US2021287966A1PendingUtilityA1

Semiconductor package and method of making

Assignee: TAIWAN SEMICONDUCTOR MFG CO LTDPriority: May 18, 2012Filed: Jun 1, 2021Published: Sep 16, 2021
Est. expiryMay 18, 2032(~5.8 yrs left)· nominal 20-yr term from priority
H10W 90/756H10W 90/724H10W 90/00H10W 74/00H10W 72/241H10W 72/0198H10W 90/701H10W 74/117H10W 74/114H10W 74/111H10W 74/019H10W 70/635H10W 70/09H10W 70/40H10W 72/00H01L 23/495H01L 24/19H01L 21/568H01L 25/105H01L 2224/48091H01L 23/3121H01L 23/3128H01L 23/49827H01L 2224/48257H01L 2924/181H01L 2224/16225H01L 2224/48247H01L 23/49811H01L 23/3107H01L 2224/12105
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Claims

Abstract

A semiconductor package includes a substrate. The semiconductor package further includes a plurality of metal pillars on a top surface of the substrate. The semiconductor package further includes a semiconductor component on the substrate, wherein the semiconductor component includes one or more dies, and the semiconductor component has a top surface. The semiconductor package further includes a mold compound encapsulating the plurality of metal pillars and the semiconductor component, wherein the mold compound has a top surface above the top surface of the semiconductor component. The semiconductor package further includes an interposer coupled to the plurality of metal pillars.

Claims

exact text as granted — not AI-modified
What is claimed is: 
     
         1 . A semiconductor package comprising:
 a substrate;   a plurality of metal pillars on a top surface of the substrate;   a semiconductor component on the substrate, wherein the semiconductor component comprises one or more dies, and the semiconductor component has a top surface;   a mold compound encapsulating the plurality of metal pillars and the semiconductor component, wherein the mold compound has a top surface above the top surface of the semiconductor component; and   an interposer coupled to the plurality of metal pillars.   
     
     
         2 . The semiconductor package of  claim 1 , wherein each of the plurality of metal pillars includes a solder cap. 
     
     
         3 . The semiconductor package of  claim 2 , wherein a top surface of the solder cap is co-planar with the top surface of the mold compound. 
     
     
         4 . The semiconductor package of  claim 1 , wherein a height of each of the plurality of metal pillars ranges from about 10 microns μm to about 600 μm. 
     
     
         5 . The semiconductor package of  claim 1 , further comprising an interconnect between the semiconductor component and the substrate. 
     
     
         6 . The semiconductor package of  claim 1 , wherein a thickness of the mold compound is greater than a height of a metal pillar of the plurality of metal pillars. 
     
     
         7 . The semiconductor package of  claim 1 , wherein the mold compound directly contacts the semiconductor component. 
     
     
         8 . The semiconductor package of  claim 1 , wherein the mold compound directly contacts each of the plurality of metal pillars. 
     
     
         9 . A semiconductor package comprising:
 a substrate;   a plurality of metal pillars on a top surface of the substrate;   a semiconductor component on the substrate, wherein the semiconductor component comprises one or more dies, and the semiconductor component has a first height;   a mold compound encapsulating the plurality of metal pillars and the semiconductor component, wherein the mold compound has a second height greater than the first height;   an interposer coupled to the plurality of metal pillars; and   a first plurality of solder balls on a bottom surface of the substrate.   
     
     
         10 . The semiconductor package of  claim 9 , wherein each of the plurality of metal pillars as the second height. 
     
     
         11 . The semiconductor package of  claim 9 , wherein each of the plurality of metal pillars includes a solder cap. 
     
     
         12 . The semiconductor package of  claim 9 , further comprising an interconnect between the semiconductor component and the substrate. 
     
     
         13 . The semiconductor package of  claim 9 , wherein the plurality of metal pillars is between the substrate and the interposer. 
     
     
         14 . The semiconductor package of  claim 9 , further comprising a second plurality of solder balls on an opposite side of the interposer from the plurality of metal pillars. 
     
     
         15 . The semiconductor package of  claim 9 , wherein the mold compound directly contacts the semiconductor component. 
     
     
         16 . A method of making a semiconductor package, the method comprising:
 forming a plurality of metal pillars on a top surface of a substrate;   attaching a semiconductor component to the substrate, wherein the semiconductor component comprises one or more dies;   depositing a mold compound, wherein the mold compound encapsulates the plurality of metal pillars and the semiconductor component, and the mold compound is thicker than the semiconductor component;   attaching an interposer to the plurality of metal pillars; and   forming a plurality of solder balls on a bottom surface of the substrate.   
     
     
         17 . The method of  claim 16 , wherein depositing the mold compound comprises depositing the mold compound above a top surface of the semiconductor component. 
     
     
         18 . The method of  claim 16 , wherein forming the plurality of metal pillars comprises forming the plurality of metal pillars including a solder cap. 
     
     
         19 . The method of  claim 16 , wherein attaching the interposer comprises attaching the interposer to a surface of the plurality of metal pillars opposite the substrate. 
     
     
         20 . The method of  claim 16 , wherein attaching the semiconductor component to the substrate comprises attaching the semiconductor component to an interconnect structure on the top surface of the substrate.

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