Vapor-deposition mask, vapor-deposition method and method for manufacturing organic el display apparatus

Abstract

A rigid material whose linear expansion coefficient is small and whose relative density is small is used to provide a vapor-deposition mask using a lightweight and highly dimension-accurate frame. A frame (15) of the vapor-deposition mask disclosed in accordance with the present embodiment is formed with a carbon-fiber reinforced plastic (CFRP).

1 . A vapor-deposition mask comprising:
 a mask main body at which an aperture pattern is formed; and   a frame to which at least a portion of a peripheral edge of the mask main body is joined to hold the mask main body at a certain state,   wherein the frame is formed into a sandwich structure with a columnar-shaped core portion enclosing a gap, and a peripheral end plate covering surroundings of a side surface including a surface exposing the gap of the columnar-shaped core portion, the columnar-shaped core portion being formed with a carbon-fiber reinforced plastic having silicon carbide as a reinforcing fiber, the peripheral end plate being formed with a carbon-fiber reinforced plastic plate or metal plate being pasted to the columnar-shaped core portion.   
     
     
         2 . The vapor-deposition mask according to  claim 1 , wherein the frame has a frame-like rectangular shape and, at one pair of sides of the frame in which the mask main body is joined with tension, the gap is formed such that the gap faces an outside of the frame from an inside surrounded by the frame, and, at another pair of sides of the frame being different from the one pair of sides of the frame, the gap is formed such that the gap faces the outside from the inside. 
     
     
         3 . The vapor-deposition mask according to  claim 1 , wherein the gap of the columnar-shaped core portion is formed in a hexagonal shape in a sectional view. 
     
     
         4 . The vapor-deposition mask according to  claim 1 , wherein the gap of the columnar-shaped core portion is formed in a broadly-defined honeycomb structure. 
     
     
         5 . The vapor-deposition mask according to  claim 1 , wherein the mask main body is a hybrid mask in which a resin film on which the aperture pattern is formed is bonded to a metal supporting layer comprising an aperture formed so as not to close the aperture pattern of the resin film. 
     
     
         6 . The vapor-deposition mask according to  claim 1 , wherein the mask main body is a metal mask comprising a thin metal plate on which the aperture pattern is formed. 
     
     
         7 . The vapor-deposition mask according to  claim 1 , wherein a peripheral end plate covering an entire side wall of the frame enclosing the gap is formed with a metal plate. 
     
     
         8 . The vapor-deposition mask according to  claim 1 , wherein carbon fiber fillers mixed in a resin of the carbon-fiber reinforced plastic are aligned in the direction of the gap. 
     
     
         9 . The vapor-deposition mask according to  claim 1 , wherein an outer surface of the columnar-shaped core portion is plated. 
     
     
         10 . The vapor-deposition mask according to  claim 1 , wherein the columnar-shaped core portion and at least a part of the peripheral end plate are integrally formed. 
     
     
         11 . A method of vapor deposition, the method comprising:
 arranging a substrate to be vapor-deposited and the vapor-deposition mask according to  claim 1  such that they overlap each other; and   depositing a vapor-deposited material onto the substrate to be vapor-deposited by causing the vapor-deposited material to fly away from a vapor-deposition source arranged at a distance from the vapor-deposition mask.   
     
     
         12 . The method of vapor deposition according to  claim 11 , wherein the frame of the vapor-deposition mask has a frame-like rectangular shape and the frame is positioned in an upright position such that the frame intersects a horizontal plane, and the gap of an upper side or a lower side in the frame faces an outside of the frame from an inside surrounded by the frame. 
     
     
         13 . A method of manufacturing an organic-EL display apparatus, the method comprising:
 forming at least a thin film transistor (TFT) and a first electrode on a supporting substrate;   vapor-depositing an organic material on the supporting substrate using the method of vapor deposition according to  claim 11  to form an organic deposition layer; and   forming a second electrode on the organic deposition layer.