US2021288295A1PendingUtilityA1

Pixel defining layer, manufacturing method therefor, display substrate, and display device

Assignee: BOE TECHNOLOGY GROUP CO LTDPriority: May 11, 2017Filed: Apr 12, 2018Published: Sep 16, 2021
Est. expiryMay 11, 2037(~10.8 yrs left)· nominal 20-yr term from priority
Inventors:Yingying Song
H10K 71/40H10K 71/00H10K 59/173H01L 27/3246H01L 27/3283H01L 51/56H10K 71/135H10K 59/122
37
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Claims

Abstract

Provided are a pixel defining layer, a manufacturing method therefor, a display substrate, and a display device. The method includes: providing a base substrate; forming a lyophilic layer on the base substrate, the lyophilic layer including a top surface and a lateral surface; forming a lyophobic layer covering at least the top surface of the lyophilic layer and a surface covering layer covering at least a part of the lateral surface of the lyophilic layer, the part of the lateral surface being the part of the lateral surface in proximity to the base substrate; and removing the surface covering layer, thus exposing at least the part of the lateral surface in proximity to the base substrate and forming a pixel defining layer. The manufacturing method reduces the extent to which a solution climbs on the lateral surface, thus reducing the impact on film uniformity in a pixel region.

Claims

exact text as granted — not AI-modified
1 . A manufacturing method of a pixel defining layer, comprising:
 providing a base substrate;   forming a lyophilic layer on the base substrate, the lyophilic layer comprising a top surface and a side surface;   forming a lyophobic layer at least covering the top surface of the lyophilic layer, and forming a surface covering layer covering at least a portion of the side surface of the lyophilic layer, the portion of the side surface being a portion of the side surface close to the base substrate; and   removing the surface covering layer so that the at least a portion of the side surface close to the base substrate is exposed and a pixel defining layer is formed.   
     
     
         2 . The method according to  claim 1 , wherein the lyophilic layer is attractive to a solution dissolved with organic electroluminescence material, and the lyophobic layer is repellent to a solution dissolved with organic electroluminescence material. 
     
     
         3 . The method according to  claim 1 , wherein the lyophobic layer and the surface covering layer are integrally formed, and constitute a surface covering lyophobic layer which covers the top surface and the side surface of the lyophilic layer,
 forming the lyophilic layer on the base substrate, forming the lyophobic layer at least covering the top surface of the lyophilic layer and forming the surface covering layer covering at least a portion of the side surface of the lyophilic layer comprise:
 forming a lyophilic material layer on the base substrate; and 
 performing a lyophobic process to an exposed surface layer of the lyophilic material layer to obtain the surface covering lyophobic layer. 
   
     
     
         4 . The method according to  claim 3 , wherein performing the lyophobic process to an exposed surface layer of the lyophilic material layer comprises:
 forming an reactive coating layer on the exposed surface layer of the lyophilic material layer, and causing the reactive coating layer to react with the lyophilic material layer to obtain the surface covering lyophobic layer.   
     
     
         5 . The method according to  claim 1 , wherein the lyophobic layer and the surface covering layer are integrally formed, and constitute a surface covering lyophobic layer which covers the top surface and the side surface of the lyophilic layer,
 forming the lyophilic layer on the base substrate, forming the lyophobic layer at least covering the top surface of the lyophilic layer and forming the surface covering layer covering at least a portion of the side surface of the lyophilic layer comprise:   forming a first lyophilic material layer and a second lyophilic material layer covering a top surface and a side surface of the first lyophilic material layer, sequentially, on the base substrate, and a material of the first lyophilic material layer being different from a material of the second lyophilic material layer; and   forming an reactive coating layer configured to react with the second lyophilic material layer on an exposed surface layer of the second lyophilic material layer, and causing the reactive coating layer to react with the surface layer of the second lyophilic material layer to form the surface covering lyophobic layer,   wherein the first lyophilic material layer and an under layer of the second lyophilic material layer not reacted with the reactive coating layer constitute the lyophilic layer.   
     
     
         6 . The method according to  claim 1 , wherein forming the lyophilic layer on the base substrate, forming the lyophobic layer at least covering the top surface of the lyophilic layer and forming the surface covering layer covering at least a portion of the side surface of the lyophilic layer comprise:
 forming a first lyophilic material layer and a second lyophilic material layer covering a top surface of the first lyophilic material layer, sequentially, on the base substrate, and a material of the first lyophilic material layer being different from a material of the second lyophilic material layer;   forming the surface covering layer on a side surface of the first lyophilic material layer; and   forming an reactive coating layer configured to react with the second lyophilic material layer on an exposed surface layer of the second lyophilic material layer, and causing the reactive coating layer to, at least, react with the surface layer of the second lyophilic material layer,   wherein the first lyophilic material layer constitutes the lyophilic layer, and the second lyophilic material layer upon reacting with the reactive coating layer is the lyophobic layer; or, the first lyophilic material layer and an under layer of the second lyophilic material layer not reacted with the reactive coating layer constitute the lyophilic layer, and the surface layer of the second lyophilic material layer upon reacting with the reactive coating layer is the lyophobic layer.   
     
     
         7 . The method according to  claim 5 , wherein the second lyophilic material layer is made of silicon dioxide, and the reactive coating layer is made of hydrogen fluoride. 
     
     
         8 . The method according to  claim 7 , wherein a thickness of the second lyophilic material layer is 0.1 micron-0.5 micron. 
     
     
         9 . The method according to  claim 7 , wherein the first lyophilic material layer is made of polyimide. 
     
     
         10 . The method according to  claim 1 , wherein a height of the exposed side surface is at least 0.5 micron. 
     
     
         11 . The method according to  claim 1 , wherein forming the lyophilic layer on the base substrate, forming the lyophobic layer at least covering the top surface of the lyophilic layer and forming the surface covering layer covering at least a portion of the side surface of the lyophilic layer comprise:
 forming a lyophilic material layer on the base substrate;   providing the surface covering layer on a portion of a side surface of the lyophilic material layer close to the base substrate to form the surface covering layer covering the portion of the side surface of the lyophilic layer close to the base substrate; and   performing a lyophobic process to an exposed surface layer of the lyophilic material layer to form the lyophobic layer covering the top surface of the lyophilic layer and covering the portion of the side surface of the lyophilic layer far away from the base substrate.   
     
     
         12 . The method according to  claim 1 , wherein removing the surface covering layer by adopting a peeling method or an etching method. 
     
     
         13 . The method according to  claim 1 , wherein in the pixel defining layer, the lyophobic layer covers the top surface of the lyophilic layer and covers a portion of the side surface of the lyophilic layer far away from the base substrate. 
     
     
         14 . The method according to  claim 1 , wherein a side surface of the pixel defining layer comprises a lyophobic side surface close to the top surface and a lyophilic side surface far away from the top surface, and a ratio of a height of the lyophilic side surface to a height of the pixel defining layer is 1/3-2/3. 
     
     
         15 . The method according to  claim 14 , wherein the ratio of the height of the lyophilic side surface to the height of the pixel defining layer is greater than or equal to 1/2 and smaller than or equal to 2/3. 
     
     
         16 . A pixel defining layer manufactured by the method according to  claim 1 . 
     
     
         17 . A display substrate, comprising a base substrate and a pixel defining layer on the base substrate, the pixel defining layer being the pixel defining layer according to  claim 16 . 
     
     
         18 . A display device, comprising the display substrate according to  claim 17 . 
     
     
         19 . The display substrate according to  claim 17 , wherein in the pixel defining layer, the lyophobic layer covers the top surface of the lyophilic layer and covers a portion of the side surface of the lyophilic layer far away from the base substrate. 
     
     
         20 . The display substrate according to  claim 17 , wherein a side surface of the pixel defining layer comprises a lyophobic side surface close to the top surface and a lyophilic side surface far away from the top surface, and a ratio of a height of the lyophilic side surface to a height of the pixel defining layer is 1/3-2/3.

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