Optical Filter Device, Optical Module, Electronic Apparatus, And MEMS Device

Abstract

An optical filter device includes a wavelength variable interference filter that has a fixed substrate provided with a fixed reflective film and a movable substrate provided with a movable reflective film, a casing that has an inner space for storing the wavelength variable interference filter therein, and a fixation portion that fixes the wavelength variable interference filter to the casing. In addition, the fixation portion is provided between a side surface of the fixed substrate and an inner surface of the casing.

What is claimed is: 
     
         1 . An optical filter device comprising:
 a wavelength variable interference filter that includes:
 a first substrate; 
 a first reflective film fixed to the first substrate; 
 a second substrate; and 
 a second reflective film provided to the second substrate, 
 wherein the first substrate has a first pair of major surfaces and a plurality of first side surfaces extending the between the first pair of major surfaces, 
 the second substrate includes a movable portion, a holding portion that holds the movable portion and permits the movable portion to move, and the second reflective film is provided on the movable portion, and 
 the first substrate and the second substrate are fixed with respect to each other so that the first reflective film and the second reflective film face each other; 
   a peripheral wall that covers the plurality of the first side surfaces of the first substrate; and   at least one adhesive fixing the wavelength variable interference filter to the peripheral wall,   wherein the at least one adhesive is in contact with one single first side surface of the first substrate, the wavelength variable interference filter is fixed only to the peripheral wall only by the at least one adhesive, and the at least one adhesive is configured to minimize deflection of the first substrate along one of the major surfaces of the first pair of major surfaces of the first substrate that is perpendicular to the one single first side surface.   
     
     
         2 . The optical filter device according to  claim 1 ,
 wherein the one single first side surface is planar, and   the at least one adhesive is provided on the one single first side surface.   
     
     
         3 . The optical filter device according to  claim 1 ,
 wherein the at least one adhesive is provided at a single sub-portion of the one single first side surface.   
     
     
         4 . The optical filter device according to  claim 1 ,
 wherein the at least one adhesive is provided at a plurality of spaced apart sub-portions of the one single first side surface.   
     
     
         5 . A MEMS device comprising:
 a MEMS element that includes:
 a first substrate; and 
 a second substrate, 
 wherein the first substrate has a first pair of major surfaces and a plurality of first side surfaces extending the between the first pair of major surfaces, and 
 the second substrate includes a movable portion, and a holding portion that holds the movable portion and permits the movable portion to move; 
   a peripheral wall that covers the plurality of the first side surfaces of the first substrate; and   at least one adhesive that fixes the MEMS element to the peripheral wall,   wherein the at least one adhesive is in contact with one single first side surface of the first substrate, the MEMS element is fixed only to the peripheral wall only by the at least one adhesive, and the at least one adhesive is configured to minimize deflection of the first substrate along one of the major surfaces of the first pair of major surfaces of the first substrate that is perpendicular to the one single first side surface.   
     
     
         6 . An optical filter device comprising:
 a casing including a peripheral wall; and   a wavelength variable interference filter positioned within the inner space of the casing, the interference filter including:
 a first substrate; 
 a first reflective film fixed to the first substrate; 
 a second substrate; and 
 a second reflective film provided on the second substrate, 
 wherein the first substrate has a first pair of major surfaces and a plurality of first side surfaces extending the between the first pair of major surfaces, 
 the second substrate includes a movable portion, a holding portion that holds the movable portion and permits the movable portion to move, and the second reflective film is provided on the movable portion, and 
 the first substrate and the second substrate are fixed with respect to each other so that the first reflective film and the second reflective film face each other, 
   wherein the peripheral wall covers the plurality of the first side surfaces of the first substrate, and   wherein at least one adhesive is in contact with one single first side surface of the first substrate, the wavelength variable interference filter is fixed only to the peripheral wall only by the at least one adhesive, and the at least one adhesive is configured to minimize deflection of the first substrate along one of the major surfaces of the first pair of major surfaces of the first substrate that is perpendicular to the one single first side surface.   
     
     
         7 . The optical filter device according to  claim 6 ,
 wherein the first substrate includes a projection portion that projects toward the peripheral wall farther than the second substrate in a plan view, and   the at least one adhesive in contact with the one single first side surface is provided at the projecting portion.   
     
     
         8 . The optical filter device according to  claim 6 ,
 wherein the at least one adhesive is provided at a single sub-portion of the one single first side surface.   
     
     
         9 . The optical filter device according to  claim 6 ,
 wherein the at least one adhesive is provided at a plurality of spaced apart sub-portions of the one single first side surface.   
     
     
         10 . The optical filter device according to  claim 6 ,
 wherein a pair of the plurality of first side surfaces are parallel, and   the at least one adhesive is provided at each of the first side surfaces that are parallel.   
     
     
         11 . The optical filter device according to  claim 6 ,
 wherein the at least one adhesive is provided at each of the first side surfaces that are parallel are symmetrical.   
     
     
         12 . The optical filter device according to  claim 6 ,
 wherein a pair of the plurality of first side surfaces intersect with one another at a corner, and   the at least one adhesive is provided at the corner.   
     
     
         13 . An optical filter device comprising:
 a wavelength variable interference filter that includes:
 a first substrate; 
 a first reflective film fixed to the first substrate; 
 a second substrate; and 
 a second reflective film provided to the second substrate, 
 wherein the first substrate has a first pair of major surfaces and a plurality of first side surfaces extending the between the first pair of major surfaces, 
 the second substrate includes a movable portion, a holding portion that holds the movable portion and permits the movable portion to move, and the second reflective film is provided on the movable portion, and 
 the first substrate and the second substrate are fixed with respect to each other so that the first reflective film and the second reflective film face each other; 
   a peripheral wall that covers the plurality of the first side surfaces of the first substrate; and   at least one adhesive fixing the wavelength variable interference filter to the peripheral wall,   wherein the at least one adhesive is in contact with one single first side surface of the first substrate, the wavelength variable interference filter is fixed only to the peripheral wall only by the at least one adhesive, the at least one adhesive is configured to minimize deflection of the first substrate along one of the major surfaces of the first pair of major surfaces of the first substrate that is perpendicular to the one single first side surface, and another one of the plurality of first side surfaces is spaced apart from the peripheral wall in a cross-sectional view of the optical filter device.