Air physical quantity sensor

Abstract

A sensor body contains a sensor element in a body recess opened at a body opening. A sensor substrate has a mounting surface on which a circuit element for processing a detection signal is mounted and holds the sensor body on the mounting surface. A sensor cover has a cover window penetrating between an intake passage and the body opening and covers the sensor body. A sensor filter is interposed between the sensor body and the sensor cover. A potting resin body is cured on the mounting surface so as to seal the circuit element. The sensor cover is embedded in the potting resin body on the outer peripheral side of the sensor body.

1 . An air physical quantity sensor configured to detect a specific physical quantity related to air flowing in a flow passage, the air physical quantity sensor comprising:
 a sensor element configured to output a detection signal in accordance with the specific physical quantity;   a sensor body having a body recess opening at a body opening and being configured to contain the sensor element in the body recess;   a sensor substrate holding the sensor body and being connected to the sensor element;   a terminal that is connected to the sensor element and exerts a heat insulating effect;   a sensor cover having a cover window penetrating between the flow passage and the body opening, wherein the sensor cover is configured to cover the sensor body; and   a sensor filter interposed between the sensor body and the sensor cover, wherein the sensor filter is configured to filter the air flowing from the flow passage into the body recess through the body window and the body opening, wherein   the sensor filter extends along a virtual plane to form a filter peripheral portion,   the body opening and the cover window are accommodated in a filter region on the inner peripheral side of a contour of the filter outer peripheral portion in a projection view with respect to the virtual plane, and   the body opening is housed in the cover window in the projection view.   
     
     
         2 . The air physical quantity sensor according to  claim 1 , further comprising:
 a resin body in which the sensor cover is embedded on an outer peripheral side of the sensor body.   
     
     
         3 . The air physical quantity sensor according to  claim 1 , wherein
 the sensor cover has a bottomed cup shape opened at a cover opening, and includes a cover bottom wall portion, and a cover peripheral wall portion surrounding the sensor body and the sensor filter from the outer peripheral side,   the filter is held between the cover bottom wall portion and the sensor body, and   the cover peripheral wall portion is embedded in the potting resin body from the cover opening side.   
     
     
         4 . The air physical quantity sensor according to  claim 2 , wherein
 the sensor cover has an anchor portion protruding from the cover peripheral wall portion, and   the anchor portion is embedded in the potting resin body.   
     
     
         5 . The air physical quantity sensor according to  claim 4 , wherein
 the sensor cover covers the entire outer peripheral side of the sensor body with the cover peripheral wall portion.   
     
     
         6 . The air physical quantity sensor according to  claim 4 , wherein
 the sensor cover has a through hole portion penetrating the cover peripheral wall portion, and   the potting resin body is provided to extend from the through hole portion between the sensor body and the cover peripheral wall portion.   
     
     
         7 . The air physical quantity sensor according to  claim 4 , wherein
 the through hole portion passes through the cover peripheral wall portion between an end portion on the cover opening side and an end portion on the cover bottom wall portion side.   
     
     
         8 . The air physical quantity sensor according to  claim 7 , wherein
 the sensor cover has an overhanging portion overhanging toward an inner peripheral side of the cover window.   
     
     
         9 . The air physical quantity sensor according to  claim 1 , wherein
 the sensor filter extends along a virtual plane to form a filter peripheral portion, and   the body opening and the cover window are accommodated in a filter region on the inner peripheral side of a contour of the filter outer peripheral portion in projection view with respect to the virtual plane.   
     
     
         10 . The air physical quantity sensor according to  claim 1 , wherein
 the sensor filter is joined to at least one of the sensor body or the sensor cover.   
     
     
         11 . The air physical quantity sensor according to  claim 1 , wherein
 the sensor filter filters the air flowing through an intake passage as the flow passage in an internal combustion engine.