Vapor deposition mask, vapor deposition mask preparation body, method for producing vapor deposition mask, and method for producing organic semiconductor element

Abstract

There are provided a vapor deposition mask capable of satisfying both high definition and lightweight in upsizing and forming a vapor deposition pattern with high definition while securing strength, a method for producing a vapor deposition mask and a vapor deposition mask preparation body capable of simply producing the vapor deposition mask, and furthermore, a method for producing an organic semiconductor element capable of producing an organic semiconductor element with high definition. A metal mask 10 in which a plurality of slits 15 are provided and a resin mask 20 are stacked. Openings 25 required for composing a plurality of screens are provided in the resin mask 20. The openings 25 correspond to a pattern to be produced by vapor deposition. Each of the slits 15 is provided at a position of overlapping with an entirety of at least one screen.

1 . A method for producing a vapor deposition mask, comprising:
 a step of preparing a resin plate-equipped metal mask which includes a metal mask in which a plurality of slits are provided and a resin plate stacked with each other; and   a resin mask forming step of forming openings required for composing a plurality of screens in the resin plate by irradiation with laser from the metal mask side, wherein   as the metal mask, a metal mask in which the slit is provided at a position of overlapping with an entirety of at least one screen out of the plurality of screens is used.   
     
     
         2 . A method for producing a vapor deposition mask, comprising:
 a step of preparing a resin plate-equipped metal mask which includes a metal mask in which one through hole is provided and a resin plate stacked with each other; and   a resin mask forming step of forming a plurality of openings at a position of overlapping with the one through hole in the resin plate by irradiation of laser from the metal mask side.   
     
     
         3 . The method for producing a vapor deposition mask according to  claim 1 , wherein after fixing the resin plate-equipped metal mask onto a frame, the resin mask forming step is performed. 
     
     
         4 . The method for producing a vapor deposition mask according to  claim 2 , wherein after fixing the resin plate-equipped metal mask onto a frame, the resin mask forming step is performed.