Exchangeable laser resonator modules with angular adjustment

Abstract

In various embodiments, emitter modules include a laser source and (a) a refractive optic, (b) an output coupler, or (c) both a refractive optic and an output coupler. Either or both of these may be situated on mounts that facilitate two-axis rotation. The mount may be, for example, a conventional, rotatively adjustable “tip/tilt” mount or gimbal arrangement. In the case of the refractive optic, either the optic itself or the beam path may be adjusted; that is, the optic may be on a tip/tilt mount or the optic may be replaced with two or more mirrors each on tip/tilt mount.

What is claimed is: 
     
         1 .- 21 . (canceled) 
     
     
         22 . A method of processing a workpiece with a laser system comprising a plurality of emitter modules each having a forward face and producing an input beam, the emitter modules each comprising an output coupler and, optionally, a refractive optic for receiving and directing the input beam, the method comprising the steps of:
 combining the input beams from the emitters in an output beam;   rotatively adjusting the output coupler of each of the emitter modules about a pair of perpendicular coordinate axes parallel to the forward face of the emitter module until the output beam exhibits a target value of a beam parameter; and   processing the workpiece using the output beam.   
     
     
         23 . The method of  claim 22 , wherein the emitter modules each comprise a refractive optic and an output coupler. 
     
     
         24 . The method of  claim 22 , wherein the beam parameter is a beam shape, a spot size or a numerical aperture. 
     
     
         25 . The method of  claim 23 , wherein both the refractive optic and the output coupler of each of the emitter modules are rotatively adjustable. 
     
     
         26 . The method of  claim 23 , wherein the refractive optic or the output coupler of each of the emitter modules is rotatively adjustable. 
     
     
         27 . The method of  claim 23 , wherein at least one of the refractive optic or the output coupler of each of the emitter modules is rotatively adjustable on a tip/tilt mount. 
     
     
         28 . The method of  claim 23 , wherein the input beam of each emitter module passes through the associated refractive optic along a beam path, the beam path being adjustable about the perpendicular coordinate axes by a pair of mirrors. 
     
     
         29 . A laser delivery system for directing optical radiation onto a workpiece, the system comprising:
 a plurality of emitter modules each having a housing having a forward face and producing an input beam, the emitter modules each comprising (a) disposed within the housing, a plurality of laser beam sources each configured to emit a laser beam, (b) disposed within the housing, emitter-module optics configured to combine the laser beams into a combined beam, (c) disposed within the housing, a refractive optic for receiving and directing the combined beam, and (d) disposed within the housing, an output coupler configured to (i) receive the combined beam, (ii) reflect a first portion of the combined beam back to the emitter-module optics and thence to the plurality of laser beam sources, and (iii) transmit a second portion of the combined beam, from the forward face, as the input beam;   means for removably but securely coupling each of the emitter modules to the laser delivery system; and   beam-combining optics for receiving the input beams from the emitter modules and producing an output beam therefrom,   wherein in each of the emitter modules, the refractive optic is rotatively adjustable about a pair of perpendicular coordinate axes parallel to the forward face of the housing of the emitter module.   
     
     
         30 . The system of  claim 29 , wherein the refractive optic of each of the emitter modules is rotatively adjustable on a tip/tilt mount. 
     
     
         31 . The system of  claim 29 , wherein the combined beam of each emitter module passes through the associated refractive optic along a beam path, the beam path being adjustable about the perpendicular coordinate axes by a pair of mirrors. 
     
     
         32 . The system of  claim 29 , further comprising a controller for adjusting an angular position of at least one of the refractive optic or the output coupler. 
     
     
         33 . The system of  claim 32 , further comprising a sensor for sensing a parameter of the output beam, the controller being responsive to the sensor and adjusting, based on signals therefrom, the angular position of at least one of the refractive optic or the output coupler. 
     
     
         34 . The system of  claim 33 , wherein the signals are indicative of at least one beam parameter. 
     
     
         35 . The system of  claim 34 , wherein the at least one beam parameter is a beam shape, a spot size and/or a numerical aperture. 
     
     
         36 . The system of  claim 34 , wherein the controller is configured to continue adjusting the angular position until a target value of the at least one beam parameter is attained. 
     
     
         37 . The system of  claim 29 , wherein the emitter-module optics of each emitter module comprise:
 focusing optics for focusing the laser beams onto a dispersive element; and   the dispersive element for receiving and dispersing the received focused beams, thereby forming the combined beam,   wherein the combined beam is composed of multiple wavelengths.   
     
     
         38 . The system of  claim 29 , further comprising:
 an optical fiber; and   a fiber-optic module configured to couple the output beam into the optical fiber.   
     
     
         39 . The system of  claim 29 , wherein the beam-combining optics spatially stack the input beams, polarization-combine the input beams, or wavelength-combine the input beams.