Sample observation apparatus

Abstract

A sample observation apparatus includes a light source unit, an illumination optical system, an observation optical system, a light detection element, a scanning unit, a holding member, and an image processing device. A light spot is formed by the illumination optical system. The scanning unit moves the light spot and the holding member relative to each other. A pupil of the observation optical system and the light detection element are positioned at a position conjugate to a pupil position of the illumination optical system. The image processing device generates an image of a sample based on a predetermined image and a filter, and the predetermined image is an image based on a signal output from the light detection element. The filter includes a first region and a second region, and a value in the first region is greater than a value in the second region.

1 . A sample observation apparatus comprising:
 a light source unit;   an illumination optical system;   an observation optical system;   a light detection element;   a scanning unit;   a holding member; and   an image processing device, wherein   light emitted from the light source unit is incident on the illumination optical system,   a light spot is formed by the illumination optical system,   from a position where the light spot is formed, light is incident on the observation optical system,   light emerged from the observation optical system is received by the light detection element,   the scanning unit moves the light spot and the holding member relative to each other,   the light detection element includes a plurality of photoelectric conversion elements arranged in a two-dimensional array,   a pupil of the observation optical system and the light detection element are positioned at a position conjugate to a pupil position of the illumination optical system,   the image processing device generates an image of a sample based on a predetermined image and a filter,   the predetermined image is an image based on a signal output from the light detection element when the sample is placed on the holding member,   the filter includes a first region and a second region, and   a value in the first region is greater than a value in the second region.   
     
     
         2 . The sample observation apparatus according to  claim 1 , wherein
 the first region is a circular region, and   the second region is positioned outside the first region.   
     
     
         3 . The sample observation apparatus according to  claim 1 , wherein
 the first region is a semi-circular region, and   the second region is positioned outside the first region.   
     
     
         4 . The sample observation apparatus according to  claim 1 , wherein
 the filter includes a third region,   the first region is an annular region,   the second region is positioned outside the first region, and   the third region is positioned inside the first region.   
     
     
         5 . The sample observation apparatus according to  claim 1 , wherein
 the first region is positioned outside the second region, and   the second region is a circular region.   
     
     
         6 . The sample observation apparatus according to  claim 1 , wherein
 a phase film is disposed at the pupil position of the illumination optical system,   the first region corresponds to a region of an image of the phase film at the pupil position of the observation optical system,   the second region is a region positioned inside the first region, and   a region positioned outside the first region is a third region.   
     
     
         7 . The sample observation apparatus according to  claim 6 , wherein
 the first region is determined by a brightness in a range of 3% or more and 30% or less of a maximum brightness,   the maximum brightness is a maximum brightness in an image of the pupil of the illumination optical system, and   the image of the pupil of the illumination optical system is formed at the pupil position of the observation optical system.   
     
     
         8 . The sample observation apparatus according to  claim 1 , wherein the image processing device changes the filter in accordance with a relative position between the light spot and the holding member. 
     
     
         9 . The sample observation apparatus according to  claim 1 , wherein
 the image processing device has a plurality of the filters,   one filter is selected from among the filters in accordance with an observation method, and   an image of the sample is generated using the selected filter.