Vapor-deposition mask, vapor-deposition method and method for manufacturing organic el display apparatus

Abstract

To obtain a vapor-deposition mask that suppresses heat conduction at a frame of the vapor-deposition mask and make the weight thereof lighter to achieve upsizing of the vapor-deposition mask and carry out high-definition vapor-deposition cheaply, the frame (15) to which a mask main body (10) is bonded is formed as a sandwich structure (150) in which end plate (152) is bonded onto an opposing surface of at least a part of a core portion (151) in the vapor-deposition mask disclosed in the present embodiment.

1 . A method for manufacturing a vapor-deposition mask, the method comprising:
 forming a plate-shaped body having a predetermined width and attached with adhesive layers, each of the adhesive layers having a length of w which is a predetermined length and being arranged with an interval of 3 w;   forming a lamination by overlapping the plate-shaped body in a plurality such that the adhesive layers in adjacent plate-shaped bodies are continuous in a direction of the length of w of the adhesive layers at a plan view;   adhering the adjacent plate-shaped bodies to each other using the adhesive layers;   holding and drawing out a lowermost plate-shaped body and an uppermost plate-shaped body of the lamination, thereby forming a gap between the adjacent plate-shaped bodies at a portion in which the adjacent plate-shaped bodies are not adhered;   forming a columnar-shaped core portion regularly having gaps at an end surface being perpendicular to a surface of the plate-shaped body;   forming a columnar-shaped body having a sandwich structure formed by bonding an end plate onto opposing surfaces of at least a part of the gaps of the columnar-shaped core portion;   forming a frame in a rectangular shape by assembling the columnar-shaped body in a plurality; and   joining a mask main body to the frame to form the vapor-deposition mask.   
     
     
         2 . The method according to  claim 1 , wherein a number of the plurality of plate-shaped bodies is at least three. 
     
     
         3 . The method according to  claim 1 , wherein, at a pair of sides of the frame in which the mask main body is joined, the gap is formed such that the gap faces an outside of the frame from an inside surrounded by the frame. 
     
     
         4 . The method according to  claim 1 , wherein, at one pair of sides of the frame in which the mask main body is joined with tension, the gap is formed such that the gap faces an outside of the frame from an inside surrounded by the frame, and, at another pair of sides of the frame being different from the one pair of sides, the gap is formed such that the gap faces the outside from the inside, and each of the other pair of sides is a sandwich structure surrounded by a peripheral end plate at an entire side surface in a longitudinal direction of the columnar-shaped core portion. 
     
     
         5 . The method according to  claim 1 , wherein the frame is formed of a metal material and a sectional shape of the gap of the columnar-shaped core portion is hexagonal. 
     
     
         6 . The method according to  claim 1 , wherein the mask main body is a hybrid mask in which a resin film on which an aperture pattern is formed is bonded to a metal supporting layer comprising an aperture formed so as to not close the aperture pattern of the resin film. 
     
     
         7 . The method according to  claim 1 , wherein the mask main body is a metal mask comprising a thin metal plate on which an aperture pattern is formed. 
     
     
         8 . The method according to  claim 1 , wherein a peripheral end plate formed with a metal plate is bonded to an entire outer peripheral wall of the frame enclosing the gap. 
     
     
         9 . The method according to  claim 1 , wherein the gap of the columnar-shaped core portion is formed in a broadly-defined honeycomb structure. 
     
     
         10 . A method of vapor-deposition, the method comprising:
 arranging a substrate to be vapor-deposited and the vapor-deposition mask manufactured by the method for manufacturing a vapor-deposition mask according to  claim 1  such that they overlap each other; and,   depositing a vapor-deposited material onto the substrate to be vapor-deposited by causing the vapor-deposited material to fly away from a vapor-deposition source arranged at a distance from the vapor-deposition mask.   
     
     
         11 . The method of vapor deposition according to  claim 10 , wherein the substrate to be vapor-deposited and the vapor-deposition mask are arranged such that the frame of the vapor-deposition mask is positioned in an upright position such that the frame intersects a horizontal plane, and the gap of an upper side or a lower side in the frame faces an outside of the frame from an inside surrounded by the frame. 
     
     
         12 . A method for manufacturing an organic-EL display apparatus, the method comprising:
 forming at least a thin film transistor (TFT) and a first electrode on a supporting substrate;   vapor-depositing an organic material on the supporting substrate using the method of vapor deposition according to  claim 10  to form an organic deposition layer; and   forming a second electrode on the organic deposition layer.