Coating apparatus and method for use thereof

Abstract

A cathode arc evaporator of metals and alloys for coating in a vacuum chamber, including an ignition device adapted for initiating an arc discharge, at least one anode, a water-cooled, consumable tubular cathode arranged along a longitudinal axis and rotatable thereabout, an electromagnetic system disposed within the cathode and adapted for forming an arch-like magnetic field, formed by at least one electromagnetic coil, in the vicinity of a surface of the cathode, resulting in a displaceable cathode spot, which is steerable by the magnetic field, at least one sensor responsive to the proximity of the cathode spot, and a controller which is configured to switch the polarity of the current of the at least one electromagnetic coil in response to the signals received from the at least one sensor.

1 . A cathode arc evaporator of metals and alloys for coating in a vacuum chamber, comprising:
 an ignition device adapted for initiating an arc discharge,   at least one anode,   a water-cooled, consumable tubular cathode arranged along a longitudinal axis and rotatable thereabout,   an electromagnetic system disposed within said cathode and adapted for forming an arch-like magnetic field, formed by at least one electromagnetic coil, in the vicinity of a surface of said cathode, resulting in a displaceable cathode spot, which is steerable by said magnetic field,   at least one sensor located within said consumable tubular cathode and responsive to the proximity of said cathode spot,   and a controller which is configured to switch the polarity of the current of said at least one electromagnetic coil in response to the signals received from the at least one sensor.   
     
     
         2 . The cathode arc evaporator of metals and alloys for coating in vacuum according to  claim 1 , and wherein the steering of the cathode spot occurs in reciprocating manner, thus increasing the efficiency of the cathode material utilization. 
     
     
         3 .- 4 . (canceled) 
     
     
         5 . The cathode arc evaporator of metals and alloys for coating in vacuum, according to  claim 1  and wherein said at least one sensor is a magnetic sensor disposed in close vicinity of an inner wall of said cathode under the track of said cathode spot. 
     
     
         6 . The cathode arc evaporator of metals and alloys for coating in vacuum, according to  claim 1  and wherein said at least one sensor is an acoustic sensor disposed in close vicinity of an inner wall of said cathode under the track of said cathode spot. 
     
     
         7 . The cathode arc evaporator of metals and alloys for coating in vacuum, according to  claim 1  and wherein said at least one sensor includes a first sensor and a second sensor, which are operative alternately. 
     
     
         8 . The cathode arc evaporator of metals and alloys for coating in vacuum, according to  claim 7  and wherein said at least one sensor is a double Langmuir probe. 
     
     
         9 . The cathode arc evaporator of metals and alloys for coating in vacuum, according to  claim 1  and wherein said at least one sensor is an electromagnetic sensor disposed in close vicinity of an inner wall of said cathode under the track of said cathode spot.