V-shape seal band for a semiconductor processing chamber

Abstract

Implementations described herein provide a substrate support assembly that includes a seal band. The seal band has a ring shaped body. The ring shaped body has an inner surface, a top surface, and a bottom surface. Each of the top surface and the bottom surface extend from the inner surface at a first angle of more than 110° from the inner surface. The seal band also has an outer surface that has an indent formed therein. The outer surface connects the top surface to the bottom surface. A second angle is formed between an imaginary line normal to the inner surface and the bottom surface. The second angle is between about 10° and about 30°. The ring shaped body has a cross-sectional profile forming a V-shape.

What is claimed is: 
     
         1 . A seal band, comprising:
 a ring shaped body, the ring shaped body comprising:
 an inner surface; 
 a top surface and a bottom surface, each of the top surface and the bottom surface extend from the inner surface at a first angle of more than 110° from the inner surface; and 
 an outer surface having an indent formed therein, the outer surface connecting the top surface to the bottom surface, a second angle formed between an imaginary line normal to the inner surface and the bottom surface, the second angle between about 10° and about 30°, and wherein the ring shaped body has a cross-sectional profile forming a V-shape. 
   
     
     
         2 . The seal band of  claim 1 , wherein the outer surface of the ring shaped body comprises:
 a diameter between about 206 mm and about 460 mm.   
     
     
         3 . The seal band of  claim 1 , wherein the outer surface of the ring shaped body comprises:
 a diameter of between about 306 mm and about 310 mm.   
     
     
         4 . The seal band of  claim 3 , wherein the ring shaped body is elongateable to about 160% prior to breaking. 
     
     
         5 . The seal band of  claim 1 , wherein the ring shaped body has a Shore D hardness of between about 60 and 80. 
     
     
         6 . The seal band of  claim 1 , wherein the ring shaped body has a tensile strength between about 10 Mpa and about 15 Mpa. 
     
     
         7 . The seal band of  claim 1 , wherein the ring shaped body is formed from tetrafluoro ethylene/propylene or a perfluoroelastomer. 
     
     
         8 . The seal band of  claim 7 , wherein a material of the seal band is void of fillers and resistant to fluorine and oxygen chemistries. 
     
     
         9 . The seal band of  claim 1 , wherein the ring shaped body has a Shore D hardness of between about 60 and 80, a tensile strength between about 10 Mpa and about 15 Mpa, and a depth of the indent of between about 0.30 mm and about 0.50 mm. 
     
     
         10 . The seal band of  claim 1 , wherein the indent has a depth between about 0.30 mm and about 0.50 mm. 
     
     
         11 . An elastomer seal band, comprising:
 a ring shaped body, the ring shaped body comprising:
 an inner surface; 
 a top surface and a bottom surface, each of the top surface and the bottom surface extend from the inner surface at a first angle of more than 110° from the inner surface; and 
 an outer surface having an indent formed therein, the outer surface connecting the top surface to the bottom surface, a second angle formed between an imaginary line normal to the inner surface and the bottom surface, the second angle between about 10° and about 30°, wherein the ring shaped body further includes:
 a vertical height defined as a vertical distance between an intersection of the outer surface and the top surface, and an intersection of the outer surface and the bottom surface, and 
 a horizontal length defined as a horizontal distance between the outer surface and the inner surface, and wherein the vertical height is greater than a horizontal length, wherein the ring shaped body has a cross-sectional profile forming a V-shape. 
 
   
     
     
         12 . The elastomer seal band of  claim 11 , wherein the outer surface of the ring shaped body comprises:
 a diameter between about 206 mm and about 460 mm.   
     
     
         13 . The elastomer seal band of  claim 11 , wherein the outer surface of the ring shaped body comprises:
 a diameter of between about 306 mm and about 310 mm.   
     
     
         14 . The elastomer seal band of  claim 13 , wherein the ring shaped body elongateable to about 160% prior to breaking. 
     
     
         15 . The elastomer seal band of  claim 11 , wherein the ring shaped body has a Shore D hardness of between about 60 and 80. 
     
     
         16 . The elastomer seal band of  claim 11 , wherein the ring shaped body has a tensile strength between about 10 Mpa and about 15 Mpa. 
     
     
         17 . An elastomer seal band comprising:
 a ring shaped body with an outer diameter between about 306 mm and about 310 mm, the ring shaped body formed from a perfluoroelastomer void of fillers having a Shore D hardness between about 60 and 80 and a tensile strength between about 10 Mpa and about 15 Mpa, the ring shaped body comprising:
 an inner surface; 
 a top surface and a bottom surface, each of the top surface and the bottom surface extend from the inner surface at an angle of more than 110° from the inner surface; and 
 an outer surface having an indent formed therein, the outer surface connecting the top surface to the bottom surface, wherein the indent forms a profile in the elastomer seal band having a V-shape. 
   
     
     
         18 . The elastomer seal band of  claim 17 , wherein the outer surface of the ring shaped body comprises:
 a diameter between about 206 mm and about 460 mm.   
     
     
         19 . The elastomer seal band of  claim 17 , wherein the indent has a depth between about 0.30 mm and about 0.50 mm. 
     
     
         20 . The elastomer seal band of  claim 17 , wherein a compression load on the elastomer seal band at 0° Celsius is about 0.23 N/mm, at 25° Celsius the compression load on the elastomer seal band is about 0.26 N/mm, and at 50° Celsius the compression load on the elastomer seal band is about 0.15 N/mm.