Vapor deposition mask, frame-equipped vapor deposition mask, vapor deposition mask preparation body, vapor deposition pattern forming method, method for producing organic semiconductor element, and method for producing organic el display

Abstract

There is provided a vapor deposition mask including: a resin mask including a resin mask opening corresponding to a pattern to be produced by vapor deposition; and a metal layer partially positioned on one surface of the resin mask.

1 . A frame-equipped vapor deposition mask comprising:
 a frame and a plurality of vapor deposition masks fixed to the frame, wherein   each of the vapor deposition masks comprises a resin mask including a resin mask opening corresponding to a pattern to be produced by vapor deposition, and isolated multiple metal layers partially positioned on one surface of the resin mask and being completely detached from one another,   each of the vapor deposition masks has a quadrangular shape including a long side and a short side,   on one surface of the resin mask, at least one of the metal layers are arranged at each ends of the resin mask in the long side direction, and is a band-shaped body extending along the short side of the resin mask, and   on said one surface of the resin mask, a region thereof overlapping the frame is defined as a peripheral edge part and a region not overlapping the frame is defined as a non-peripheral edge part, and said at least one of the metal layers is positioned at least on a portion of the peripheral edge part and on at least on a portion of the non-peripheral edge part, and the entirety of a long side of said at least one of the metal layers overlaps the peripheral edge part.   
     
     
         2 . The frame-equipped vapor deposition mask according to  claim 1 , wherein
 one of the plurality of vapor deposition masks is in contact with one other vapor deposition mask.   
     
     
         3 . The frame-equipped vapor deposition mask according to  claim 1 , wherein
 one of the plurality of vapor deposition masks is not in contact with one other vapor deposition mask.   
     
     
         4 . A frame-equipped vapor deposition mask preparation body for producing a frame-equipped vapor deposition mask comprising:
 a frame and a plurality of vapor deposition mask preparation bodies fixed to the frame, wherein   each of the vapor deposition mask preparation bodies comprises a resin plate before a resin mask opening corresponding to a pattern to be produced by vapor deposition is formed, and isolated multiple metal layers partially positioned on one surface of the resin plate and being completely detached from one another, the resin plate has a quadrangular shape including a long side and a short side,   on one surface of the resin plate, at least one of the metal layers is arranged at each ends of the resin plate in the long side direction, and is a band-shaped body extending along the short side of the resin plate, and   on said one surface of the resin plate, a region thereof overlapping the frame is defined as a peripheral edge part and a region not overlapping the frame is defined as a non-peripheral edge part, and said at least one of the metal layers is positioned at least on a portion of the peripheral edge part and on at least a portion of the non-peripheral edge part, and the entirety of the long side of said at least one of the metal layers overlaps the peripheral edge part.   
     
     
         5 . The frame-equipped vapor deposition mask preparation body according to  claim 4 , wherein
 one of the plurality of vapor deposition mask preparation bodies is in contact with one other vapor deposition mask preparation body.   
     
     
         6 . The frame-equipped vapor deposition mask preparation body according to  claim 4 , wherein
 one of the plurality of vapor deposition mask preparation bodies is not in contact with one other vapor deposition mask preparation body.   
     
     
         7 . A vapor deposition pattern forming method for forming a vapor deposition pattern on a vapor deposition target using a frame-equipped vapor deposition mask, wherein
 the frame-equipped vapor deposition mask is the frame-equipped vapor deposition mask according to  claim 1 .   
     
     
         8 . A method for producing an organic semiconductor element, comprising
 a vapor deposition pattern forming step of forming a vapor deposition pattern on a vapor deposition target using a frame-equipped vapor deposition mask, wherein   the frame-equipped vapor deposition mask used in the vapor deposition pattern forming step is the frame-equipped vapor deposition mask according to  claim 1 .   
     
     
         9 . A method for producing an organic EL display, wherein the organic semiconductor element produced by the method for producing an organic semiconductor element according to  claim 7  is used.