Method and apparatus for manufacturing flexible light-emitting device

Abstract

According to a flexible light-emitting device production method of the present disclosure, after an intermediate region (30i) and flexible substrate regions (30d) of a plastic film (30) of a multilayer stack (100) are divided from one another, the interface between the flexible substrate regions (30d) and a glass base (10) is irradiated with lift-off light. The multilayer stack (100) is separated into a first portion (110) and a second portion (120) while the multilayer stack (100) is in contact with a stage (212). The first portion (110) includes a plurality of light-emitting devices (1000) which are in contact with the stage (212). The light-emitting devices (1000) include a plurality of functional layer regions (20) and the flexible substrate regions (30d). The second portion (120) includes the glass base (10) and the intermediate region (30i). The stage (212) has ejection holes in a region which is to face the intermediate region (30i), from which a fluid is ejected in the separation step.

1 . An apparatus for producing a flexible light-emitting device, comprising:
 a stage for supporting a multilayer stack which has a first surface and a second surface, the multilayer stack including
 a glass base which defines the first surface, 
 a plurality of functional layer regions each including a Thin Film Transistor (TFT) layer and a light-emitting device layer, 
 a synthetic resin film provided between the glass base and the plurality of functional layer regions and bound to the glass base, the synthetic resin film including a plurality of flexible substrate regions respectively supporting the plurality of functional layer regions and an intermediate region surrounding the plurality of flexible substrate regions, and 
 a protection sheet which covers the plurality of functional layer regions and which defines the second surface, 
 the intermediate region and respective ones of the plurality of flexible substrate regions of the synthetic resin film being divided from one another; 
   a lift-off light irradiation unit for irradiating with lift-off light an interface between the plurality of flexible substrate regions of the synthetic resin film and the glass base in the multilayer stack supported by the stage; and   an actuator for increasing a distance from the stage to the glass base while the stage is kept in contact with the second surface of the multilayer stack, thereby separating the multilayer stack into a first portion and a second portion,   wherein the first portion of the multilayer stack includes a plurality of light-emitting devices adhered by suction to the stage, and the plurality of light-emitting devices respectively include the plurality of functional layer regions and include the plurality of flexible substrate regions of the synthetic resin film,   the second portion of the multilayer stack includes the glass base and the intermediate region of the synthetic resin film, and   the stage has a plurality of ejection holes in a region which is to face the intermediate region of the synthetic resin film and, in separating the multilayer stack into the first portion and the second portion, a fluid is ejected from the plurality of ejection holes of the stage such that the intermediate region of the synthetic resin film is detached from the stage,   wherein the lift-off light irradiation unit includes an incoherent light source.   
     
     
         2 . An apparatus for producing a flexible light-emitting device, comprising:
 a stage for supporting a multilayer stack which has a first surface and a second surface, the multilayer stack including
 a glass base which defines the first surface, 
 a plurality of functional layer regions each including a Thin Film Transistor (TFT) layer and a light-emitting device layer, 
 a synthetic resin film provided between the glass base and the plurality of functional layer regions and bound to the glass base, the synthetic resin film including a plurality of flexible substrate regions respectively supporting the plurality of functional layer regions and an intermediate region surrounding the plurality of flexible substrate regions, and 
 a protection sheet which covers the plurality of functional layer regions and which defines the second surface, 
 the intermediate region and respective ones of the plurality of flexible substrate regions of the synthetic resin film being divided from one another; 
   a lift-off light irradiation unit for irradiating with lift-off light an interface between the plurality of flexible substrate regions of the synthetic resin film and the glass base in the multilayer stack supported by the stage; and   an actuator for increasing a distance from the stage to the glass base while the stage is kept in contact with the second surface of the multilayer stack, thereby separating the multilayer stack into a first portion and a second portion,   wherein the first portion of the multilayer stack includes a plurality of light-emitting devices adhered by suction to the stage, and the plurality of light-emitting devices respectively include the plurality of functional layer regions and include the plurality of flexible substrate regions of the synthetic resin film,   the second portion of the multilayer stack includes the glass base and the intermediate region of the synthetic resin film, and   the stage has a plurality of ejection holes in a region which is to face the intermediate region of the synthetic resin film and, in separating the multilayer stack into the first portion and the second portion, a fluid is ejected from the plurality of ejection holes of the stage such that the intermediate region of the synthetic resin film is detached from the stage,   wherein   the light-emitting device layer includes a plurality of arrayed micro Light Emitting Diodes (LEDs), and   the lift-off light irradiation unit includes a laser light source.