Liquid droplet measurement method and liquid droplet measurement device, and method and apparatus for manufacturing device

Abstract

A method for measuring a liquid droplet includes: setting a translucent sample substrate having formed thereon a measurement target liquid droplet on a measurement table having a surface with a recess, the sample substrate being set on the measurement table in an orientation that a side on a back of the liquid droplet corresponds in position to the recess; applying light to the liquid droplet formed on the sample substrate set on the measurement table, imaging the liquid droplet with an imaging section, and measuring quantities of reflected light from the sample substrate and the liquid droplet with the sample substrate having a thickness larger than a wavelength of the light, and equal to or smaller than a focal length of the liquid droplet; and determining a volume or a surface shape of the liquid droplet using the reflected light quantities measured by the imaging section.

1 . A method for measuring a liquid droplet, the method comprising:
 setting a translucent sample substrate having formed thereon a measurement target liquid droplet on a measurement table having a surface with a recess, the sample substrate being set on the measurement table in such an orientation that a side on a back of the liquid droplet corresponds in position to the recess;   applying light to the liquid droplet formed on the sample substrate set on the measurement table, imaging the liquid droplet with an imaging section, and measuring quantities of reflected light from the sample substrate and the liquid droplet with the sample substrate having a thickness larger than a wavelength of the light, and equal to or smaller than a focal length of the liquid droplet; and   determining a volume or a surface shape of the liquid droplet using the reflected light quantities measured by the imaging section.   
     
     
         2 . A method for measuring a liquid droplet, the method comprising:
 setting a translucent sample substrate on a measurement table having a surface with a recess;   forming a liquid droplet on a surface of the sample substrate by ejecting a functional material toward the measurement table in a position corresponding to the recess, the functional material being ejected through a head having a nozzle of interest for evaluation;   imaging the liquid droplet on the sample substrate using an imaging section, and measuring quantities of reflected light from the sample substrate and the liquid droplet;   applying light to the liquid droplet formed on the sample substrate set on the measurement table, imaging the liquid droplet with the imaging section, and measuring quantities of reflected light from the sample substrate and the liquid droplet with the sample substrate having a thickness larger than a wavelength of the light, and equal to or smaller than a focal length of the liquid droplet; and   determining a volume or a surface shape of the liquid droplet using the reflected light quantities measured by the imaging section, and evaluating the nozzle of the head.   
     
     
         3 . A method for manufacturing a device, the method comprising the following operations that are performed before or after the liquid droplet measurement method of  claim 2 :
 setting a print target on the measurement table; and   ejecting the functional material onto the print target through the head having a nozzle of interest for evaluation to produce the print target.   
     
     
         4 . A method for measuring a liquid droplet according to  claim 1 , wherein the focal length of the liquid droplet is a distance at which the incident light on a convex side of the liquid droplet converges in a range having a center at an apex of the liquid droplet. 
     
     
         5 . A method for measuring a liquid droplet according to  claim 4 , wherein the range is a pixel size derived from a width of a sensor of a camera in the imaging section, and a magnification of a lens in the imaging section. 
     
     
         6 . A method for measuring a liquid droplet according to  claim 1 , wherein the translucent sample substrate has a refractive index N of 1.4≤N≤1.6. 
     
     
         7 . A method for measuring a liquid droplet according to  claim 1 , wherein a single transparent dummy substrate, or a plurality of transparent dummy substrates of different thicknesses is disposed between the translucent sample substrate and the measurement table. 
     
     
         8 . A method for measuring a liquid droplet according to  claim 7 , wherein the translucent sample substrate has a surface forming a water-repellent polymer film. 
     
     
         9 . A method for measuring a liquid droplet according to  claim 1 , wherein
 a measurement table is provided, having a surface with the non-concave recess therein and a separate suction passage for holding the translucent sample substrate via suction to suction-fix the translucent sample substrate to the measurement table, the suction passage being spaced from the non-concave recess,   the non-concave recess is formed by walls of the measurement table without openings therein, and   the walls of the measurement table, the non-concave recess and the translucent sample substrate form a sealed space when the translucent sample substrate is suction-fixed to the measurement table.   
     
     
         10 . A method for measuring a liquid droplet according to  claim 1 ,
 wherein the translucent sample substrate has a thickness larger than a wavelength of the light, and equal to or smaller than a focal length of the liquid droplet,   wherein the translucent sample substrate is arranged on the non-concave recess,   wherein the translucent sample substrate is irradiated with light to measure the amount of reflected light from the translucent sample substrate and the liquid droplet, and   wherein a medium in contact with the surface of the liquid droplet and a medium in contact with a rear surface of the translucent sample substrate are both air and have the same refractive index.