Glass substrate, laminated substrate, laminated substrate manufacturing method, laminate, package, and glass substrate manufacturing method

Abstract

A glass substrate is laminated with a substrate containing silicon to thereby form a laminated substrate. The glass substrate has a concave surface and a convex surface and has one or more marks that distinguish between the concave surface and the convex surface.

1 - 22 . (canceled) 
     
     
         23 . A glass substrate to be laminated with a substrate containing silicon to thereby form a laminated substrate, the glass substrate having a concave surface and a convex surface,
 the glass substrate having one or more marks that distinguish between the concave surface and the convex surface,   wherein the one or more marks are marks formed on at least one of the concave surface and the convex surface, and   wherein the concave surface and the convex surface differ from each other in the number of the marks formed thereon.   
     
     
         24 . The glass substrate according to  claim 23 ,
 wherein the concave surface has the one or more marks and the convex surface has no mark.   
     
     
         25 . The glass substrate according to  claim 23 , wherein at least one of the one or more marks that distinguish between the concave surface and the convex surface is a depression. 
     
     
         26 . The glass substrate according to  claim 25 , wherein the depression has a shape of a letter or symbol. 
     
     
         27 . The glass substrate according to  claim 23 , wherein at least one of the concave surface and the convex surface has an area of 70-2,000 cm 2 . 
     
     
         28 . The glass substrate according to  claim 23 , which has a circular shape. 
     
     
         29 . The glass substrate according to  claim 23 , which has a Young's modulus of 65 GPa or higher. 
     
     
         30 . The glass substrate according to  claim 23 , which contains, as represented by mole percentage based on oxides, 0-0.1% of an alkali metal oxide. 
     
     
         31 . The glass substrate according to  claim 23 , which has a deviation of plate thickness of 15 μm or less. 
     
     
         32 . The glass substrate according to  claim 23 , which has a light-shielding film on at least one of the concave surface and the convex surface. 
     
     
         33 . A laminated substrate formed by pasting the convex surface of the glass substrate according to  claim 23  to a substrate containing silicon. 
     
     
         34 . A laminated substrate comprising the glass substrate according to  claim 23  and a substrate containing silicon, wherein a curved surface constituted of the convex surface or concave surface of the glass substrate and a curved surface constituted of a convex surface or a concave surface of the substrate containing silicon are pasted to each other so as to conform to each other. 
     
     
         35 . A laminate comprising the laminated substrate according to  claim 33  and another glass substrate that is pasted to the glass substrate. 
     
     
         36 . A package formed by packaging two or more glass substrates according to  claim 23 , wherein the glass substrates are packaged so that the convex surface of one of the glass substrates faces the concave surface of another glass substrate. 
     
     
         37 . A package formed by packaging two or more laminated substrates according to  claim 33 , wherein the laminated substrates are packaged so that the substrate containing silicon of one of the laminated substrates faces the concave surface of the glass substrate of another laminated substrate. 
     
     
         38 . A package formed by packaging two or more laminates according to  claim 35 , wherein the substrate containing silicon of one of the laminates faces the concave surface of the glass substrate of another laminate. 
     
     
         39 . The package according to  claim 36 , wherein the concave surface of the glass substrate is supported at four points by a supporting member. 
     
     
         40 . A process for producing the glass substrate according to  claim 23 , the process comprising:
 heating raw materials for glass to obtain molten glass;   forming the molten glass into a plate shape to obtain a glass ribbon;   slowly cooling the glass ribbon to obtain a cooled glass ribbon;   cutting the cooled glass ribbon to obtain an unmarked glass substrate;   distinguishing between a concave surface and a convex surface of the unmarked glass substrate; and   placing a mark on at least one of the concave surface and the convex surface to obtain the glass substrate.