprising, after separating the multilayer stack into the first portion and the second portion, adhering another protection sheet to the plurality of OLED devices which are in contact with the stage. 
     
     
         5 . A method for producing a flexible OLED device, comprising:
 providing a multilayer stack which has a first surface and a second surface, the multilayer stack including
 a glass base which defines the first surface, 
 a plurality of functional layer regions each including a TFT layer and an OLED layer, 
 a synthetic resin film provided between the glass base and the plurality of functional layer regions and bound to the glass base, the synthetic resin film including a plurality of flexible substrate regions respectively supporting the plurality of functional layer regions and an intermediate region surrounding the plurality of flexible substrate regions, and 
 a protection sheet which covers the plurality of functional layer regions and which defines the second surface; 
   dividing the intermediate region and respective ones of the plurality of flexible substrate regions of the synthetic resin film from one another;   irradiating an interface between the plurality of flexible substrate regions of the synthetic resin film and the glass base with laser light; and   separating the multilayer stack into a first portion and a second portion by increasing a distance from a stage to the glass base while the second surface of the multilayer stack is kept in contact with the stage,   wherein the first portion of the multilayer stack includes a plurality of OLED devices which are in contact with the stage, and the plurality of OLED devices respectively include the plurality of functional layer regions and include the plurality of flexible substrate regions of the synthetic resin film, and   the second portion of the multilayer stack includes the glass base and the intermediate region of the synthetic resin film,   the method further comprising, after separating the multilayer stack into the first portion and the second portion, adhering another protection sheet to the plurality of OLED devices which are in contact with the stage.   
     
     
         6 . The method of  claim 5  further comprising detaching from the stage the plurality of OLED devices which are bound to the another protection sheet. 
     
     
         7 . The method of  claim 6  further comprising sequentially or concurrently performing a process on the plurality of OLED devices which are bound to the another protection sheet,
 wherein the process includes at least one of: attaching a dielectric and/or electrically-conductive film to each of the plurality of OLED devices; cleaning or etching each of the plurality of OLED devices; and mounting an optical part and/or an electronic part to each of the plurality of OLED devices. 
 
     
     
         8 . An apparatus for producing a flexible OLED device, comprising:
 a stage for supporting a multilayer stack which has a first surface and a second surface, the multilayer stack including
 a glass base which defines the first surface, 
 a plurality of functional layer regions each including a TFT layer and an OLED layer, 
 a synthetic resin film provided between the glass base and the plurality of functional layer regions and bound to the glass base, the synthetic resin film including a plurality of flexible substrate regions respectively supporting the plurality of functional layer regions and an intermediate region surrounding the plurality of flexible substrate regions, and 
 a protection sheet which covers the plurality of functional layer regions and which defines the second surface, 
 the intermediate region and respective ones of the plurality of flexible substrate regions of the synthetic resin film being divided from one another; 
   a lift-off light irradiation unit for irradiating with laser light an interface between the plurality of flexible substrate regions of the synthetic resin film and the glass base in the multilayer stack supported by the stage, the lift-off light irradiation unit configured to decrease an irradiation intensity of the laser light for at least part of the intermediate region such that the irradiation intensity of the laser light is below a level required for delamination; and   an actuator for increasing a distance from the stage to the glass base while the stage holds the second surface of the multilayer stack by suction, thereby separating the multilayer stack into a first portion and a second portion,   wherein the first portion of the multilayer stack includes a plurality of OLED devices adhered by suction to the stage, and the plurality of OLED devices respectively include the plurality of functional layer regions and include the plurality of flexible substrate regions of the synthetic resin film, and   the second portion of the multilayer stack includes the glass base and the intermediate region of the synthetic resin film,   the stage includes
 a porous plate, and 
 a suction sheet placed on the porous plate, the suction sheet having a plurality of openings, and 
   the suction sheet includes a first region which is to be in contact with the plurality of OLED devices and a second region which is to face the intermediate region of the synthetic resin film, an aperture ratio of the first region being higher than an aperture ratio of the second region.   
     
     
         9 . An apparatus for producing a flexible OLED device, comprising:
 a stage for supporting a multilayer stack which has a first surface and a second surface, the multilayer stack including
 a glass base which defines the first surface, 
 a plurality of functional layer regions each including a TFT layer and an OLED layer, 
 a synthetic resin film provided between the glass base and the plurality of functional layer regions and bound to the glass base, the synthetic resin film including a plurality of flexible substrate regions respectively supporting the plurality of functional layer regions and an intermediate region surrounding the plurality of flexible substrate regions, and 
 a protection sheet which covers the plurality of functional layer regions and which defines the second surface, 
 the intermediate region and respective ones of the plurality of flexible substrate regions of the synthetic resin film being divided from one another; 
   a lift-off light irradiation unit for irradiating with laser light an interface between the plurality of flexible substrate regions of the synthetic resin film and the glass base in the multilayer stack supported by the stage, the lift-off light irradiation unit configured to decrease an irradiation intensity of the laser light for at least part of the intermediate region such that the irradiation intensity of the laser light is below a level required for delamination; and   an actuator for increasing a distance from the stage to the glass base while the stage holds the second surface of the multilayer stack by suction, thereby separating the multilayer stack into a first portion and a second portion,   wherein the first portion of the multilayer stack includes a plurality of OLED devices adhered by suction to the stage, and the plurality of OLED devices respectively include the plurality of functional layer regions and include the plurality of flexible substrate regions of the synthetic resin film, and   the second portion of the multilayer stack includes the glass base and the intermediate region of the synthetic resin film, wherein   a surface of the stage includes a first region which is to face the plurality of OLED devices and a second region which is to face the intermediate region of the synthetic resin film, and   suction in the first region is greater than suction in the second region.   
     
     
         10 . A suction sheet for use in the apparatus of  claim 8 , comprising:
 a first region which is to be in contact with the plurality of OLED devices; and   a second region which is to face the intermediate region of the synthetic resin film,   wherein an aperture ratio of the first region is higher than an aperture ratio of the second region.