US2021288210A1PendingUtilityA1

Semiconductor device and method for manufacturing the same

Assignee: SEMICONDUCTOR ENERGY LABPriority: Sep 12, 2008Filed: May 28, 2021Published: Sep 16, 2021
Est. expirySep 12, 2028(~2.1 yrs left)· nominal 20-yr term from priority
H10D 30/6704H10D 30/6713H10D 30/031H10D 64/62H10D 62/10H10D 86/60H10D 30/6755H10D 99/00H10D 86/423H10H 20/062H01L 27/1225H01L 29/78618H01L 29/66969H01L 2924/0002H01L 29/7869H01L 33/0041
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Claims

Abstract

An object is to provide a semiconductor device including a thin film transistor with excellent electrical characteristics and high reliability and a method for manufacturing the semiconductor device with high mass productivity. A main point is to form a low-resistance oxide semiconductor layer as a source or drain region after forming a drain or source electrode layer over a gate insulating layer and to foiiii an oxide semiconductor film thereover as a semiconductor layer. It is preferable that an oxygen-excess oxide semiconductor layer be used as a semiconductor layer and an oxygen-deficient oxide semiconductor layer be used as a source region and a drain region.

Claims

exact text as granted — not AI-modified
1 . (canceled) 
     
     
         2 . A display device comprising:
 a first conductive layer;   a first insulating film over the first conductive layer;   a second conductive layer over the first insulating film; and   a second insulating film over the second conductive layer,   wherein the first conductive layer and the second conductive layer are provided outside a pixel portion,   wherein the first conductive layer is formed using a same material as a gate electrode of a transistor in the pixel portion,   wherein the first insulating film is formed using a same material as a gate insulating film of the transistor,   wherein the second conductive layer is formed using a same material as a source electrode and a drain electrode of the transistor, and   wherein a potential of the first conductive layer is in a floating state.   
     
     
         3 . The display device according to  claim 2 , wherein a width of the first conductive layer is larger than a width of the second conductive layer. 
     
     
         4 . The display device according to  claim 2 , further comprising a third conductive layer electrically connected to the second conductive layer. 
     
     
         5 . The display device according to  claim 2 , wherein the transistor comprises a semiconductor layer. 
     
     
         6 . The display device according to  claim 5 , wherein the semiconductor layer comprises indium, gallium, and zinc.

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