Anodization apparatus

Abstract

According to one embodiment, a anodization apparatus includes: a first process tank used for an anodization process on a first portion of a substrate; a second process tank provided inside of the first process tank and used for the anodization process on a second portion of the substrate; a first electrolyte supply unit configured to supply a first electrolyte to the first process tank; a second electrolyte supply unit configured to supply a second electrolyte to the second process tank; a retainer configured to retain the substrate; a first electrode provided above the first process tank and/or the second process tank; and a second electrode provided below the first process tank and the second process tank.

What is claimed is: 
     
         1 . An anodization apparatus comprising:
 a first process tank used for an anodization process on a first portion of a substrate;   a second process tank provided inside of the first process tank and used for the anodization process on a second portion of the substrate;   a first electrolyte supply unit configured to supply a first electrolyte to the first process tank;   a second electrolyte supply unit configured to supply a second electrolyte to the second process tank;   a holding part configured to hold the substrate;   a first electrode provided above the first process tank and/or the second process tank; and   a second electrode provided below the first process tank and the second process tank.   
     
     
         2 . The anodization apparatus according to  claim 1 , further comprising a third electrode provided inside the first electrode,
 wherein the first electrode is opposed to the first process tank and the third electrode is opposed to the second process tank.   
     
     
         3 . The anodization apparatus according to  claim 1 , wherein
 the first electrolyte supply unit is configured to produce the first electrolyte using at least a first liquid,   the first electrolyte supply unit includes:
 a first mixing tank configured to store the first electrolyte; 
 a first concentration sensor configured to monitor a concentration of the first electrolyte in the first mixing tank; and 
 a first supply controller configured to control a supply of the first liquid to the first mixing tank based on the first concentration sensor. 
   
     
     
         4 . The anodization apparatus according to  claim 3 , wherein
 the first electrolyte supply unit is configured to produce the first electrolyte using a second liquid recovered from the first process tank.   
     
     
         5 . The anodization apparatus according to  claim 1 , wherein
 the second electrolyte supply unit is configured to produce the second electrolyte using at least a third liquid,   the second electrolyte supply unit includes:
 a second mixing tank capable of storing the second electrolyte: 
 a second concentration sensor configured to monitor a concentration of the second electrolyte in the second mixing tank; and 
 a second supply controller configured to control a supply of the third liquid to the second mixing tank based on the second concentration sensor. 
   
     
     
         6 . The anodization apparatus according to  claim 5 , wherein
 the second electrolyte supply unit is configured to use a fourth liquid recovered from the first process tank to produce the second electrolyte.   
     
     
         7 . The anodization apparatus according to  claim 5 , wherein
 the second electrolyte supply unit is configured to produce the second electrolyte using a fifth liquid recovered from the second process tank.   
     
     
         8 . The anodization apparatus according to  claim 1 , wherein
 the first and second process tanks have a cylindrical shape, and an inner diameter of the second process tank is smaller than that of the first process tank.   
     
     
         9 . The anodization apparatus according to  claim 2 , further comprising:
 a first current source configured to supply a first current to the first electrode; and   a second current source configured to supply a second current to the third electrode.   
     
     
         10 . The anodization apparatus according to  claim 2 , further comprising:
 a third current source;   a first switch configured to electrically couple the third current source to the first electrode; and   a second switch configured to electrically couple the third current source to the third electrode.   
     
     
         11 . The anodization apparatus according to  claim 1 , further comprising:
 a third process tank provided between the first process tank and the first electrode, and/or between the second process tank and the first electrode; and   a third electrolyte supply unit configured to supply a third electrolyte to the third process tank.   
     
     
         12 . The anodization apparatus according to  claim 11 , wherein
 the third electrolyte supply unit is configured to produce the third electrolyte using at least a sixth liquid,   the third electrolyte supply unit includes:
 a third mixing tank configured to store the third electrolyte; 
 a third concentration sensor configured to monitor a concentration of the third electrolyte in the third mixing tank; and 
 a third supply controller configured to control a supply of the sixth liquid to the third mixing tank based on a result of the third concentration sensor. 
   
     
     
         13 . The anodization apparatus according to  claim 12 , wherein
 the third electrolyte supply unit is configured to produce the third electrolyte using a seventh liquid recovered from the third process tank.   
     
     
         14 . The anodization apparatus according to  claim 2 , further comprising:
 a third process tank provided between the second process tank and the first electrode;   a fourth process tank provided between the first process tank and the third electrode;   a third electrolyte supply unit configured to supply a third electrolyte to the third process tank; and   a fourth electrolyte supply unit configured to supply a fourth electrolyte to the fourth process tank.   
     
     
         15 . The anodization apparatus according to  claim 14 , wherein
 the third electrolyte supply unit is configured to produce the third electrolyte using at least a sixth liquid,   the third electrolyte supply unit includes:
 a third mixing tank configured to store the third electrolyte; 
 a third concentration sensor configured to monitor a concentration of the third electrolyte in the third mixing tank; and 
 a third supply controller configured to control a supply of the sixth liquid to the third mixing tank based on the third concentration sensor. 
   
     
     
         16 . The anodization apparatus according to  claim 15 , wherein
 the third electrolyte supply unit is configured to produce the third electrolyte using a seventh liquid recovered from the third process tank.   
     
     
         17 . An anodization apparatus comprising:
 a first process tank used for an anodization process on a substrate;   a first electrolyte supply unit configured to supply a first electrolyte to the first process tank;   a holding part configured to hold the substrate;   a first electrode provided above the first process tank;   a second electrode provided inside the first electrode; and   a third electrode opposed to the first and second electrodes and provided below the first process tank.   
     
     
         18 . The anodization apparatus according to  claim 17 , further comprising:
 a third process tank provided between the first process tank and the first electrode, and between the first process tank and the second electrode; and   a third electrolyte supply unit configured to supply a third electrolyte to the third process tank.   
     
     
         19 . The anodization apparatus according to  claim 17 , further comprising:
 a third process tank provided between the first process tank and the first electrode;   a fourth process tank provided between the first process tank and the second electrode;   a third electrolyte supply unit configured to supply a third electrolyte to the third process tank; and   a fourth electrolyte supply unit configured to supply a fourth electrolyte to the fourth process tank.